JPS6139289Y2 - - Google Patents

Info

Publication number
JPS6139289Y2
JPS6139289Y2 JP18515181U JP18515181U JPS6139289Y2 JP S6139289 Y2 JPS6139289 Y2 JP S6139289Y2 JP 18515181 U JP18515181 U JP 18515181U JP 18515181 U JP18515181 U JP 18515181U JP S6139289 Y2 JPS6139289 Y2 JP S6139289Y2
Authority
JP
Japan
Prior art keywords
light
scale
reflected
phase
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18515181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5889810U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981185151U priority Critical patent/JPS5889810U/ja
Publication of JPS5889810U publication Critical patent/JPS5889810U/ja
Application granted granted Critical
Publication of JPS6139289Y2 publication Critical patent/JPS6139289Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1981185151U 1981-12-11 1981-12-11 光学式スケ−ル読取装置 Granted JPS5889810U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981185151U JPS5889810U (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981185151U JPS5889810U (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS5889810U JPS5889810U (ja) 1983-06-17
JPS6139289Y2 true JPS6139289Y2 (en, 2012) 1986-11-11

Family

ID=29985943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981185151U Granted JPS5889810U (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS5889810U (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3633574A1 (de) * 1986-10-02 1988-04-14 Heidenhain Gmbh Dr Johannes Lichtelektrische winkelmesseinrichtung
JP2019211360A (ja) * 2018-06-06 2019-12-12 ファナック株式会社 エンコーダ

Also Published As

Publication number Publication date
JPS5889810U (ja) 1983-06-17

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