JPS63188934A - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS63188934A
JPS63188934A JP62021121A JP2112187A JPS63188934A JP S63188934 A JPS63188934 A JP S63188934A JP 62021121 A JP62021121 A JP 62021121A JP 2112187 A JP2112187 A JP 2112187A JP S63188934 A JPS63188934 A JP S63188934A
Authority
JP
Japan
Prior art keywords
reaction
vapor phase
tube
gas
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62021121A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573251B2 (enrdf_load_stackoverflow
Inventor
Katsuhide Manabe
勝英 真部
Nobuo Okazaki
伸夫 岡崎
Isamu Akasaki
勇 赤崎
Kazumasa Hiramatsu
和政 平松
Hiroshi Amano
浩 天野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagoya University NUC
Toyoda Gosei Co Ltd
Original Assignee
Nagoya University NUC
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagoya University NUC, Toyoda Gosei Co Ltd filed Critical Nagoya University NUC
Priority to JP62021121A priority Critical patent/JPS63188934A/ja
Publication of JPS63188934A publication Critical patent/JPS63188934A/ja
Publication of JPH0573251B2 publication Critical patent/JPH0573251B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
JP62021121A 1987-01-31 1987-01-31 気相成長装置 Granted JPS63188934A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62021121A JPS63188934A (ja) 1987-01-31 1987-01-31 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62021121A JPS63188934A (ja) 1987-01-31 1987-01-31 気相成長装置

Publications (2)

Publication Number Publication Date
JPS63188934A true JPS63188934A (ja) 1988-08-04
JPH0573251B2 JPH0573251B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=12046048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62021121A Granted JPS63188934A (ja) 1987-01-31 1987-01-31 気相成長装置

Country Status (1)

Country Link
JP (1) JPS63188934A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0440529U (enrdf_load_stackoverflow) * 1990-08-06 1992-04-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0440529U (enrdf_load_stackoverflow) * 1990-08-06 1992-04-07

Also Published As

Publication number Publication date
JPH0573251B2 (enrdf_load_stackoverflow) 1993-10-14

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