JPS63196556U - - Google Patents
Info
- Publication number
- JPS63196556U JPS63196556U JP8833487U JP8833487U JPS63196556U JP S63196556 U JPS63196556 U JP S63196556U JP 8833487 U JP8833487 U JP 8833487U JP 8833487 U JP8833487 U JP 8833487U JP S63196556 U JPS63196556 U JP S63196556U
- Authority
- JP
- Japan
- Prior art keywords
- backscattered
- electron beam
- electron
- backscattered electron
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 17
- 238000010894 electron beam technology Methods 0.000 claims description 15
- 230000004075 alteration Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8833487U JPS63196556U (enExample) | 1987-06-08 | 1987-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8833487U JPS63196556U (enExample) | 1987-06-08 | 1987-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63196556U true JPS63196556U (enExample) | 1988-12-19 |
Family
ID=30946355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8833487U Pending JPS63196556U (enExample) | 1987-06-08 | 1987-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63196556U (enExample) |
-
1987
- 1987-06-08 JP JP8833487U patent/JPS63196556U/ja active Pending