JPS6319580U - - Google Patents
Info
- Publication number
- JPS6319580U JPS6319580U JP11383586U JP11383586U JPS6319580U JP S6319580 U JPS6319580 U JP S6319580U JP 11383586 U JP11383586 U JP 11383586U JP 11383586 U JP11383586 U JP 11383586U JP S6319580 U JPS6319580 U JP S6319580U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- normally open
- normally closed
- pump
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 4
- 230000002159 abnormal effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11383586U JPH0441187Y2 (fr) | 1986-07-24 | 1986-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11383586U JPH0441187Y2 (fr) | 1986-07-24 | 1986-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6319580U true JPS6319580U (fr) | 1988-02-09 |
| JPH0441187Y2 JPH0441187Y2 (fr) | 1992-09-28 |
Family
ID=30996013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11383586U Expired JPH0441187Y2 (fr) | 1986-07-24 | 1986-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441187Y2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066555A (ja) * | 2004-08-25 | 2006-03-09 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| JP2008157689A (ja) * | 2006-12-21 | 2008-07-10 | Bridgestone Corp | 電子線照射装置用煙検出装置 |
-
1986
- 1986-07-24 JP JP11383586U patent/JPH0441187Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066555A (ja) * | 2004-08-25 | 2006-03-09 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| JP4509697B2 (ja) * | 2004-08-25 | 2010-07-21 | 株式会社日立国際電気 | 基板処理装置 |
| JP2008157689A (ja) * | 2006-12-21 | 2008-07-10 | Bridgestone Corp | 電子線照射装置用煙検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441187Y2 (fr) | 1992-09-28 |
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