JPS6319321Y2 - - Google Patents

Info

Publication number
JPS6319321Y2
JPS6319321Y2 JP1981092722U JP9272281U JPS6319321Y2 JP S6319321 Y2 JPS6319321 Y2 JP S6319321Y2 JP 1981092722 U JP1981092722 U JP 1981092722U JP 9272281 U JP9272281 U JP 9272281U JP S6319321 Y2 JPS6319321 Y2 JP S6319321Y2
Authority
JP
Japan
Prior art keywords
wafer
dish
semiconductor wafer
shaped member
planetarium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981092722U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57203546U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981092722U priority Critical patent/JPS6319321Y2/ja
Publication of JPS57203546U publication Critical patent/JPS57203546U/ja
Application granted granted Critical
Publication of JPS6319321Y2 publication Critical patent/JPS6319321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1981092722U 1981-06-22 1981-06-22 Expired JPS6319321Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981092722U JPS6319321Y2 (enExample) 1981-06-22 1981-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981092722U JPS6319321Y2 (enExample) 1981-06-22 1981-06-22

Publications (2)

Publication Number Publication Date
JPS57203546U JPS57203546U (enExample) 1982-12-24
JPS6319321Y2 true JPS6319321Y2 (enExample) 1988-05-30

Family

ID=29887737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981092722U Expired JPS6319321Y2 (enExample) 1981-06-22 1981-06-22

Country Status (1)

Country Link
JP (1) JPS6319321Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010235A (enExample) * 1973-06-01 1975-02-01

Also Published As

Publication number Publication date
JPS57203546U (enExample) 1982-12-24

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