JP3073734B1 - Method of manufacturing Fe-Ni alloy material for shadow mask - Google Patents
Method of manufacturing Fe-Ni alloy material for shadow maskInfo
- Publication number
- JP3073734B1 JP3073734B1 JP11138927A JP13892799A JP3073734B1 JP 3073734 B1 JP3073734 B1 JP 3073734B1 JP 11138927 A JP11138927 A JP 11138927A JP 13892799 A JP13892799 A JP 13892799A JP 3073734 B1 JP3073734 B1 JP 3073734B1
- Authority
- JP
- Japan
- Prior art keywords
- ingot
- shadow mask
- based alloy
- present
- columnar crystals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
【要約】
【課題】 本発明の目的は、製造工程を特に複雑化する
ことなく、従来材に比較して結晶方位の均一化を飛躍的
に向上させて、エッチング性に優れ、スジムラが発生し
ないFe−Ni系合金のシャドウマスク用素材を製造す
る方法を提供するにある。
【解決手段】 Niを30〜50重量%含有し、残部が
不可避的不純物もしくは随伴元素を除くとFeからなる
Fe−Ni系合金を使用して、VAR(真空アーク再溶
解)或いはESR(エレクトロスラグ再溶解)或いは他
の溶解鋳造により、柱状晶が一方向に揃ったインゴット
を製造し、次いで、このインゴットを板幅方向が柱状晶
の成長方向になるように、鍛造又は圧延加工して板を製
造することを特徴とするシャドウマスク用Fe−Ni系
合金素材の製造方法。Kind Code: A1 An object of the present invention is to significantly improve the uniformity of the crystal orientation as compared with a conventional material without particularly complicating the manufacturing process, to provide excellent etching properties, and to prevent occurrence of uneven streaks. An object of the present invention is to provide a method for manufacturing a material for a shadow mask of an Fe-Ni-based alloy. SOLUTION: A VAR (vacuum arc remelting) or an ESR (electroslag) is used by using a Fe-Ni-based alloy containing 30 to 50% by weight of Ni and the remainder of which excludes unavoidable impurities or accompanying elements. Remelting) or other melting and casting to produce an ingot in which the columnar crystals are aligned in one direction, and then forging or rolling the ingot so that the width direction of the plate is the growth direction of the columnar crystals. A method for producing an Fe-Ni-based alloy material for a shadow mask, the method comprising producing.
Description
【0001】[0001]
【発明の属する利用分野】本発明は、コンピューターカ
ラーディスプレイ用ブラウン管などに使用されるシャド
ウマスク板の製造方法に関する。より詳しくは、結晶方
位が揃いエッチング性に優れたシャドウマスク用Fe−
Ni系合金素材の製造方法に関する。The present invention relates to a method of manufacturing a shadow mask plate used for a cathode ray tube for a computer color display or the like. More specifically, Fe- for shadow masks having a uniform crystal orientation and excellent etching properties.
The present invention relates to a method for manufacturing a Ni-based alloy material.
【0002】[0002]
【従来の技術】カラーテレビやコンピューターカラーデ
ィスプレイ用ブラウン管には、エッチングで加工された
細かい電子線通過孔を有するシャドウマスクが使用され
ている。近年、シャドウマスク用材には、従来のアルミ
キルド鋼に代わって、低熱膨張を有するFe−Ni系合
金が使用されるようになってきた。しかし、Fe−Ni
系合金は、アルミキルド鋼に比べ、エッチング速度が遅
いため、エッチング後のマスク表面にスジ状のムラが発
生し、マスクの品位を極端に低下させることがある。こ
のムラはスジムラと称される圧延方向に伸びた筋状の模
様で、エッチング速度が場所によって異なる場合、孔サ
イズの場所による不均一が起こるために生じるとされて
いる(特許第2672491号)。このスジムラは、結
晶方位の場所による偏りが原因である。この結晶方位の
偏りは鋳塊に存在する特定方位を有する鋳造組織に起因
するものであり(特開平9−209089)、従来は、
分塊圧延時の再加熱時や焼鈍−冷間圧延の繰り返し数を
増すこと等で対応が図られてきた。しかしながら、カラ
ーテレビやコンピューターカラーディスプレイは、ます
ます高品位化が要求されており、シャドウマスクに穿孔
される孔と孔のピッチはますます細かくなってきてい
る。そのため、細かいスジムラが現れるようになり、従
来の対応では、スジムラを抑制できなくなりつつある。2. Description of the Related Art In a cathode ray tube for a color television or a computer color display, a shadow mask having fine electron beam passing holes processed by etching is used. In recent years, Fe-Ni-based alloys having low thermal expansion have been used as shadow mask materials instead of conventional aluminum killed steel. However, Fe-Ni
Since the system alloy has a lower etching rate than aluminum killed steel, streak-like unevenness occurs on the mask surface after etching, and the quality of the mask may be extremely lowered. It is said that this unevenness is a streak-like pattern called a striped streak extending in the rolling direction, and when the etching rate varies depending on the location, unevenness of the hole size occurs depending on the location (Japanese Patent No. 2672491). The uneven streaks are caused by deviation of the crystal orientation depending on the location. The deviation of the crystal orientation is caused by a casting structure having a specific orientation existing in the ingot (Japanese Patent Application Laid-Open No. 9-209089).
Attempts have been made to increase the number of times of reheating during slab rolling and the number of repetitions of annealing and cold rolling. However, color televisions and computer color displays are required to have higher and higher quality, and the holes formed in the shadow mask and the pitch of the holes are becoming finer. For this reason, fine uneven streaks appear, and it is becoming impossible to suppress the uneven streaks with the conventional measures.
【0003】[0003]
【発明が解決しようとする課題】本発明の目的は、結晶
方位の均一化を飛躍的に向上させて、スジムラが発生し
ないFe−Ni系合金のシャドウマスク用素材を製造す
る方法を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for producing a material for a shadow mask of an Fe-Ni-based alloy which does not generate streaks by drastically improving the uniformity of the crystal orientation. is there.
【0004】[0004]
【課題を解決するための手段】単結晶のインゴットに適
切な鍛造・熱間圧延・冷間圧延を施すことにより、結晶
方位が極めて揃った板即ちエッチング速度が場所によら
ず均一なシャドーマスク用素材板を得ることができる。
しかし、単結晶のインゴットは極めて高価なため、工業
的ではない。本発明者等は単結晶のインゴットを出発素
材とするのと変わらない方法がないか鋭意検討の結果、
実質的に単結晶インゴットから出発するのと変わらない
方法を見い出し、本発明を成したものである。即ち、本
発明は、以下のとおりの製造方法である。Niを30〜
50重量%含有し、残部が不可避的不純物もしくは随伴
元素を除くとFeからなるFe−Ni系合金を使用し
て、VAR(真空アーク再溶解)或いはESR(エレク
トロスラグ再溶解)或いは他の溶解鋳造により、柱状晶
が一方向に揃ったインゴットを製造し、次いで、このイ
ンゴットを板幅方向が柱状晶の成長方向になるように、
鍛造又は圧延加工して板を製造することを特徴とするシ
ャドウマスク用Fe−Ni系合金素材の製造方法。本発
明は、特定組成のFe−Ni系合金を使用して、まずV
AR(真空アーク再溶解)或いはESR(エレクトロス
ラグ再溶解)等のいわゆるダブルメルト法あるいは他の
溶解鋳造により、柱状晶が一方向に揃ったインゴットを
製造し、次いで、このインゴットを板に鍛造・圧延する
に際し、板幅方向が柱状晶の成長方向になるように、鍛
造又は圧延加工する方法である。鍛造、圧延の加工率並
びにその後の熱処理温度を適切なものとすることによ
り、単結晶板に近い板を得ることができる。本発明で、
Niを30〜50重量%含有し、残部が不可避的不純物
もしくは随伴元素を除くとFeからなる特定のFe−N
i系合金を使用する理由は、この範囲の合金がシャドウ
マスク用材として充分使用可能な低熱膨張性をもつから
である。本発明で使用する溶解鋳造法としては、特に限
定されないでいずれの方法でも使用できる。Fe−Ni
合金中の介在物が少ない点では、VARがESRより優
れているが、操業コストが高くなる。目的合金素材の品
質、操業の容易性、コスト等を堪案して、適当な溶解鋳
造法によってインゴットを製造する。By subjecting a single crystal ingot to appropriate forging, hot rolling and cold rolling, a plate having a very uniform crystal orientation, that is, a shadow mask having a uniform etching rate regardless of location. A material plate can be obtained.
However, single crystal ingots are extremely expensive and not industrial. The present inventors have conducted intensive studies as to whether there is a method that is the same as using a single crystal ingot as a starting material,
The present invention has been accomplished by finding a method which is substantially the same as starting from a single crystal ingot. That is, the present invention is a manufacturing method as described below. Ni 30 ~
VAR (vacuum arc remelting) or ESR (electroslag remelting) or other melting casting using an Fe-Ni-based alloy containing 50% by weight and the remainder excluding unavoidable impurities or accompanying elements Thus, an ingot having columnar crystals aligned in one direction is manufactured, and then the ingot is placed such that the plate width direction is the growth direction of the columnar crystals.
A method for producing an Fe-Ni-based alloy material for a shadow mask, wherein a plate is produced by forging or rolling. The present invention uses a Fe-Ni-based alloy having a specific composition,
A so-called double melt method such as AR (vacuum arc remelting) or ESR (electroslag remelting) or other melting casting is used to produce an ingot in which columnar crystals are aligned in one direction, and then the ingot is forged into a plate. In rolling, it is a method of forging or rolling so that the width direction of the plate becomes the growth direction of columnar crystals. By making the forging and rolling processing rates and the subsequent heat treatment temperature appropriate, a plate close to a single crystal plate can be obtained. In the present invention,
A specific Fe—N alloy containing 30 to 50% by weight of Ni and the balance of which excludes unavoidable impurities or accompanying elements.
The reason for using an i-based alloy is that alloys in this range have low thermal expansion properties that can be sufficiently used as a shadow mask material. The melting casting method used in the present invention is not particularly limited, and any method can be used. Fe-Ni
Although VAR is superior to ESR in that there are fewer inclusions in the alloy, operating costs are higher. The ingot is manufactured by a suitable melting casting method, taking into account the quality of the target alloy material, ease of operation, cost, and the like.
【0005】以下本発明を図面によって説明する。VA
R或いはESR等により下面の水冷銅鋳型上に合金を連
続的に凝固させると、図1のように、水冷銅鋳型にほぼ
垂直に、柱状晶の成長方向が(100)方向になるよう
に成長させることができる。成長方向を完全に一方向に
揃えることは困難ではあるが、なるべく角度がつかない
ように成長させることが望ましい。インゴットは円柱で
あるのが通常であるが、角柱でもかまわない。このイン
ゴットを図2のように柱状晶の成長方向が板の幅方向に
なるように鍛造又は圧延加工する。このように柱状晶を
揃えることは通常の製造方法ではあり得ない。即ち、こ
のように一方向凝固させたインゴットでは通常の鍛造・
圧延加工はインゴットの成長方向(図2のx方向)に施
されるが、本発明ではこれと直角なy方向に施すことを
特徴とする。もちろん鍛造の初期に目的の幅に揃えるた
めにx方向への圧縮又は伸張となる据え込み鍛造或いは
通常の鍛造を施し、板幅の調整を行うことは問題ない。
また、一般の鋳塊は柱状晶の成長方向は図2のz方向で
あり、本発明のような柱状晶の配置は工業レベルでは不
可能である。本発明のように、柱状晶の成長方向が板の
幅方向になるように配向させ、鍛造と圧延により塑性加
工すると、図2のに示すように、もとの柱状晶が
薄く延ばされ、大面積の箔になっていく。また、加工に
より、結晶は回転し、集合組織が形成されるが、全ての
柱状晶が同一方位になるように回転していく。即ちほぼ
同一方位の薄箔を多数重ねた構造になる。これは単結晶
に近いものであり、結晶方位によるエッチング速度が場
所によらず同一であり、極めてエッチング性に優れた材
料である。圧延途中の熱処理により再結晶するが、通常
の鋳造材から出発した材料が方位を揃えることが困難な
ことに比較し、各結晶粒の方位を揃えることが可能とな
る。以下、実施例により本発明をより詳細に説明する。Hereinafter, the present invention will be described with reference to the drawings. VA
When the alloy is continuously solidified on the water-cooled copper mold on the lower surface by R or ESR or the like, as shown in FIG. 1, the growth direction of the columnar crystals is almost perpendicular to the water-cooled copper mold so that the growth direction of the columnar crystal becomes (100) direction. Can be done. Although it is difficult to completely align the growth directions in one direction, it is desirable that the growth be performed so that the angles are not formed as much as possible. The ingot is usually a cylinder, but may be a prism. This ingot is forged or rolled so that the growth direction of the columnar crystal is in the width direction of the plate as shown in FIG. Aligning the columnar crystals in this manner cannot be performed by a normal manufacturing method. In other words, in the ingot solidified in this way, normal forging and
Although the rolling is performed in the growth direction of the ingot (the x direction in FIG. 2), the present invention is characterized in that the rolling is performed in the y direction perpendicular to the direction. Of course, there is no problem in performing upsetting or normal forging, which is compression or expansion in the x direction, in order to make the width equal to the target width in the initial stage of forging, and adjusting the plate width.
In addition, in the general ingot, the growth direction of the columnar crystal is the z direction in FIG. 2, and the arrangement of the columnar crystal as in the present invention is impossible on an industrial level. As in the present invention, when the growth direction of the columnar crystals is oriented so as to be in the width direction of the plate, and plastic working is performed by forging and rolling, the original columnar crystals are thinly extended as shown in FIG. It becomes a large area foil. In addition, the crystal is rotated by the processing to form a texture, but all the columnar crystals are rotated so as to have the same orientation. That is, a structure in which many thin foils having substantially the same orientation are stacked. This is a material that is close to a single crystal, has the same etching rate depending on the crystal orientation regardless of the location, and is extremely excellent in etching properties. The crystal is recrystallized by the heat treatment during the rolling, but the orientation of each crystal grain can be made uniform as compared with the case where the material starting from a normal cast material has a difficult orientation. Hereinafter, the present invention will be described in more detail with reference to examples.
【0006】[0006]
【実施例】一方向凝固組織として、Niを36重量%含
んだFe−Ni系合金の連続鋳造スラブ(厚さ200m
m、幅900mm、厚さ方向に柱状晶が両側から成長)
から、図3のように柱状晶の配置が通常材と同じもの
(比較材)と、本発明のもの(本発明材)と2種類の切
り出し方で、幅100mm、厚さ60mm、長さ300
mmの鋼塊を切り出し、これを熱間圧延して4mm厚さ
とした。これらを焼鈍、酸洗後、冷間圧延し、0.13
mm厚さの冷延板を作製した。次いで再度無酸化雰囲気
で熱処理した。これらの板の表面にx線を当てx線回析
を行ったところ、図4のように本発明材の面方位は{1
00}面がほとんどであった。一方、比較材の面方位は
{100}面回析線が最も強度が高いものの、それ以外
の回析線がかなり見られ、集合度は低いものであった。
本発明材と比較材を使用して、エッチング加工を行っ
た。本発明材ではスジムラの発生が全く見られなかった
が、比較材では僅かにスジムラの発生があった。EXAMPLE A continuously cast slab of a Fe-Ni alloy containing 36% by weight of Ni as a directionally solidified structure (200 m thick)
m, width 900 mm, columnar crystals grow from both sides in the thickness direction)
Thus, as shown in FIG. 3, the arrangement of columnar crystals is the same as that of a normal material (comparative material), and that of the present invention (material of the present invention) is two kinds of cutting methods.
mm ingot was cut out and hot-rolled to a thickness of 4 mm. These are annealed, pickled and then cold-rolled to 0.13
A cold rolled sheet having a thickness of mm was produced. Then, heat treatment was again performed in a non-oxidizing atmosphere. X-ray diffraction was performed by applying X-rays to the surfaces of these plates, and as shown in FIG.
Most of the faces were 00 mm. On the other hand, as for the plane orientation of the comparative material, the {100} plane diffraction line had the highest strength, but other diffraction lines were considerably observed and the degree of aggregation was low.
Etching was performed using the material of the present invention and the comparative material. Although no streaks were generated in the material of the present invention, the streaks were slightly generated in the comparative material.
【0007】[0007]
【発明の効果】本発明によれば、製造工程を特に複雑化
することなく、従来材に比較して、結晶方位が揃い、エ
ッチング性に優れ、スジムラが発生しない、優れたシャ
ドウマスク用素材が製造できる。According to the present invention, an excellent material for a shadow mask, which has a uniform crystal orientation, is excellent in etching properties, and does not generate streaks, can be obtained without complicating the manufacturing process. Can be manufactured.
【図1】VAR溶解による一方向凝固組織のインゴット
断面のイメージ図。FIG. 1 is an image diagram of a cross section of an ingot of a directionally solidified structure by VAR melting.
【図2】本発明による一方向凝固組織のインゴットの鍛
造・圧延方法と凝固組織の変化を示す説明図。FIG. 2 is an explanatory view showing a forging / rolling method of an ingot having a unidirectionally solidified structure and a change in the solidified structure according to the present invention.
【図3】通常の圧延方法と本発明による圧延方法の対比
説明図。FIG. 3 is a diagram illustrating a comparison between a normal rolling method and a rolling method according to the present invention.
【図4】本発明材と比較材のx線回析結果を示す図。FIG. 4 is a graph showing the results of x-ray diffraction of a material of the present invention and a comparative material.
フロントページの続き (51)Int.Cl.7 識別記号 FI C21D 7/13 C21D 7/13 B C22B 9/00 C22B 9/00 C22C 1/02 501 C22C 1/02 501A 19/03 19/03 M 38/00 302 38/00 302R C22F 1/10 C22F 1/10 Z H01J 9/14 H01J 9/14 G // C21D 9/46 C21D 9/46 Z C22F 1/00 606 C22F 1/00 606 650 650E Continued on the front page (51) Int.Cl. 7 Identification code FI C21D 7/13 C21D 7/13 B C22B 9/00 C22B 9/00 C22C 1/02 501 C22C 1/02 501A 19/03 19/03 M 38 / 00 302 38/00 302R C22F 1/10 C22F 1/10 Z H01J 9/14 H01J 9/14 G // C21D 9/46 C21D 9/46 Z C22F 1/00 606 C22F 1/00 606 650 650E
Claims (1)
不可避的不純物もしくは随伴元素を除くとFeからなる
Fe−Ni系合金を使用して、VAR(真空アーク再溶
解)或いはESR(エレクトロスラグ再溶解)或いは他
の溶解鋳造により、柱状晶が一方向に揃ったインゴット
を製造し、次いで、このインゴットを板幅方向が柱状晶
の成長方向になるように、鍛造又は圧延加工して板を製
造することを特徴とするシャドウマスク用Fe−Ni系
合金素材の製造方法。1. A VAR (vacuum arc remelting) or an ESR (electrolytic) using an Fe-Ni-based alloy containing 30 to 50% by weight of Ni and Fe as the remainder excluding unavoidable impurities or accompanying elements. (Slag remelting) or other melting casting to produce an ingot in which the columnar crystals are aligned in one direction, and then forging or rolling the ingot so that the width direction of the plate becomes the growth direction of the columnar crystals. A method for producing an Fe—Ni-based alloy material for a shadow mask, comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11138927A JP3073734B1 (en) | 1999-05-19 | 1999-05-19 | Method of manufacturing Fe-Ni alloy material for shadow mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11138927A JP3073734B1 (en) | 1999-05-19 | 1999-05-19 | Method of manufacturing Fe-Ni alloy material for shadow mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JP3073734B1 true JP3073734B1 (en) | 2000-08-07 |
JP2000328131A JP2000328131A (en) | 2000-11-28 |
Family
ID=15233403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11138927A Expired - Fee Related JP3073734B1 (en) | 1999-05-19 | 1999-05-19 | Method of manufacturing Fe-Ni alloy material for shadow mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3073734B1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2819825B1 (en) * | 2001-01-24 | 2003-10-31 | Imphy Ugine Precision | PROCESS FOR MANUFACTURING A FE-NI ALLOY STRIP |
WO2018052135A1 (en) * | 2016-09-15 | 2018-03-22 | 日立金属株式会社 | Metal mask material and method for manufacturing same |
-
1999
- 1999-05-19 JP JP11138927A patent/JP3073734B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2000328131A (en) | 2000-11-28 |
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