JPS6354244U - - Google Patents
Info
- Publication number
- JPS6354244U JPS6354244U JP14805386U JP14805386U JPS6354244U JP S6354244 U JPS6354244 U JP S6354244U JP 14805386 U JP14805386 U JP 14805386U JP 14805386 U JP14805386 U JP 14805386U JP S6354244 U JPS6354244 U JP S6354244U
- Authority
- JP
- Japan
- Prior art keywords
- scanning electrodes
- ion implantation
- implantation device
- target
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14805386U JPS6354244U (enExample) | 1986-09-26 | 1986-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14805386U JPS6354244U (enExample) | 1986-09-26 | 1986-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6354244U true JPS6354244U (enExample) | 1988-04-12 |
Family
ID=31061974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14805386U Pending JPS6354244U (enExample) | 1986-09-26 | 1986-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6354244U (enExample) |
-
1986
- 1986-09-26 JP JP14805386U patent/JPS6354244U/ja active Pending