JPS6319571U - - Google Patents
Info
- Publication number
- JPS6319571U JPS6319571U JP11373686U JP11373686U JPS6319571U JP S6319571 U JPS6319571 U JP S6319571U JP 11373686 U JP11373686 U JP 11373686U JP 11373686 U JP11373686 U JP 11373686U JP S6319571 U JPS6319571 U JP S6319571U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- material gas
- injector
- discharge port
- disperses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- 239000006185 dispersion Substances 0.000 claims description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11373686U JPS6319571U (enExample) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11373686U JPS6319571U (enExample) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6319571U true JPS6319571U (enExample) | 1988-02-09 |
Family
ID=30995825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11373686U Pending JPS6319571U (enExample) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6319571U (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004127853A (ja) * | 2002-10-07 | 2004-04-22 | Sekisui Chem Co Ltd | プラズマ表面処理装置の電極構造 |
| JP2012031490A (ja) * | 2010-08-02 | 2012-02-16 | Ulvac Japan Ltd | プラズマ処理装置及び前処理方法 |
| JP2012084238A (ja) * | 2010-10-06 | 2012-04-26 | Ulvac Japan Ltd | プラズマ処理装置及び前処理方法 |
| JP2016008348A (ja) * | 2014-06-26 | 2016-01-18 | 住友金属鉱山株式会社 | ガス放出ユニット及びこれを具備する成膜装置 |
-
1986
- 1986-07-23 JP JP11373686U patent/JPS6319571U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004127853A (ja) * | 2002-10-07 | 2004-04-22 | Sekisui Chem Co Ltd | プラズマ表面処理装置の電極構造 |
| JP2012031490A (ja) * | 2010-08-02 | 2012-02-16 | Ulvac Japan Ltd | プラズマ処理装置及び前処理方法 |
| JP2012084238A (ja) * | 2010-10-06 | 2012-04-26 | Ulvac Japan Ltd | プラズマ処理装置及び前処理方法 |
| JP2016008348A (ja) * | 2014-06-26 | 2016-01-18 | 住友金属鉱山株式会社 | ガス放出ユニット及びこれを具備する成膜装置 |
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