JPS6056053A - Iron-nickel alloy for shadow mask which suppresses generation of uneven stripe during etching - Google Patents

Iron-nickel alloy for shadow mask which suppresses generation of uneven stripe during etching

Info

Publication number
JPS6056053A
JPS6056053A JP16333183A JP16333183A JPS6056053A JP S6056053 A JPS6056053 A JP S6056053A JP 16333183 A JP16333183 A JP 16333183A JP 16333183 A JP16333183 A JP 16333183A JP S6056053 A JPS6056053 A JP S6056053A
Authority
JP
Japan
Prior art keywords
shadow mask
alloy
iron
etching
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16333183A
Other languages
Japanese (ja)
Other versions
JPS6364514B2 (en
Inventor
Susumu Kawauchi
川内 進
Masahiro Tsuji
正博 辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eneos Corp
Original Assignee
Nippon Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining Co Ltd filed Critical Nippon Mining Co Ltd
Priority to JP16333183A priority Critical patent/JPS6056053A/en
Publication of JPS6056053A publication Critical patent/JPS6056053A/en
Publication of JPS6364514B2 publication Critical patent/JPS6364514B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Heat Treatment Of Sheet Steel (AREA)

Abstract

PURPOSE:To prevent generation of an uneven stripe defect in the stage of perforating very small holes by photoetching by forming a shadow mask for a color cathode ray tube of an Fe-Ni alloy, and controlling strictly the segregation rate of Ni and the distributing condition and size of the segregated matter. CONSTITUTION:A shadow mask to be used for a cathode ray tube for image receiving of a color television set is manufactured of a thin sheet consisting of an Fe-Ni alloy. The Fe-Ni alloy sheet in which the component segregation rate of Ni expressed by the formula (1) for said alloy is <=10%, the segregated matter in unit volume is <=5vol% and the length of one segregated matter just prior to perforating by etching is <=30mm. is used in this case. The generation of uneven stripes in the stage of perforating by etching is obviated and since the Fe-Ne alloy itself has a low coefft. of thermal expansion, the shadow mask forming the sharp image without color deviation is obtd.

Description

【発明の詳細な説明】 本発明はカラーテレビジラウン管のシャドウマスク素材
用鉄−ニッケル合金、特に、エツチング時のスジむらの
発生を抑制したシャドウマスク用鉄−ニッケル系合金に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an iron-nickel alloy for use as a material for shadow masks of color television lounge tubes, and more particularly to an iron-nickel alloy for use in shadow masks that suppresses the occurrence of uneven streaks during etching.

カラーテレビブラウン管用シャドウマスク材としては一
般に軟鋼が知られている。カラーテレビブラウン管内で
は3個の電子銃から出る電子ビームがシャドウマスクに
あけた微小孔を通過して螢光スクリーン上の所定の一点
に精密に照射されて、特定の色調を与えるものである。
Mild steel is generally known as a shadow mask material for color television cathode ray tubes. In a color television cathode ray tube, electron beams emitted from three electron guns pass through microscopic holes in a shadow mask and are precisely irradiated onto a predetermined point on a fluorescent screen, giving a specific color tone.

ところがこの様なブラウン管を連続使用すると、電子ビ
ームが照射されるガラス体に支持された螢光面やシャド
ウマスクの温度が次第に高くなっている。特にシャドウ
マスクは前記ガラス体に支持された螢光面に比べ相当高
温になシ。
However, when such a cathode ray tube is used continuously, the temperature of the fluorescent surface and shadow mask supported by the glass body onto which the electron beam is irradiated gradually increases. In particular, the shadow mask is considerably hotter than the fluorescent surface supported by the glass body.

しかもシャドウマスク材の方がガラス体に比べ熱膨張係
数がはるかに大きいため相互に位置ずれが起って電子ビ
ームの照射が正確に行なわれず2画鍛が不鮮明となる。
Moreover, since the shadow mask material has a much larger coefficient of thermal expansion than the glass body, a mutual positional shift occurs, and the electron beam irradiation is not performed accurately, resulting in blurring of the two strokes.

このためシャドウマスクの懸架装置となる支持体の構造
を工夫して、それを補償することも行なわれているが充
分でない。
For this reason, attempts have been made to compensate for this by devising the structure of the support that serves as a suspension device for the shadow mask, but this is not sufficient.

したがってシャドウマスク材としてアンバーのような鉄
−ニッケル系合金の低熱膨張材料を用いることが提案さ
れた。
Therefore, it has been proposed to use a low thermal expansion material such as an iron-nickel alloy such as invar as a shadow mask material.

しかしながらこのような鉄−ニッケル系合金は画像の鮮
明度の点で好結果が得られるはずであったが、このシャ
ドウマスク素材からシャドウマスクを製造する工程でフ
ォトエツチング穿孔時に良好な孔形状が得られず、エツ
チングされたシャドウマスクを表面から目視観察すると
スジむらと称する欠陥が残ることが分った。とのスジむ
らについては、軟鋼の場合には鋼中の非金属介在物、あ
るいは炭火物(Fθ、0)がその原因であることが知ら
れている。(特開昭55−6.2123 ) Lかし、
アンバーのような鉄−ニッケル系合金でおこるスジむら
はこれらの非金属介在物を減少させても消失せず、鉄−
ニッケル系合金固有の原因があると考えられ、この改善
が望まれていた。
However, although such an iron-nickel alloy was supposed to give good results in terms of image clarity, it was difficult to obtain a good hole shape during photoetching during the process of manufacturing a shadow mask from this shadow mask material. When the etched shadow mask was visually observed from the surface, it was found that defects called uneven streaks remained. It is known that non-metallic inclusions in the steel or charcoal (Fθ, 0) are the cause of uneven streaks in mild steel. (Unexamined Japanese Patent Publication No. 55-6.2123) L-shaped,
The uneven streaks that occur in iron-nickel alloys such as amber do not disappear even if these nonmetallic inclusions are reduced;
It is believed that the cause is inherent to nickel-based alloys, and improvements have been desired.

本発明者らは、鉄−ニッケル系合金のスジむらについて
種々研究を行々つた結果、スジむらの原因はニッケルの
成分偏析でラシ、ニッケル偏析部と母材部とでエツチン
グ性に差があるため孔形状が悪くなっていることが判明
した。そしてこのスジむらの発生はニッケルが20重量
−以上になると特に顕著になる。
The inventors of the present invention have conducted various studies on uneven streaks in iron-nickel alloys, and have found that the cause of uneven streaks is the segregation of nickel components, and that there is a difference in etching performance between the nickel segregated area and the base metal. It was found that the shape of the hole had deteriorated. The occurrence of this streak unevenness becomes particularly noticeable when the amount of nickel exceeds 20% by weight.

本発明はかかる点Kfiみ、従来の鉄−ニッケル゛系合
金のもつエツチング時のスジむら発生という欠点を改良
し、エツチング時のスジむらの発生を抑制したシャドウ
マスク用鉄−ニッケル・系合金を提供しようとするもの
である。
In view of this point Kfi, the present invention improves the drawback of the conventional iron-nickel based alloy, which is the generation of uneven streaks during etching, and provides an iron-nickel alloy for shadow masks that suppresses the occurrence of uneven streaks during etching. This is what we are trying to provide.

本発明は1次式で表わされるニッケルの成分偏析率 が10チ以下、単位体積中の偏析物を5容積1%−以下
、かつエツチング直前のシャドウマスク材中の偏析物の
1つの長さが50wm以下であるエツチング時のスジむ
らの発生を抑制したシャドウマスク用鉄−ニッケル系合
金である。
In the present invention, the component segregation rate of nickel expressed by a linear equation is 10 cm or less, the segregation rate in a unit volume is 5 volume 1% or less, and the length of one of the segregation particles in the shadow mask material immediately before etching is This is an iron-nickel alloy for shadow masks that suppresses the occurrence of streak unevenness during etching with a thickness of 50 wm or less.

次に本発明合金を構成するニッケル偏析物等の限定理由
を説明する。
Next, the reasons for limiting the nickel segregated substances constituting the alloy of the present invention will be explained.

を10−以下とする理由はニッケルの成分偏析率が10
−を超えると母材とのエツチング性の差が顕著釦なシス
ジムラの発生が顕著になる為である。偏析物が単位体積
中で5−以下とする理由は、偏析物が単位体積中で5チ
を超えるとスジむらの発生が顕著になる為である。偏析
物の1つの長さをエツチング前の材料で30m以下とす
る理由は偏析物の1つの長さが3011I+を超えると
スジむらの発生が顕著になる為である。
The reason for setting 10- or less is that the component segregation rate of nickel is 10- or less.
This is because if the value exceeds -, the difference in etching performance with the base material becomes significant, and the occurrence of cystoscopic unevenness becomes noticeable. The reason why the number of segregated substances is set to be 5 or less in a unit volume is that if the number of segregated substances exceeds 5 in a unit volume, the occurrence of uneven streaks becomes noticeable. The reason why the length of one of the segregated particles is set to 30 m or less in the material before etching is that if the length of one of the segregated particles exceeds 3011I+, the occurrence of streak unevenness becomes noticeable.

このようにニッケルの偏析率、偏析物の分布状態、大き
さを厳密に管理することによシ、始めてエツチングのス
ジむらの発生を抑制でき。
In this way, only by strictly controlling the segregation rate of nickel, the distribution state, and the size of the segregated substances can the occurrence of uneven etching streaks be suppressed.

しかも低熱膨張率であるこれらの材料の特性によ)画像
は一段と鮮明になる極めて優れた特長を有する。
Furthermore, due to the characteristics of these materials, which have a low coefficient of thermal expansion), images have an extremely excellent feature of becoming even clearer.

これらの条件を満たすだめの製造方法としては、インゴ
ット製造時の偏析防止あるいは条製造工程中での熱処理
によるニッケルの拡散処理を行なうことによシ達成でき
る。
A manufacturing method that satisfies these conditions can be achieved by preventing segregation during ingot manufacturing or performing nickel diffusion treatment by heat treatment during the strip manufacturing process.

以下に本発明合金を実施例で説明する。The alloy of the present invention will be explained below using examples.

(実施例) 第1表に示される本発明合金のインゴットをエレクトロ
スラグ溶解炉あるいは真空脱ガス炉等で溶製後、115
0℃で熱間圧延し、厚さ511!1の板とした。ニッケ
ルの偏析物が多いものは適宜110(FX1時間以上の
熱処理を行ないニッケルの拡散処理を行々う。
(Example) After melting an ingot of the alloy of the present invention shown in Table 1 in an electroslag melting furnace or a vacuum degassing furnace,
It was hot rolled at 0°C to form a plate with a thickness of 511!1. If there is a large amount of nickel segregation, heat treatment at 110 (FX) for 1 hour or more is performed to perform nickel diffusion treatment.

次にこの板を通常の酸洗処理した後、冷間圧延で厚さ1
.0調とした。さらに65′o℃にて1時間の焼鈍を施
した後、冷間圧延で厚さ1145mの仮とした。この冷
間圧延材をさらに650℃にて1時間の焼鈍を施した後
、冷間圧延で厚さα13烟の板とした。このように調整
された試料の評価として、実際のフォトエツチング穿孔
を行ないスジムラ発生の有無を調査した。この結果を比
較合金とともに第1表に示した。
Next, this plate was subjected to ordinary pickling treatment, and then cold rolled to a thickness of 1
.. It was set to 0 tone. After further annealing at 65'oC for 1 hour, the sample was cold rolled to a thickness of 1145 m. This cold rolled material was further annealed at 650° C. for 1 hour, and then cold rolled into a plate having a thickness of α13. As an evaluation of the sample prepared in this way, actual photoetching holes were performed to investigate the occurrence of uneven streaks. The results are shown in Table 1 along with comparative alloys.

第1表に示すごとく本発明に係る合金は従来の鉄−ニッ
ケル系合金にくらベエッチング時のスジムラの発生がな
く、シャドウマスク用素材とじて優れた合金であること
が明らかである。
As shown in Table 1, it is clear that the alloy according to the present invention does not produce uneven streaks during cross-etching compared to conventional iron-nickel alloys, and is an excellent alloy as a material for shadow masks.

Claims (1)

【特許請求の範囲】[Claims] 次式で表わされるニッケルの成分偏析率が10チ以下、
単位体積中の偏析物が′5容積−以下、かつエツチング
直前のシャドウマスク材中の偏析物の1つの長さが3(
1m以下であるエツチング時のスジむらの発生を抑制し
たシャドウマスク用鉄−ニッケル系合金
The component segregation rate of nickel expressed by the following formula is 10 cm or less,
The volume of segregated substances in a unit volume is less than '5, and the length of one segregated substance in the shadow mask material immediately before etching is 3 (
Iron-nickel alloy for shadow masks that suppresses the occurrence of uneven streaks during etching of 1 m or less
JP16333183A 1983-09-07 1983-09-07 Iron-nickel alloy for shadow mask which suppresses generation of uneven stripe during etching Granted JPS6056053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16333183A JPS6056053A (en) 1983-09-07 1983-09-07 Iron-nickel alloy for shadow mask which suppresses generation of uneven stripe during etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16333183A JPS6056053A (en) 1983-09-07 1983-09-07 Iron-nickel alloy for shadow mask which suppresses generation of uneven stripe during etching

Publications (2)

Publication Number Publication Date
JPS6056053A true JPS6056053A (en) 1985-04-01
JPS6364514B2 JPS6364514B2 (en) 1988-12-12

Family

ID=15771821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16333183A Granted JPS6056053A (en) 1983-09-07 1983-09-07 Iron-nickel alloy for shadow mask which suppresses generation of uneven stripe during etching

Country Status (1)

Country Link
JP (1) JPS6056053A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250919A (en) * 1988-04-15 1990-02-20 Nippon Mining Co Ltd Production of iron-nickel based alloy material for shadow mask
JPH0254743A (en) * 1988-08-19 1990-02-23 Nippon Yakin Kogyo Co Ltd Manufacture of fe-ni alloy having excellent suppression effect for striped unevenness at the time of etching
JPH02117703A (en) * 1988-10-28 1990-05-02 Nippon Mining Co Ltd Manufacture of iron-nickel base alloy material for shadow mask
FR2767538A1 (en) * 1997-08-21 1999-02-26 Imphy Sa Iron-nickel alloy strip production from continuously cast slab or strip
JP2001098345A (en) * 1999-09-29 2001-04-10 Nippon Mining & Metals Co Ltd Fe-Ni ALLOY FOR SHADOW MASK, AND ITS MANUFACTURE

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398818U (en) * 1986-12-19 1988-06-27

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068650A (en) * 1973-10-19 1975-06-09
JPS5881926A (en) * 1981-11-07 1983-05-17 Toyo Kohan Co Ltd Preparation of material for shadow mask
JPS5927435A (en) * 1982-08-05 1984-02-13 Toshiba Corp Color picture tube
JPS6058779A (en) * 1983-09-09 1985-04-04 Olympus Optical Co Ltd Solid-state image pickup device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068650A (en) * 1973-10-19 1975-06-09
JPS5881926A (en) * 1981-11-07 1983-05-17 Toyo Kohan Co Ltd Preparation of material for shadow mask
JPS5927435A (en) * 1982-08-05 1984-02-13 Toshiba Corp Color picture tube
JPS6058779A (en) * 1983-09-09 1985-04-04 Olympus Optical Co Ltd Solid-state image pickup device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250919A (en) * 1988-04-15 1990-02-20 Nippon Mining Co Ltd Production of iron-nickel based alloy material for shadow mask
JPH0254743A (en) * 1988-08-19 1990-02-23 Nippon Yakin Kogyo Co Ltd Manufacture of fe-ni alloy having excellent suppression effect for striped unevenness at the time of etching
JPH02117703A (en) * 1988-10-28 1990-05-02 Nippon Mining Co Ltd Manufacture of iron-nickel base alloy material for shadow mask
JPH0569601B2 (en) * 1988-10-28 1993-10-01 Nippon Mining Co Ltd
FR2767538A1 (en) * 1997-08-21 1999-02-26 Imphy Sa Iron-nickel alloy strip production from continuously cast slab or strip
EP0905263A1 (en) * 1997-08-21 1999-03-31 Imphy S.A. Process for manufacturing iron-nickel alloy strip from a continuously cast thin strip
JP2001098345A (en) * 1999-09-29 2001-04-10 Nippon Mining & Metals Co Ltd Fe-Ni ALLOY FOR SHADOW MASK, AND ITS MANUFACTURE

Also Published As

Publication number Publication date
JPS6364514B2 (en) 1988-12-12

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