JPS63195216U - - Google Patents
Info
- Publication number
- JPS63195216U JPS63195216U JP8614187U JP8614187U JPS63195216U JP S63195216 U JPS63195216 U JP S63195216U JP 8614187 U JP8614187 U JP 8614187U JP 8614187 U JP8614187 U JP 8614187U JP S63195216 U JPS63195216 U JP S63195216U
- Authority
- JP
- Japan
- Prior art keywords
- projecting
- condensing lens
- diffraction grating
- measurement
- servo mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8614187U JPS63195216U (en, 2012) | 1987-06-02 | 1987-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8614187U JPS63195216U (en, 2012) | 1987-06-02 | 1987-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195216U true JPS63195216U (en, 2012) | 1988-12-15 |
Family
ID=30942180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8614187U Pending JPS63195216U (en, 2012) | 1987-06-02 | 1987-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195216U (en, 2012) |
-
1987
- 1987-06-02 JP JP8614187U patent/JPS63195216U/ja active Pending
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