JPH0158120U - - Google Patents
Info
- Publication number
- JPH0158120U JPH0158120U JP15303587U JP15303587U JPH0158120U JP H0158120 U JPH0158120 U JP H0158120U JP 15303587 U JP15303587 U JP 15303587U JP 15303587 U JP15303587 U JP 15303587U JP H0158120 U JPH0158120 U JP H0158120U
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- silicon substrate
- differential pressure
- pair
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
第１図は本考案の１実施例の構成を示す射視図
、第２図は第１に示す実施例の組み立てを説明す
る説明図、第３図は第１図に示す実施例の動作を
説明する説明図、第４図は本考案の第２の実施例
の構成を示す縦断面図、第５図は本考案の第３の
実施例の構成を示す縦断面図、第６図は従来の差
圧流量計の構成を示す縦断面図である。
１０，１１，２０…流体管路、１４，２３，３
０…オリフイス板、１７…差圧変換器、１８，２
６，３４，３６，４２…シリコン基板、２４，２
５…ピエゾ抵抗素子、３１，３２…ガラス基板、
３３…絞り、３７，３８…薄肉部。
FIG. 1 is a perspective view showing the configuration of one embodiment of the present invention, FIG. 2 is an explanatory diagram illustrating the assembly of the first embodiment, and FIG. 3 is an illustration of the operation of the embodiment shown in FIG. 4 is a vertical sectional view showing the configuration of the second embodiment of the present invention, FIG. 5 is a vertical sectional view showing the configuration of the third embodiment of the present invention, and FIG. 6 is the conventional one. FIG. 10, 11, 20...fluid pipe line, 14, 23, 3
0... Orifice plate, 17... Differential pressure converter, 18, 2
6, 34, 36, 42...Silicon substrate, 24, 2
5... Piezoresistance element, 31, 32... Glass substrate,
33... Aperture, 37, 38... Thin wall portion.
Claims (1)
体に対して流れの抵抗となる突起部が形成された
シリコン基板と他のシリコン基板とをこの突起部
が形成された側を他のシリコン基板と対向するよ
うに配置しガラス板を介してこれ等を相互に接合
して流体通路を形成し、この突起部の近傍であつ
て前記突起部に対して前記流体通路の上下のいず
れかの前記シリコン基板に一対のピエゾ抵抗素子
が拡散などにより形成され、この一対のピエゾ抵
抗素子の出力により前記突起部の上下流の差圧を
検出することを特徴とする差圧流量計。 At least one of the two silicon substrates has a protrusion formed on its center surface that acts as a flow resistance to the fluid to be measured, and the other silicon substrate is connected to the other silicon substrate, with the side on which the protrusion is formed facing the other silicon substrate. They are arranged so as to face each other and are bonded to each other via a glass plate to form a fluid passage, and the silicone material is placed in the vicinity of the protrusion and either above or below the fluid passage with respect to the protrusion. A differential pressure flowmeter characterized in that a pair of piezoresistive elements are formed on a substrate by diffusion or the like, and a differential pressure upstream and downstream of the protrusion is detected by the output of the pair of piezoresistive elements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15303587U JPH0158120U (en) | 1987-10-06 | 1987-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15303587U JPH0158120U (en) | 1987-10-06 | 1987-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158120U true JPH0158120U (en) | 1989-04-11 |
Family
ID=31428509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15303587U Pending JPH0158120U (en) | 1987-10-06 | 1987-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158120U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008501117A (en) * | 2004-05-24 | 2008-01-17 | ホスピラ・インコーポレイテツド | Combined flow, bubble, and occlusion detector |
-
1987
- 1987-10-06 JP JP15303587U patent/JPH0158120U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008501117A (en) * | 2004-05-24 | 2008-01-17 | ホスピラ・インコーポレイテツド | Combined flow, bubble, and occlusion detector |
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