JPS63193440A - Shadow mask alloy plate and shadow mask - Google Patents
Shadow mask alloy plate and shadow maskInfo
- Publication number
- JPS63193440A JPS63193440A JP2239687A JP2239687A JPS63193440A JP S63193440 A JPS63193440 A JP S63193440A JP 2239687 A JP2239687 A JP 2239687A JP 2239687 A JP2239687 A JP 2239687A JP S63193440 A JPS63193440 A JP S63193440A
- Authority
- JP
- Japan
- Prior art keywords
- shadow mask
- plane
- ray diffraction
- alloy plate
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 30
- 239000000956 alloy Substances 0.000 title claims abstract description 30
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 16
- 238000010894 electron beam technology Methods 0.000 claims abstract description 16
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 11
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 6
- 238000010180 surface X-ray diffraction Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 description 8
- 238000005098 hot rolling Methods 0.000 description 7
- 238000005097 cold rolling Methods 0.000 description 5
- 238000005096 rolling process Methods 0.000 description 5
- 238000004220 aggregation Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005242 forging Methods 0.000 description 3
- 238000001953 recrystallisation Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 229910016523 CuKa Inorganic materials 0.000 description 1
- 229910002555 FeNi Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrodes For Cathode-Ray Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
(産業上の利用分野)
本発明は、カラーテレビ用受像管に使用されるシャドウ
マスクに関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a shadow mask used in a color television picture tube.
(従来の技術)
カラーテレビ用受像管に使用されるシャドウマスクは、
三色蛍光面に正確な電子ビームスポットを投影する機能
を有する。トクため、電子ビーム通過孔の相対位置、孔
径及び孔形状が画質に直接的な影響を及ぼし、電子ビー
ム通過孔の高い加工程度が要求される。また、散乱電子
の発生防止のため、電子ビーム通過孔の蛍光面と対向す
る面を半球状に面取り加工するという特殊な加工も必要
である。これらの加工精度が低いと、ドーミングにより
画質低下を招く。(Prior art) Shadow masks used in color television picture tubes are
It has the ability to project an accurate electron beam spot onto a three-color phosphor screen. Therefore, the relative position, diameter, and shape of the electron beam passage hole have a direct effect on image quality, and a high degree of machining of the electron beam passage hole is required. Furthermore, in order to prevent the generation of scattered electrons, a special process is required in which the surface of the electron beam passage hole facing the fluorescent screen is chamfered into a hemispherical shape. If these processing precisions are low, image quality will deteriorate due to doming.
従来、このようなシャドウマスクの加工はシャドウマス
ク原板にエツチングによって細長状の電子通過孔を形成
していた。Conventionally, such shadow masks have been processed by forming elongated electron passing holes by etching on a shadow mask original plate.
一方、近年、テレビ画面の′きめの細かさ”に対する一
般的要求が高まり、通信方式でも高品位テレビ方式の開
発が進められている。従って、受像管においても解像度
の向上の観点から、シャドウマスクに更に微細な電子ビ
ーム通過孔を形成することが要求される。また、高精細
となるシャドウマスクの熱膨張による電子ビーム通過孔
の位置ずれの問題が生じ、これを解決するためにFe
−Ni系アンバー合金の使用が検討されている。しかし
ながら、かかる状況下では従来余り問題となっていなか
った問題点がクローズアップさ九る。その1つとして、
圧延で薄肉化したシャドウマスク原板をエツチングによ
り微細な電子ビーム通過孔を開孔した際、この孔が均一
にならないという欠点があった。シャドウマスク原板の
板面に(100)面をそろえることで孔の形状が均一と
なることを見出し、特願昭57−147700号、特願
昭60−106024号。On the other hand, in recent years, the general demand for finer details on TV screens has increased, and the development of high-definition TV systems is progressing even in communication systems.Therefore, from the perspective of improving the resolution of picture tubes, shadow masks are being used. It is required to form an even finer electron beam passing hole.In addition, due to thermal expansion of the high-definition shadow mask, the problem of positional deviation of the electron beam passing hole arises, and to solve this problem, Fe
-The use of a Ni-based amber alloy is being considered. However, under such circumstances, problems that have not been much of an issue in the past have come into focus. One of them is
When fine electron beam passing holes are etched into a shadow mask original plate whose thickness has been thinned by rolling, there is a drawback that the holes are not uniform. It was discovered that the shape of the holes could be made uniform by aligning the (100) plane on the plate surface of the shadow mask original plate, and the results were published in Japanese Patent Application No. 57-147700 and No. 60-106024.
特願昭58−19085号、特願昭60−73847号
で開示した。This was disclosed in Japanese Patent Application No. 58-19085 and Japanese Patent Application No. 60-73847.
ところが板面を(ioo)面に揃えたシャドウマスク原
板に開孔したシャドウマスクに白ムラが見つかり、詳細
に測定した結果電子孔の形状は理想的な相似形をしてい
るが、大きさに大小があることが判った。However, white unevenness was found in the shadow mask with holes drilled in the shadow mask original plate whose plate surface was aligned with the (ioo) plane, and detailed measurements revealed that the shape of the electron holes was ideally similar, but the size It turns out that there are sizes.
(発明が解決しようとする問題点)
本発明は、上記従来の問題点を解決しようとなされたも
ので、電子孔の形状だけでなく大きさも極めて均一であ
り、その結果白ムラの無いシャドウマスクを提供しよう
とするものである。(Problems to be Solved by the Invention) The present invention has been made to solve the above-mentioned conventional problems.Not only the shape but also the size of the electron holes are extremely uniform, resulting in a shadow mask with no white unevenness. This is what we are trying to provide.
(問題点を解決するための手段及び作用)本発明者等の
研究によれば前述の白ムラはα−Feの析出によるもの
であることがわかった。α−Feはアンバー合金より耐
食性が劣るため、α−Feが局在している個所では電子
孔の径が大きくなってしまうのである。従って、このα
−Feの析出を抑制することにより、この白ムラが解消
されることが判明し1本発明を創出するに至った。(Means and effects for solving the problem) According to the research conducted by the present inventors, it was found that the above-mentioned white unevenness was caused by the precipitation of α-Fe. Since α-Fe has poorer corrosion resistance than the amber alloy, the diameter of the electron hole becomes larger where α-Fe is localized. Therefore, this α
It has been found that this white unevenness can be eliminated by suppressing the precipitation of -Fe, leading to the creation of the present invention.
すなわち本発明は
Fe −Ni系アンバー合金板の板面におけるX線回折
強度が、
用合金板、及びこの合金板に電子ビーム通過孔を形成し
てなるシャドウマスクである。このパラメータhが20
未満の場合は白ムラが発生し易くなる。That is, the present invention is an alloy plate for which the X-ray diffraction intensity on the plate surface of an Fe-Ni-based amber alloy plate is as follows: and a shadow mask in which an electron beam passage hole is formed in this alloy plate. This parameter h is 20
If it is less than that, white unevenness tends to occur.
本発明のシャドウマスク用合金板は以下の如くに製造さ
れる。Fe Ni合金においては、900℃以上では
FeとNiの成分比の何列に拘らずγ相(f、c、c)
になることは知られている。900℃以上のγ相から除
冷すると、γ相のFe−Ni合金にα相のFsとγ相の
Niとが析出する。しかし、900℃以上のγ相を急冷
すると900℃で形成していた結晶構造をそのまま常温
でも保つことができ、常温でγ相の均一相のFe −N
i合金を得ることができる。The alloy plate for shadow masks of the present invention is manufactured as follows. In FeNi alloys, the γ phase (f, c, c) occurs at temperatures above 900°C, regardless of the composition ratio of Fe and Ni.
It is known that it will become When slowly cooling the γ phase at 900° C. or higher, α phase Fs and γ phase Ni are precipitated in the γ phase Fe-Ni alloy. However, if the γ phase is rapidly cooled at 900°C or higher, the crystal structure formed at 900°C can be maintained as it is even at room temperature.
i alloy can be obtained.
従って、本発明合金板は、通常の鍛造、熱間圧延、冷間
圧延等の製造工程中に、900℃以上の高温から急冷す
る調質熱処理を行なうことにより得ることができる。こ
の調質熱処理は製造工程中。Therefore, the alloy plate of the present invention can be obtained by performing a refining heat treatment in which the alloy plate is rapidly cooled from a high temperature of 900° C. or higher during normal manufacturing processes such as forging, hot rolling, and cold rolling. This tempering heat treatment is performed during the manufacturing process.
例えば熱間@造機、冷間圧延等どこにいれても良いが、
熱間圧延後、冷間圧延前に行なうことが望ましい、この
i!1lIqjt熱処理は、熱間圧延の終点温度が90
0℃以上である場合は、熱間圧延後の降温を表的である
が、必要に応じ、Cr 、 Co等を添加したものでも
良い。For example, it can be done anywhere, such as hot rolling machine or cold rolling.
This i! is preferably carried out after hot rolling and before cold rolling. In the 1lIqjt heat treatment, the end point temperature of hot rolling is 90
When the temperature is 0°C or higher, the temperature is typically lowered after hot rolling, but Cr, Co, etc. may be added as necessary.
またシャドウマスクを製造する場合、11!子ビーム通
過孔を形成するが、形状のそろった孔を設けるためには
、合金板の板面の結晶方位をそろえていた方が好ましい
。具体的にはFe −Ni系アンバー合金の(200)
結晶面と(111)結晶面とが、(220)結晶面より
も集合している度合を、(200)回折強度をI+2゜
。)、(111)回折強度をI(xn+1、(220)
回折強度をI(2aa lとすると、
g=(Its。。> + I(txt >)/ Lzz
。)で定義し、このg値が2以上であれば良い。すなわ
ち、孔の形状が不均一となる(220)結晶面の集合度
合を小さくする方が好ましい。Also, when manufacturing a shadow mask, 11! In order to form holes with uniform shapes, it is preferable to align the crystal orientations of the surfaces of the alloy plates. Specifically, Fe-Ni-based amber alloy (200)
The degree to which the (111) crystal plane is more concentrated than the (220) crystal plane is the (200) diffraction intensity by I+2°. ), (111) diffraction intensity as I(xn+1, (220)
If the diffraction intensity is I(2aa l, then g=(Its..> + I(txt>)/Lzz
. ), and it is sufficient if this g value is 2 or more. In other words, it is preferable to reduce the degree of aggregation of (220) crystal planes that result in non-uniform pore shapes.
また板面には(100)面が35%以上、好ましくは4
0%以上集合していた方がエツチング性等の関係で良好
であり、集合度合を表わす際に一般的に用いられる次式
φ :板面に垂直な方向と結晶粒の<100>方向との
なす角
が0.35以上、好ましくは0.4以上であれば良い。In addition, the plate surface has 35% or more (100) planes, preferably 4
It is better to have 0% or more aggregation in terms of etching properties, etc., and the following formula is generally used to express the degree of aggregation. It is sufficient if the angle formed is 0.35 or more, preferably 0.4 or more.
このように(100)面が集合したシャドウマスク用合
金板を得るためには、合金インゴットを造塊。In order to obtain an alloy plate for a shadow mask in which (100) planes are assembled in this way, an alloy ingot is formed into an ingot.
鍛造、熱間圧延を行なう通常の製造工程後、冷間にて、
好ましくは圧延率80%以上の強加工圧延を施し、その
後、再結晶温度を超える温度で熱処理を行なう。強加工
圧延により(110)結晶面に集合し、再結晶温度以上
の熱処理で(100)結晶面に回転しく1oo)結晶面
が集合する。さらに必要に応じ結晶面を回転させない圧
延率25%以下の条件で冷間圧延して板厚の精度を高め
ることもできる。After the normal manufacturing process of forging and hot rolling,
Preferably, strong working rolling is performed at a rolling reduction of 80% or more, and then heat treatment is performed at a temperature exceeding the recrystallization temperature. By hard rolling, the (110) crystal planes are assembled, and by heat treatment at a temperature higher than the recrystallization temperature, the (100) crystal planes are rotated and the 1oo) crystal planes are assembled. Furthermore, if necessary, the accuracy of the plate thickness can be improved by cold rolling at a rolling rate of 25% or less without rotating the crystal plane.
さらに(100)結晶面がより多くそろっている而(A
)を電子ビーム入射側の反対側とすることにより、電子
ビーム通過孔の断面形状が而(A)の側において大きく
なり、孔として好適である。従ってa =Inon )
/ I(gzo lとしたときのaの値が大きい面を電
子ビーム入射側の反対側とすることが望ましい。Furthermore, more (100) crystal planes are aligned (A
) on the side opposite to the electron beam incident side, the cross-sectional shape of the electron beam passing hole becomes larger on the side (A), which is suitable for the hole. Therefore a = Inon)
/I(gzol) It is desirable that the surface having a large value of a be the opposite side to the electron beam incident side.
(実施例)
し、複数個の5トンインゴツトを得た。これを1200
℃4時間加Me鍛造L160tX625’X6000Q
(7)寸法とした。その後、1100℃に4時間加熱し
、熱間圧延を行った。その後、連続熱処理炉において1
100℃保持後水保持後行った(II質熟熱処理。その
後90%の冷間圧延と900℃の再結晶焼鈍を行い4%
のスキンパスにより平坦化してシャドウマスク原板とし
た。この原板にフォトエツチング法により電子ビーム通
過孔を開孔したところ、シャドウマスクの全面にわたっ
て均一な電子ビーム通過孔が得られた。(Example) A plurality of 5-ton ingots were obtained. This is 1200
℃ 4 hours Me forging L160tX625'X6000Q
(7) Dimensions. Thereafter, it was heated to 1100° C. for 4 hours to perform hot rolling. Then, in a continuous heat treatment furnace,
After holding water at 100°C, it was carried out (II quality ripe heat treatment. After that, 90% cold rolling and recrystallization annealing at 900°C were performed to give a 4%
It was flattened using a skin pass and used as a shadow mask original plate. When electron beam passage holes were formed in this original plate by photoetching, uniform electron beam passage holes were obtained over the entire surface of the shadow mask.
第1図は本実施例シャドウマスク用合金板のX線回折図
である。シャドウマスク全面にわたってX線回折を行な
ったところ、第1図と同様な36%Ni−Feの(11
1)、 (200)、 (220)のピークを示した。FIG. 1 is an X-ray diffraction diagram of an alloy plate for a shadow mask according to this embodiment. When X-ray diffraction was performed over the entire surface of the shadow mask, it was found that 36% Ni-Fe (11
1), (200), and (220) peaks were shown.
なお、h(直は101.5であり、白ムラはなかった。Note that h (direct) was 101.5, and there was no white unevenness.
第2図は調質化熱処理を施行しなかった場合のシャドウ
マスクのX線回折の例である。この場合にはシャドウマ
スクの面の殆どは第1図の如き典型を示すが、第2図の
如きa−Feの(110)、 (200)及びNiの(
220) のピークがallされる個所があった。h値
は15.8であり、そこは白ムラの白色個所と一致した
。FIG. 2 is an example of X-ray diffraction of a shadow mask in the case where the refining heat treatment was not performed. In this case, most of the surfaces of the shadow mask are typical as shown in FIG. 1, but (110) and (200) of a-Fe and (200) of
There were locations where all of the peaks of 220) were present. The h value was 15.8, which coincided with the white spot of white unevenness.
のシャドウマスク用合金板を製造し、これを用いてシャ
ドウマスクを製造した場合の白ムラの発生を調べた。An alloy plate for a shadow mask was manufactured, and the occurrence of white unevenness when a shadow mask was manufactured using this was investigated.
X線回折は CuK a 50kV 100+*A
2θ=40〜80゜
またh値の大きい方を電子ビーム入射面の反対側とした
時の方が良好な孔形成が°できた。X-ray diffraction is CuKa 50kV 100+*A
Better hole formation was achieved when 2θ=40 to 80° and the side with the larger h value was placed on the opposite side of the electron beam incident surface.
以上説明したように本発明によれば白ムラのないシャド
ウマスクを得ることができ、非常に有効である。As explained above, according to the present invention, a shadow mask without white unevenness can be obtained and is very effective.
第1図は本発明実施例のX線回折図、第2図は比較例の
X線回折図。
代理人 弁理士 則 近 憲 佑
同 竹花喜久男
Q
第1し1
Q
築 2 図FIG. 1 is an X-ray diffraction diagram of an example of the present invention, and FIG. 2 is an X-ray diffraction diagram of a comparative example. Agent Patent Attorney Nori Ken Yudo Takehana Kikuo Q 1st 1 Q Chiku 2 Figure
Claims (2)
回折強度が、 h=[〔I_{_1_1_1_}+I_{_2_0_0
_}+I_{_2_2_2_}〕/〔I_F_e_{_
1_1_0_}+I_F_e_{_2_0_0_}〕]
≧20(ただしI_{_1_1_1_}I_{_2_0
_0_}I_{_2_2_0_}は夫々Fe−Ni系ア
ンバー合金の{111}面「、{200}面、{220
}面のX線回折強度 I_F_e_{_1_0_0_}、I_F_e_{_2
_0_0_}は夫々α−Feのp{100}面、{20
0}面のX線回折強度)の関係を満たすことを特徴とす
るシャドウマスク用合金板。(1) The X-ray diffraction intensity on the plate surface of the Fe-Ni-based amber alloy plate is h=[[I_{_1_1_1_}+I_{_2_0_0
_}+I_{_2_2_2_}]/[I_F_e_{_
1_1_0_}+I_F_e_{_2_0_0_}]]
≧20 (However, I_{_1_1_1_}I_{_2_0
_0_}I_{_2_2_0_} are the {111} plane, {200} plane, and {220} plane of Fe-Ni-based amber alloy, respectively.
} plane X-ray diffraction intensity I_F_e_{_1_0_0_}, I_F_e_{_2
_0_0_} are the p{100} plane and {20} of α-Fe, respectively.
0} plane X-ray diffraction intensity).
回折強度が、 h=[〔I_{_1_1_1_}+I_{_2_0_0
_}+I_{_2_2_0_}〕/〔I_F_e_{_
1_1_0_}+I_F_e_{_2_0_0_}〕]
≧20(ただしI_{_1_1_1_}I_{_2_0
_0_}I_{_2_2_0_}は夫々Fe−Ni系ア
ンバー合金の{111}面、{200}面、{220}
面のX線回折積分強度 I_F_e_{_1_1_0_}、I_F_e_{_2
_0_0_}は夫々α−Feの{110}面、{200
}面のX線回折積分強度)の関係を満たすシャドウマス
ク用合金板に電子ビーム通過孔が設けられたことを特徴
とするシャドウマスク。(2) The X-ray diffraction intensity on the plate surface of the Fe-Ni-based amber alloy plate is h=[[I_{_1_1_1_}+I_{_2_0_0
_}+I_{_2_2_0_}]/[I_F_e_{_
1_1_0_}+I_F_e_{_2_0_0_}]]
≧20 (However, I_{_1_1_1_}I_{_2_0
_0_}I_{_2_2_0_} are the {111} plane, {200} plane, and {220} plane of Fe-Ni-based amber alloy, respectively.
Surface X-ray diffraction integrated intensity I_F_e_{_1_1_0_}, I_F_e_{_2
_0_0_} are the {110} plane and {200} plane of α-Fe, respectively.
} A shadow mask characterized in that an electron beam passing hole is provided in an alloy plate for a shadow mask that satisfies the relationship of X-ray diffraction integrated intensity of the plane.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2239687A JPH0834088B2 (en) | 1987-02-04 | 1987-02-04 | Alloy plate for shed mask and shed mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2239687A JPH0834088B2 (en) | 1987-02-04 | 1987-02-04 | Alloy plate for shed mask and shed mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63193440A true JPS63193440A (en) | 1988-08-10 |
JPH0834088B2 JPH0834088B2 (en) | 1996-03-29 |
Family
ID=12081499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2239687A Expired - Lifetime JPH0834088B2 (en) | 1987-02-04 | 1987-02-04 | Alloy plate for shed mask and shed mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0834088B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04341543A (en) * | 1991-05-17 | 1992-11-27 | Nippon Yakin Kogyo Co Ltd | Fe-ni shadow mask material excellent in blackening treatment |
JPH0586441A (en) * | 1991-09-27 | 1993-04-06 | Yamaha Corp | Fi-ni-co alloy for shadow mask |
US6547893B1 (en) * | 1999-06-10 | 2003-04-15 | Nippon Yakin Kogyo Co., Ltd. | Fe-Ni based material for shadow mask |
JP2014101543A (en) * | 2012-11-20 | 2014-06-05 | Jx Nippon Mining & Metals Corp | Metal mask material and metal mask |
-
1987
- 1987-02-04 JP JP2239687A patent/JPH0834088B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04341543A (en) * | 1991-05-17 | 1992-11-27 | Nippon Yakin Kogyo Co Ltd | Fe-ni shadow mask material excellent in blackening treatment |
JPH0586441A (en) * | 1991-09-27 | 1993-04-06 | Yamaha Corp | Fi-ni-co alloy for shadow mask |
US6547893B1 (en) * | 1999-06-10 | 2003-04-15 | Nippon Yakin Kogyo Co., Ltd. | Fe-Ni based material for shadow mask |
JP2014101543A (en) * | 2012-11-20 | 2014-06-05 | Jx Nippon Mining & Metals Corp | Metal mask material and metal mask |
Also Published As
Publication number | Publication date |
---|---|
JPH0834088B2 (en) | 1996-03-29 |
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EXPY | Cancellation because of completion of term |