JPS6318692A - Manufacture of printed wiring board - Google Patents

Manufacture of printed wiring board

Info

Publication number
JPS6318692A
JPS6318692A JP61163097A JP16309786A JPS6318692A JP S6318692 A JPS6318692 A JP S6318692A JP 61163097 A JP61163097 A JP 61163097A JP 16309786 A JP16309786 A JP 16309786A JP S6318692 A JPS6318692 A JP S6318692A
Authority
JP
Japan
Prior art keywords
parts
printed wiring
resin composition
wiring board
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61163097A
Other languages
Japanese (ja)
Other versions
JPH0344432B2 (en
Inventor
敏明 石丸
信行 林
晴夫 赤星
敢次 村上
和嶋 元世
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP61163097A priority Critical patent/JPS6318692A/en
Priority to GB8715744A priority patent/GB2193730B/en
Priority to DE3722749A priority patent/DE3722749C2/en
Priority to KR1019870007457A priority patent/KR900003848B1/en
Publication of JPS6318692A publication Critical patent/JPS6318692A/en
Publication of JPH0344432B2 publication Critical patent/JPH0344432B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/164Coating processes; Apparatus therefor using electric, electrostatic or magnetic means; powder coating
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/184Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は印刷配線板の製造方法に関する。更に詳しくは
フォトレジストを用い、無電解めっきによって配線パタ
ーンを形成する印刷配線板の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a printed wiring board. More specifically, the present invention relates to a method of manufacturing a printed wiring board in which a wiring pattern is formed by electroless plating using a photoresist.

(従来の技術) 従来、印刷配線板の製造方法としては、銅張り積層板を
用い、配線パターン以外の部分の銅をエツチングにより
除去する方法(エツチドフォイル法といわれている)が
主であるが、これに対し銅張り積層板を使用せず、絶縁
性の積層板上に無電解めっきで配線パターンを直接形成
する方法(アディティブ法といわれている)が、不用の
銅を除去する不経済がなく製造コストが低いため最近注
目されている。しかし無電解鋼めっきの析出速度は非常
に遅いため、長時間(通常5〜60時間)。
(Prior art) Conventionally, the main method for manufacturing printed wiring boards has been to use a copper-clad laminate and remove copper from areas other than the wiring pattern by etching (referred to as the etched foil method). However, the method of directly forming wiring patterns on an insulating laminate by electroless plating without using a copper-clad laminate (called the additive method) is uneconomical due to the removal of unnecessary copper. It has recently attracted attention due to its low manufacturing cost. However, since the deposition rate of electroless steel plating is very slow, it takes a long time (usually 5 to 60 hours).

高温度(通常60〜80℃)、高アルカリ性(通常pH
11〜13.5)のめつき俗に浸漬しておかなければな
らず、このようなきびしい条件に耐えるような無電解め
っき用のレジストが必要である。
High temperature (usually 60-80℃), high alkalinity (usually pH
11-13.5) Plating generally requires immersion, and a resist for electroless plating that can withstand such severe conditions is required.

従来、この目的のレジストはエポキシ樹脂と硬化剤を主
成分とするインクをスクリーン印刷し。
Traditionally, resists for this purpose are screen-printed with an ink containing epoxy resin and a hardener as the main ingredients.

熱硬化することにより形成されているが、印刷ではライ
ンの寸法精度が制限されるため、高誓度パターンの印刷
配線板はアディティブ法では製造困難であった。高密度
パターンの形成にはフォトレジストが適しており、アデ
ィティブ法用のフォトレジストの提案が、特開昭50−
43468号公報、tVf開昭54−770号公報、特
開昭58−199341号公報、特開昭59−1243
4号公報、特開昭60−101532号公報などでなさ
れている。しかしながら、従来提案されているフォトレ
ジストあるいはすでに市販されているフォトレジストを
用い、フォトアディティブ法に1って印刷配線板を量産
した場合、フォトレジスト組成物の一部が無電解めっき
浴中に徐々に溶は出し2次第にめっき浴を汚染して析出
させるべき無電解めっき鋼の物性を低下させる問題点が
あった。
Although it is formed by thermal curing, printing limits the dimensional accuracy of lines, so it has been difficult to produce printed wiring boards with high-density patterns using the additive method. Photoresists are suitable for forming high-density patterns, and a proposal for a photoresist for additive methods was published in 1973-
43468 Publication, tVf Publication No. 54-770, Japanese Patent Publication No. 58-199341, Japanese Patent Publication No. 59-1243
This is disclosed in Japanese Patent Publication No. 4, Japanese Unexamined Patent Publication No. 101532/1980, and the like. However, when mass-producing printed wiring boards using the photoadditive method using conventionally proposed photoresists or photoresists already on the market, a portion of the photoresist composition gradually disappears into the electroless plating bath. There was a problem in that the plating bath was gradually contaminated during the melting process and the physical properties of the electroless plated steel to be deposited were deteriorated.

銅の物性の低下は印刷配線板の信頼性に対して致命的で
あるため、−車使用しためつき浴は連続再使用できず、
量産には向かなかった。
Since the deterioration of the physical properties of copper is fatal to the reliability of printed wiring boards, - the tamping bath used in cars cannot be reused continuously;
It was not suitable for mass production.

(発明の目的) 本発明の目的はフォトアディティブ法による。(Purpose of the invention) The object of the invention is based on a photoadditive method.

めっき鋼の物性の良好な高精度の印刷配線板の製造方法
を提供することにある。また、同時に量産性のある製造
方法を提供することでもある。
It is an object of the present invention to provide a method for manufacturing a highly accurate printed wiring board with good physical properties of plated steel. Another purpose is to provide a manufacturing method that is suitable for mass production.

(発明の構成) 本発明は (1)無電解めっき銅をその所要部分に析出させるべき
基板の表面に、 (a)(イ)末端メタクリロイル基を
少なくとも1個有し1分子内に水素原子と直接共有結合
した窒素原子を有しない1種以上の不飽和化合物5〜9
9重1%と(ロ)末端アクリロイル基を少なくとも1個
有し9分子内に水素原子と直接共有結合した窒素原子を
有しない1梗以上の不飽和化合物95〜1重量係からな
る光重合可能な成分100重量部に対し、(b)分子内
に水素原子と直接共有結合した窒素原子を有しない線状
高分子化合物0〜400重量部並びにfc)活性光によ
り遊離ラジカルを生成する増感剤又は(及び)増感剤系
0.5〜20重量部 を含有する感光性樹脂組成物の層を形成する工程(2)
像的な活性光照射および現像により該基板の表面上に感
光性樹脂組成物のネガティブパターンを形成する工程 ならびに (3)該基板の表面上の該感光性樹脂組成物のネガティ
ブパターンをめっきレジストとして無電解鋼めっきによ
シ配線パターンを形成する工程を経る印刷配線板の製造
方法に関する。
(Structure of the Invention) The present invention provides (1) on the surface of a substrate on which electroless plated copper is to be deposited, (a) (b) at least one terminal methacryloyl group and a hydrogen atom in one molecule; One or more unsaturated compounds 5 to 9 that do not have a directly covalently bonded nitrogen atom
A photopolymerizable compound consisting of 9% by weight and 1% by weight and (b) an unsaturated compound with at least 1 stroke having at least one terminal acryloyl group and no nitrogen atom directly covalently bonded to a hydrogen atom in the 9 molecule. (b) 0 to 400 parts by weight of a linear polymer compound that does not have a nitrogen atom directly covalently bonded to a hydrogen atom in the molecule; and fc) a sensitizer that generates free radicals by active light. or (and) step (2) of forming a layer of a photosensitive resin composition containing 0.5 to 20 parts by weight of a sensitizer system.
(3) forming a negative pattern of the photosensitive resin composition on the surface of the substrate by imagewise active light irradiation and development; and (3) using the negative pattern of the photosensitive resin composition on the surface of the substrate as a plating resist. The present invention relates to a method for manufacturing a printed wiring board, which includes a step of forming a wiring pattern by electroless steel plating.

本発明の提案する印刷配線板の製造方法について以下に
詳細に説明する。
The method of manufacturing a printed wiring board proposed by the present invention will be described in detail below.

本発明の提案する印刷配線板の製造方法は、無電解めっ
き鋼をその所要部分に析出させるべき基板の表面に感光
性樹脂組成物の層を形成する工程を含むものである。
The method of manufacturing a printed wiring board proposed by the present invention includes the step of forming a layer of a photosensitive resin composition on the surface of a substrate on which electroless plated steel is to be deposited on the required portions.

基板としては紙フェノール、ガラスエポキシ等の積層板
、鉄ホウロウ基板、アルミ板等の両面にエポキシ樹脂絶
縁層を形成した基板等の金属芯入り基板などが使用でき
る。これらの基板は、穴あけ後にめっき触媒を含む溶液
に浸漬され、スルホ−−ル内壁にめっき触媒をつけるこ
ともできる。このようなめつき触媒溶液としては1日立
化成工業■M増感剤H8−101B等が使用できる。基
板の表面にはめつき触媒の付着を良好とするため。
As the substrate, a laminated board of paper phenol, glass epoxy, etc., an iron enamel board, a board with a metal core such as a board with an epoxy resin insulating layer formed on both sides of an aluminum board, etc. can be used. These substrates can also be immersed in a solution containing a plating catalyst after drilling the holes to apply the plating catalyst to the inner walls of the through holes. As such a plating catalyst solution, 1 Hitachi Chemical's ■M Sensitizer H8-101B or the like can be used. To ensure good adhesion of the catalyst to the surface of the substrate.

あるいは析出する無電解めっき銅の基板建対する密着性
を良好とするため等のために接着剤層を塗布することが
好ましい。
Alternatively, it is preferable to apply an adhesive layer to improve the adhesion of the deposited electroless plated copper to the substrate.

接着剤としては、フェノール変性ニトリルゴム系接着剤
等のアディティブ法用接着剤として知られているものが
使用できる。接着剤中にめっき触媒となる化合物を含ま
せることもできる。めっき触媒の付着性を良好とするた
め、あるいは析出する無電解めっき鋼の密着性を良好と
するため、無電解めっき処理の前に接着剤層表面を粗化
することが好ましい。粗化方法としては重クロム酸ソー
ダ、クロム醸等を含む酸性溶液等に浸漬する方法がある
が、公知の通り、粗化工程は無電解銅めっき工程の前で
あれば、矢に述べる感光性樹脂組成物の層を形成する前
であっても、レジストパターン形成後であってもかまわ
ない。
As the adhesive, those known as additive adhesives such as phenol-modified nitrile rubber adhesives can be used. A compound that serves as a plating catalyst can also be included in the adhesive. In order to improve the adhesion of the plating catalyst or the adhesion of the deposited electroless plated steel, it is preferable to roughen the surface of the adhesive layer before the electroless plating treatment. As a roughening method, there is a method of immersion in an acidic solution containing sodium dichromate, chromium chloride, etc., but as is known, if the roughening process is performed before the electroless copper plating process, the photosensitivity described in the arrow will be reduced. It may be done before forming the resin composition layer or after forming the resist pattern.

この他、基板として2紙フェノール、ガラスエポキシ等
の積層板、鉄ホウロウ基板、アルミ板等の両面にエポキ
シ樹脂絶縁層全形成した基板等の金属芯入り基板などの
両面に銅箔を張り付けた銅張シ基板を使用しても良い。
In addition, as a board, there are two-paper phenol, glass epoxy, etc. laminated boards, iron enamel boards, boards with epoxy resin insulating layers formed on both sides of aluminum boards, boards with metal cores, etc., with copper foil pasted on both sides. A stretched substrate may also be used.

これらの基板は、穴あけ後にめっき触媒を含む溶液に浸
漬し、スルーホール内壁にめっき触媒をつけることがで
きる。
After drilling, these substrates can be immersed in a solution containing a plating catalyst to apply the plating catalyst to the inner walls of the through holes.

また、めっきレジストと銅との密着性を改良するため、
塩化第二銅等の酸化剤を含む酸性水溶液を用いて銅箔の
表面をエツチングすることができる。
In addition, to improve the adhesion between the plating resist and copper,
The surface of the copper foil can be etched using an acidic aqueous solution containing an oxidizing agent such as cupric chloride.

銅張り基板を用いる場合、銅箔上に次に述べる感光性樹
脂組成物のネガティブパターンを形成し。
When using a copper-clad substrate, a negative pattern of the photosensitive resin composition described below is formed on the copper foil.

このパターンのない部分に無電解銅めっきによって配線
パターンを形成し、レジストを除去し念後回路間の銅箔
をエツチングによって除去し、印刷配線板を得ることが
できる。また、銅箔をあらかじめエツチング配線パター
ンを形成した後、スルーホールおよび必要なランド部分
を除いて矢に述べる感光性樹脂組成物のネガティブパタ
ーンを形成し、このパターンのない部分に無電解銅めっ
きを行なって配線パターンを形成し、印刷配線板を得る
ことができる。
A wiring pattern is formed on this pattern-free area by electroless copper plating, the resist is removed, and then the copper foil between the circuits is removed by etching to obtain a printed wiring board. In addition, after forming a wiring pattern by etching the copper foil in advance, a negative pattern of the photosensitive resin composition described in the arrow is formed, excluding through holes and necessary land areas, and electroless copper plating is applied to the areas without this pattern. A printed wiring board can be obtained by forming a wiring pattern.

本発明で使用する感光性樹脂組成物は(イ)末端メタク
リロイル基を少なくとも1個有し9分子内に水素原子と
直接共有結合した窒素原子を有しない1種以上の不飽和
化合物5〜99重量%と(ロ)末端アクリロイル基を少
なくとも1個有し1分子内に水素原子と直接共有結合し
た窒素原子を有しない1種以上の不飽和化合物95〜1
重量%からなる光重合可能な成分を必須成分として含有
する。(イ)の末端メタクリロイル基を少なくとも1個
有し。
The photosensitive resin composition used in the present invention includes (a) one or more unsaturated compounds having at least one terminal methacryloyl group and having no nitrogen atom directly covalently bonded to a hydrogen atom within the molecule; % and (b) one or more unsaturated compounds having at least one terminal acryloyl group and no nitrogen atom directly covalently bonded to a hydrogen atom in one molecule 95-1
% by weight of a photopolymerizable component as an essential component. It has at least one terminal methacryloyl group of (a).

分子内に水素原子と直接共有結合した窒素原子を有しな
い不飽和化合物としては9例えばトリメチロールプロパ
ン、トリメチロールエタン、ペンタエリスリトール、ジ
ペンタエリスリトール、1.6−ヘキサンジオール、プ
ロピレングリコール、テトラエチレングリコール、ジブ
ロムネオペンチルクリコール等の多価アルコールのメタ
クリル酸エステル、ジシクロペンテニルオキシエチルメ
タクリレート、テトラヒドロフルフリルメタクリレート
、ベンジルメタクリレート等を挙げ得る。
Examples of unsaturated compounds that do not have a nitrogen atom directly covalently bonded to a hydrogen atom in the molecule include trimethylolpropane, trimethylolethane, pentaerythritol, dipentaerythritol, 1,6-hexanediol, propylene glycol, and tetraethylene glycol. , methacrylic acid esters of polyhydric alcohols such as dibrome neopentyl glycol, dicyclopentenyloxyethyl methacrylate, tetrahydrofurfuryl methacrylate, benzyl methacrylate, and the like.

(ロ)末端アクリロイル基を少なくとも1個有し。(b) It has at least one terminal acryloyl group.

分子内に水素原子と直接共有結合した窒素原子を有しな
い不飽和化合物としては9例えばトリメチロールプロパ
ン、トリメチロールエタン、ペンタエリスリトール、ジ
ペンタエリスリトール、1.6−ヘキサンジオール、プ
ロピレングリコール、テトラエチレングリコール、ジブ
ロムネオペンチルグリコール等の多価アルコールのアク
リル酸エステル、ジシクロペンテニルオキシエチルアク
リレート、テトラヒドロフルフリルアクリレート、ベン
ジルアクリレート等を挙げ得る。
Examples of unsaturated compounds that do not have a nitrogen atom directly covalently bonded to a hydrogen atom in the molecule include trimethylolpropane, trimethylolethane, pentaerythritol, dipentaerythritol, 1,6-hexanediol, propylene glycol, and tetraethylene glycol. , acrylic esters of polyhydric alcohols such as dibrome neopentyl glycol, dicyclopentenyloxyethyl acrylate, tetrahydrofurfuryl acrylate, benzyl acrylate, and the like.

本発明者らの詳細な検討によって、窒素原子の含有は銅
の物性の低下を招く場合が多く、特に−級及び二級のア
ミノ基、アミド基、ウレタン基等の水素原子と直接共有
結合した窒素原子を含む基の含有は著しい銅の物性の低
下を生じることが明らかになった。水酸基またはカルボ
キシル基のように水素原子と直接共有結合した酸素原子
を含む基の含有も好ましくない場合が多く、上記(イ)
の不飽和化合物として特に好ましい例としては、トリメ
チロールプロパントリメタクリレート、トリメチロール
エタントリメタクリレート、ペンタエリスリト−ルテト
ラメタクリレート、ジペンタエリスリトールへキサメタ
クリレート、1.6−ヘキサンシオールジメタクリレー
トなどがある。また。
Detailed studies by the present inventors have revealed that the inclusion of nitrogen atoms often leads to a decrease in the physical properties of copper, and in particular, the presence of nitrogen atoms directly covalently bonded to hydrogen atoms such as -class and secondary amino groups, amide groups, urethane groups, etc. It has been revealed that the inclusion of a group containing a nitrogen atom causes a significant deterioration in the physical properties of copper. The inclusion of groups containing an oxygen atom directly covalently bonded to a hydrogen atom, such as a hydroxyl group or a carboxyl group, is also often undesirable;
Particularly preferred examples of the unsaturated compound include trimethylolpropane trimethacrylate, trimethylolethane trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol hexamethacrylate, and 1,6-hexanethiol dimethacrylate. Also.

理由は不明であるが光重合性成分がアクリレート系不飽
和化合物だけの場合に比べてメタクリレート系不飽和化
合物の併用あるいは単独便用によってめっき浴の汚染が
低減し、銅の物性が著しく良好になることが明らかにな
った。
Although the reason is unknown, compared to when the photopolymerizable component is only an acrylate unsaturated compound, the contamination of the plating bath is reduced by using a methacrylate unsaturated compound in combination or alone, and the physical properties of copper are significantly improved. It became clear.

感光性樹脂組成物の光感度及びめっき鋼の物性の点から
(イ)の成分は5〜99重i%、(ロ)の成分は95〜
1重f%の範囲とされるが、より好ましい範囲は(イ)
の成分が20〜95重量%、仲)の成分が80〜5重量
係の範囲である。
From the viewpoint of the photosensitivity of the photosensitive resin composition and the physical properties of the plated steel, the component (a) is 5 to 99% by weight, and the component (b) is 95 to 99% by weight.
It is said to be in the range of 1% f%, but the more preferable range is (a)
The content of the component is in the range of 20 to 95% by weight, and the content of the component in the middle is in the range of 80 to 5% by weight.

本発明で使用する1感光性樹脂組成物は上記(イ)成分
及び(ロ)成分の合計100重景部に対し9分子内に水
素原子と直接共有結合した官素原子全有しない線状高分
子化合物を0〜400重景部含有する。
1 Photosensitive resin composition used in the present invention has a linear polymer that does not have any of the hydrogen atoms and directly covalently bonded hydrogen atoms in 9 molecules for a total of 100 parts of the above components (a) and (b). Contains 0 to 400 parts of a molecular compound.

線状高分子化合物の含有量が400重量部をこえると光
感度が低く実用的でない。分子内に水素原子と直接共有
結合した窒素原子を有しない線状高分子化合物としては
1例えばメタクリル酸メチル。
If the content of the linear polymer compound exceeds 400 parts by weight, the photosensitivity will be low and it will not be practical. An example of a linear polymer compound that does not have a nitrogen atom directly covalently bonded to a hydrogen atom in its molecule is methyl methacrylate.

アクリル酸エチル、テトラヒドロフルフリルメタクリレ
ート、メタクリル酸、2−ヒドロキシエチルメタクリレ
ート、ベンジルメタクリレート、スチレン、ビニルトル
エン、酢酸ビニル、ブタジェン等のビニル系単量体を重
合又は共重合して得られるビニル系高分子化合物、エチ
レングリコール。
Vinyl polymers obtained by polymerizing or copolymerizing vinyl monomers such as ethyl acrylate, tetrahydrofurfuryl methacrylate, methacrylic acid, 2-hydroxyethyl methacrylate, benzyl methacrylate, styrene, vinyltoluene, vinyl acetate, and butadiene. compound, ethylene glycol.

シフロビレングリコール、1.6−ヘキサンジオール等
の2価アルコールとマレイン酸、フタル酸などの2価の
酸とを縮合して得られるポリエステル系高分子化合物な
どを挙げ得る。側鎖にテトラヒドロフルフリル基を有す
る線状高分子化合物の使用はめつき銅の物性を向上させ
る点で好ましい。
Examples include polyester-based polymer compounds obtained by condensing dihydric alcohols such as cyfurobylene glycol and 1,6-hexanediol with divalent acids such as maleic acid and phthalic acid. It is preferable to use a linear polymer compound having a tetrahydrofurfuryl group in its side chain since it improves the physical properties of plated copper.

後述する工うに感光性樹脂組成物の層の形成が感光性エ
レメントを積層する方法である場合には。
In the case where the formation of a layer of a photosensitive resin composition described later is a method of laminating photosensitive elements.

フィルム形成性の点で分子内に水素原子と直接共有結合
した窒素原子を有しない線状高分子化合物は、上記[a
)光重合可能な成分100重量部に対し。
In terms of film-forming properties, linear polymer compounds that do not have a nitrogen atom directly covalently bonded to a hydrogen atom in the molecule are
) Based on 100 parts by weight of photopolymerizable component.

20〜400重量部含有するのが好ましい。It is preferably contained in an amount of 20 to 400 parts by weight.

本発明で使用する感光性樹脂組成物は上記(a)光重合
可能な成分100重量部に対し、活性光により遊離ラジ
カルを午成する増感剤又は(及び)増感剤系を0.5〜
20重量部含有する。増感剤又は(及び)増感剤系が0
65重量部未満では光感度が低く、20重量部をこえる
と形成されるネガティブパターンの形状が悪くなる。
The photosensitive resin composition used in the present invention contains 0.5 parts by weight of a sensitizer or (and) a sensitizer system that generates free radicals by actinic light per 100 parts by weight of the photopolymerizable component (a). ~
Contains 20 parts by weight. Sensitizer or (and) sensitizer system is 0
If it is less than 65 parts by weight, the photosensitivity will be low, and if it exceeds 20 parts by weight, the shape of the negative pattern formed will be poor.

使用できる増感剤としては、置換または非置換の多核キ
ノン類2例えば、2−エチルアントラキノン、2−1−
ブチルアントラキノン、オクタメチルアントラキノン、
1,2−ベンズアントラキノン、2.3−ジフェニルア
ントラキノン等、ジアセチルおよびベンジル等のケトア
ルドニル化合物。
Sensitizers that can be used include substituted or unsubstituted polynuclear quinones 2, such as 2-ethylanthraquinone, 2-1-
Butylanthraquinone, octamethylanthraquinone,
Ketoaldonyl compounds such as diacetyl and benzyl, such as 1,2-benzanthraquinone and 2,3-diphenylanthraquinone.

ベンゾイン、ビパロン等のα−ケタルドニルアルコール
類およびエーテル類、α−炭炭化水素置換芳香族アシロ
イン類例えばα−フェニル−ベンゾイン、α、α−ジェ
トキシアセトフェノン等、ベンゾフェノン、4.4’−
ビスジアルキルアミノベンゾフェノン等の芳香族ケトン
類全例示でき、これらは単独でも組合せてもよい。使用
できる増感剤系としては2.4.5− )リアリールイ
ミダゾール二量体と2−メルカプトベンゾキナゾール、
ロイコクリスタルバイオレット、トリス(4−ジエチル
アミノ−2−メチルフェニル)メタン等との組合せを例
示できる。また、それ自体で光開始性はないが、前述し
た物質と組合せて用いることにより全体として光開始性
能のより良好な増感剤系となるような添加剤を用いるこ
とができる。例えばベンゾフェノンに対するトリエタノ
ールアミン等の三級アミンなどがある。
α-ketaldonyl alcohols and ethers such as benzoin and biparone, α-hydrohydrocarbon-substituted aromatic acyloins such as α-phenyl-benzoin, α, α-jethoxyacetophenone, etc., benzophenone, 4.4'-
All aromatic ketones such as bisdialkylaminobenzophenone can be mentioned, and these may be used alone or in combination. Sensitizer systems that can be used include 2.4.5-) Realyl imidazole dimer and 2-mercaptobenzoquinazole;
Examples include combinations with leuco crystal violet, tris(4-diethylamino-2-methylphenyl)methane, and the like. Additionally, additives can be used which do not have photoinitiating properties by themselves, but which, when used in combination with the above-mentioned substances, result in a sensitizer system with better photoinitiating performance as a whole. For example, there are tertiary amines such as triethanolamine for benzophenone.

本発明で1吏用する感光性樹脂組成物はさらに他の副次
的成分を含有することができる。両次的成分としてVi
熱重合防止剤、染料、顔料、塗工性向上剤等であり、こ
れらの選択は通常の感光性樹脂組成物と同様の考慮のも
とに行なわれる。
The photosensitive resin composition used in the present invention may further contain other subsidiary components. Vi as a bicomponent
These include thermal polymerization inhibitors, dyes, pigments, coating property improvers, etc., and selection thereof is made based on the same considerations as those for ordinary photosensitive resin compositions.

本発明の提案する印刷配線板の製造方法は無電解めっき
銅をその所要部分に析出させるべき基板の表面に上記で
詳細に説明した感光性樹脂組成物の層を形成する工程を
必ず含む。無電解めっき銅を析出させるべき絶縁性基板
の表面に感光性樹脂組成物の層を形成する工程は常法で
行なえる。たとえば感光性樹脂組成物をメチルエチルケ
トン。
The method of manufacturing a printed wiring board proposed by the present invention necessarily includes the step of forming a layer of the photosensitive resin composition described in detail above on the surface of the substrate on which electroless plated copper is to be deposited on the required portions. The step of forming a layer of a photosensitive resin composition on the surface of an insulating substrate on which electroless plated copper is to be deposited can be carried out by a conventional method. For example, methyl ethyl ketone photosensitive resin composition.

トルエン、塩化メチレン等の溶剤に均一に溶解又は分散
させ、デインプコート法、フローコート法等で無電解め
っき銅を析出させるべき絶縁性基板の表面上KEl!布
し、溶剤乾燥して行なわれる。感光性樹脂組成物の溶液
を基板上に直接塗布せずに。
KEl! is uniformly dissolved or dispersed in a solvent such as toluene or methylene chloride, and then applied to the surface of an insulating substrate on which electroless plated copper is to be deposited using a dip coating method, a flow coating method, etc. This is done by wiping and drying with a solvent. without directly applying a solution of the photosensitive resin composition onto the substrate.

この溶液を支持体フィルム上にナイフコート法。Knife coat this solution onto the support film.

ロールコート法等公知の方法で塗布乾燥し、支持体フィ
ルム上に感光性樹脂組成物の層を有する感光江エレメン
トを製造したのち、該感光性エレメントを無電解めっき
鋼を析出させるべき絶縁性基板表面に公知の方法で加熱
・加圧積層して、該基板表面に感光性樹脂組成物の層を
形成することもできる。支持体フィルムとしてはポリエ
ステルフィルム、ポリプロピレンフィルム、ポリイミド
フィルム、ポリスチレンフィルム等公知のフィルムを使
用できる。感光性エレメントによる方法は塗布膜厚の均
一化が容易であり、また耐溶剤性の低い接着剤も使用で
きる等の点で好ましい。
After coating and drying by a known method such as a roll coating method to produce a photosensitive element having a layer of a photosensitive resin composition on a support film, the photosensitive element is coated on an insulating substrate on which electroless plated steel is to be deposited. A layer of the photosensitive resin composition can also be formed on the surface of the substrate by heating and pressurizing the layer by a known method. As the support film, known films such as polyester film, polypropylene film, polyimide film, polystyrene film, etc. can be used. The method using a photosensitive element is preferable because it is easy to make the coating thickness uniform and adhesives with low solvent resistance can also be used.

本発明の提案する印刷配線板の製造方法は像的な活性光
を照射後現像して無電解めっき銅をその所要部分に析出
させるべき絶縁性基板の表面上に感光性樹脂組成物のネ
ガティブパターンを形成する工程を必ず含む。像的な活
性光の照射は超高圧水銀灯、高圧水銀灯等の光源を用い
、ネガマスクを通して像的KB光することで行なえる。
The method of manufacturing a printed wiring board proposed by the present invention is to apply a negative pattern of a photosensitive resin composition on the surface of an insulating substrate, which is to be irradiated with imagewise active light and then developed to deposit electroless plated copper on the required areas. It always includes the step of forming. Irradiation of imagewise active light can be carried out by using a light source such as an ultra-high-pressure mercury lamp or a high-pressure mercury lamp, and by emitting imagewise KB light through a negative mask.

壕だ微小断面積に絞ったレーザ光線等を像的にスキャン
して行なうこともできる。現像は1.1.1− )リク
ロルエタン等の現像液に像的に活性光の照射された感光
性樹脂組成物の層を有する基板を浸漬するか又は現像液
をスプレーする等して行なえる。
This can also be done by image-wise scanning a laser beam focused on a minute cross-sectional area of the trench. Development can be carried out by immersing a substrate having a layer of a photosensitive resin composition imagewise irradiated with actinic light in a developer such as 1.1.1-) dichloroethane or by spraying the developer.

現像後にさらに活性光を再照射することは、感光性樹脂
組成物の光硬化をさらに進め、耐めっき性が向上し、め
っき浴の汚染がさらに低減するなど好ましい。活性光の
再照射は超高圧水銀灯、高圧水銀灯等の光源を用い基板
全面に照射することにより行なえる。
It is preferable to further re-irradiate the photosensitive resin composition with active light after development, as this further advances photocuring of the photosensitive resin composition, improves plating resistance, and further reduces contamination of the plating bath. Re-irradiation of the activation light can be performed by irradiating the entire surface of the substrate using a light source such as an ultra-high pressure mercury lamp or a high-pressure mercury lamp.

本発明の提案する印刷配線板の製造方法は、上記方法で
得られ念感光性樹脂組成物のネガティブパターンをめっ
きレジストとして無電解銅めっきにより配線パターンを
形成する工程を必ず含む。
The method for manufacturing a printed wiring board proposed by the present invention necessarily includes the step of forming a wiring pattern by electroless copper plating using the negative pattern of the photosensitive resin composition obtained by the above method as a plating resist.

無電解めっき液としては銅塩、錯化剤、還元剤及びpH
%整剤を含有するめつき液が使用できる。
Electroless plating solution includes copper salt, complexing agent, reducing agent and pH
A plating solution containing 100% of plating agent can be used.

銅塩としては例えば硫酸銅、硝酸銅、ギ酸銅。Examples of copper salts include copper sulfate, copper nitrate, and copper formate.

塩化第2銅等が使用できる。錯化剤としては例えばエチ
レンジアミン四酢酸、N−ヒドロキシエチルエチレンジ
アミン三酢酸、 N、 N、 N’、 N’ −テトラ
キス−2−ヒドロキシグロビルエチレンジアミン、ロッ
シェル塩等が使用できる。還元剤としてはホルマリンが
好ましい。またpH調整剤としては通常、水酸化アルカ
リが使用され、水酸化ナトリウム、水酸化カリウム等が
ある。さらにめっき浴の安定性を増すため、あるいは析
出する銅金属の特性を良くするため等の目的で各種の添
加剤が加えられることもある。めっき浴の条件は、めっ
き浴の安定性、析出する銅金属の特性等から銅濃度1〜
159/1. pH10〜13.5.浴温度50〜90
°Cが好ましい。無電解銅めっきにあたっては、必要な
らばめっき触媒の付着及び/あるいは活性化を行なうこ
とは勿論のことである。
Cupric chloride or the like can be used. As the complexing agent, for example, ethylenediaminetetraacetic acid, N-hydroxyethylethylenediaminetriacetic acid, N, N, N', N'-tetrakis-2-hydroxyglobylethylenediamine, Rochelle salt, etc. can be used. Formalin is preferred as the reducing agent. Further, as the pH adjuster, alkali hydroxide is usually used, and examples thereof include sodium hydroxide and potassium hydroxide. Furthermore, various additives may be added for the purpose of increasing the stability of the plating bath or improving the properties of the deposited copper metal. The plating bath conditions are based on the stability of the plating bath, the characteristics of the deposited copper metal, etc., and the copper concentration is 1 to 1.
159/1. pH 10-13.5. Bath temperature 50-90
°C is preferred. In electroless copper plating, it goes without saying that a plating catalyst may be attached and/or activated if necessary.

無電解鋼めっきによる配線パターン形成後に。After wiring pattern formation by electroless steel plating.

めっきレジストとして用いた感光性樹脂組成物のネガテ
ィブパターンを剥離・除去してもいいし。
The negative pattern of the photosensitive resin composition used as a plating resist may be peeled off and removed.

これをそのまま永久レジストとして残してもよい。This may be left as is as a permanent resist.

配線パターン形成後に、銅表面を酸化から保獲するため
、あるいはその部分が電気的接続部分となる場合は接触
抵抗を低下させるため等の目的で。
After wiring pattern formation, the purpose is to protect the copper surface from oxidation, or to reduce contact resistance when that part becomes an electrical connection part.

半田レベラー等で配線パターン全体ちるいは所望部分に
半田を被膜したり、あるいは金めつき、スズめっき等を
行なうことができる。銅表面を半田。
The entire wiring pattern or a desired portion can be coated with solder using a solder leveler or the like, or gold plating, tin plating, etc. can be performed. Solder the copper surface.

金、スズ等の金属で覆った仮、あるいは銅表面のまま基
板上の必要な部分にソルダマスクを形成することができ
る。配線パターンの所望部分のみに半田等の被覆を行な
う為のレジストとしてこのソルダマスクを利用すること
もできる。ソルダマスクの形成は、エポキシ樹脂系イン
クをスクリーン印刷などで印刷し、硬化させて行なうこ
ともできるし、写真法で高精度のソルダマスク全形成す
ることもできる。このようにして製造される印刷配線板
は公知の方法で種々の応用が可能であり9例えば電子部
品全半田付けする等して利用できるが。
A solder mask can be formed on the required portions of the substrate temporarily covered with metal such as gold or tin, or with the copper surface intact. This solder mask can also be used as a resist for coating only desired portions of the wiring pattern with solder or the like. The solder mask can be formed by printing and curing epoxy resin ink by screen printing or the like, or the entire solder mask can be formed with high precision using a photographic method. The printed wiring board manufactured in this way can be used in various ways using known methods, 9 for example, by soldering all electronic components.

無電解銅めっき後の印刷配線板を多層印刷配線板の内層
板として使用することもできる。
The printed wiring board after electroless copper plating can also be used as an inner layer board of a multilayer printed wiring board.

(実施例) 次に本発明の実施例を示す。ここに示す実施例によって
本発明が限定されるものではない。実施例及び比較例中
の「部」は重量部を示す。
(Example) Next, an example of the present invention will be shown. The present invention is not limited to the examples shown here. "Parts" in Examples and Comparative Examples indicate parts by weight.

実施例1 −ト                      4
部ベンゾフェノン             3部4.
4′−ビス(ジエチルアミノ)ベンゾフェノン    
             0.1部ビクトリアピュア
ブルー        0.01部メチルエチルケトン
          100部第1図に示す装置を用い
て上記配合の感光性樹脂組成物の溶液10を25μm厚
さのポリエチレンテレフタレートフィルム16上に均一
に塗布し80〜100℃の熱風対流式乾燥機11で約1
0分間乾燥した。感光性樹脂組成物の層の乾燥後の厚さ
は約35μmであった。感光性樹脂組成物の層の上には
、更に第1図のようにして厚さ約25μmのポリエチレ
ンフィルム17をカバーフィルムとして張り合わせ、感
光性エレメントを得た。
Example 1-G 4
Part Benzophenone Part 3 Part 4.
4'-bis(diethylamino)benzophenone
0.1 part Victoria Pure Blue 0.01 part Methyl ethyl ketone 100 parts Using the apparatus shown in FIG. ~100℃ hot air convection dryer 11
Dry for 0 minutes. The thickness of the layer of the photosensitive resin composition after drying was about 35 μm. On the layer of the photosensitive resin composition, a polyethylene film 17 having a thickness of about 25 μm was further laminated as a cover film as shown in FIG. 1 to obtain a photosensitive element.

第1図において、5はポリエチレンテレフタレートフィ
ルムくり出しロール、6,7.8Viロール、9はナイ
フ、12はポリエチレンフィルムくシ出しロール、13
.14はロール、15は感光性エレメント巻き取りロー
ルでおる。
In FIG. 1, 5 is a polyethylene terephthalate film roll, 6, 7.8 Vi rolls, 9 is a knife, 12 is a polyethylene film roll, 13
.. 14 is a roll, and 15 is a photosensitive element winding roll.

一方、厚さ1.6 mmのフェノール樹脂積層板(日立
化成■製、LP−461F)の両面にアクリロニトリル
ブタジェンゴム変性フェノール樹脂を主成分とする接着
剤(ACIジャパン■製9品番777)を塗布した後、
160℃で110分加熱して接着剤を硬化し、厚さ約3
0μmの接着剤層付きの積層板を得た。次いで必要箇所
にドリルにより穴をあけた後、無水クロム酸及び硫酸を
含む粗化液に浸漬して接着剤層の表面を粗化した。次に
、化学めっきの触媒として日立化成工業■製。
On the other hand, adhesive whose main component is acrylonitrile butadiene rubber-modified phenolic resin (9 product number 777, manufactured by ACI Japan ■) was applied to both sides of a phenolic resin laminate (manufactured by Hitachi Chemical ■, LP-461F) with a thickness of 1.6 mm. After applying,
The adhesive is cured by heating at 160℃ for 110 minutes to a thickness of approximately 3.
A laminate with a 0 μm adhesive layer was obtained. Next, holes were drilled at required locations, and the surface of the adhesive layer was roughened by immersing it in a roughening solution containing chromic anhydride and sulfuric acid. Next, we use Hitachi Chemical Co., Ltd. as a catalyst for chemical plating.

増感剤H8l0IBを含む酸性水溶液に10分間浸漬し
、水洗を行なった後、3.6重量%の希塩酸で5分間処
理し、水洗を行なった後120℃で20分間乾燥した。
It was immersed in an acidic aqueous solution containing sensitizer H8l0IB for 10 minutes, washed with water, treated with 3.6% by weight diluted hydrochloric acid for 5 minutes, washed with water, and then dried at 120° C. for 20 minutes.

次いでこれを16cmX10cmに切断して試験基板と
した。
Next, this was cut into 16 cm x 10 cm to prepare a test board.

この試験基板30枚の両面に上記で得た感光性エレメン
トを常法に従ってラミネートし、第2図に示す試験用ネ
ガマスクを通して、超高圧水銀灯で400 mJ/ C
m”の露光をした。第2図において21はネガマスクの
不透明部分、22はネガマスクの透明部分を示し数字の
単位は口である。80℃で5分間加熱し、20分間常温
で放置後、支持体フィルムであるポリエステルフィルム
をはがし。
The photosensitive elements obtained above were laminated on both sides of the 30 test substrates according to a conventional method, and exposed to 400 mJ/C using an ultra-high pressure mercury lamp through a test negative mask shown in Fig. 2.
21 is the opaque part of the negative mask, 22 is the transparent part of the negative mask, and the units of numbers are units of exposure. After heating at 80°C for 5 minutes and leaving at room temperature for 20 minutes, the support was removed. Peel off the polyester film that is the body film.

1、1.1− )リクロルエタンを用いて70秒間スプ
レー現像し、80℃で10分乾燥した。その後。
1,1.1-) Spray development was carried out using dichloroethane for 70 seconds, and the film was dried at 80°C for 10 minutes. after that.

高圧小銀灯を用いて3J/cII+2の量の紫外線を試
験基板の全面に再照射した。
The entire surface of the test substrate was reirradiated with ultraviolet light in an amount of 3 J/cII+2 using a high-pressure small silver lamp.

このようにして感光性樹脂組成物のネガティブパターン
を形成した試験基板30枚を、下記の組成の化学鋼めっ
き液に70℃で12時間浸漬して無電解鋼めっきを行な
い、ネガティブパターンのない部分に厚さ約30μmの
銅を析出させた。この時、500番の研磨紙で研磨した
16cmX10口のステンレス板を市販の触媒液(日立
化成工業■製、H8101B)で増感処理したものを同
時に無電解鋼めっきし、めっき後、めっきにより得られ
た銅箔をステンレス板から静かに引き剥がし。
Thirty test substrates on which negative patterns of the photosensitive resin composition were formed in this way were immersed in a chemical steel plating solution with the following composition at 70°C for 12 hours to perform electroless steel plating, and the areas without negative patterns were Copper was deposited to a thickness of about 30 μm. At this time, a 16 cm x 10 stainless steel plate polished with No. 500 abrasive paper was sensitized with a commercially available catalyst solution (manufactured by Hitachi Chemical Co., Ltd., H8101B) and electroless steel plated at the same time. Gently peel off the copper foil from the stainless steel plate.

1cm幅に切断して引張り試験用の試片を作成した。A specimen for a tensile test was prepared by cutting into a 1 cm width.

(化学鋼めっき液組成) 硫酸銅 五水和物       10 g/lエチレン
ジアミン四酢酸酢酸  30g/V37チホルマリン 
      3ml/1pH(水酸化ナトリウム調整)
     IZ5ポリエチレングリコール(分子160
0)20rnl/1 2.2′−ジピリジル      30111g/ 1
30枚の試験基板には全て、用いたネガフィルムのパタ
ーンを高精度に再現しためつき銅のパターンが得られた
。また、ステンレス板にめっきした銅箔を用い、■島津
製作所製オートグラフDSS−5000を使用してチャ
ック間隔50mmとして。
(Chemical steel plating solution composition) Copper sulfate pentahydrate 10 g/l Ethylenediaminetetraacetic acid 30 g/V37 thiformin
3ml/1pH (sodium hydroxide adjustment)
IZ5 polyethylene glycol (molecule 160
0) 20rnl/1 2.2'-dipyridyl 30111g/1
On all 30 test boards, a patterned copper pattern was obtained that reproduced with high precision the pattern of the negative film used. In addition, using copper foil plated on a stainless steel plate, ■ Autograph DSS-5000 manufactured by Shimadzu Corporation was used with a chuck interval of 50 mm.

引張速度2mm/分で引張り試験を行ない、銅の機械的
物性を測定したところ、伸び率9.2%、折り曲げ可能
回数6回と良好であった。
A tensile test was conducted at a tensile speed of 2 mm/min, and the mechanical properties of the copper were measured, and the elongation rate was 9.2%, and the number of bends possible was 6 times, which were good.

実施例2 実施例1のトリメチロールプロパントリメタクリレート
46部及びトリメチロールプロパントリアクリレート4
部にかえて、トリメチロールプロパントリメタクリレー
ト25部及びトリメチロールプロパン) l)アクリレ
ート25部を用いた他は実施例1と同様に行なった。高
精度のめつき銅のパターンが得られ、銅の伸び率7.5
チ、折り曲げ可能口e1.5回と良好であった。
Example 2 46 parts of trimethylolpropane trimethacrylate and 4 parts of trimethylolpropane triacrylate of Example 1
Example 1 was repeated, except that 25 parts of trimethylolpropane trimethacrylate and 25 parts of trimethylolpropane were used instead of 25 parts of acrylate. A highly accurate plated copper pattern is obtained, and the elongation rate of copper is 7.5.
H. The bendable opening e was 1.5 times, which was good.

実施例3 実施例1のトリメチロールプロパントリメタクリレート
46部及びトリメチロールプロパントリアクリレート4
部にかえてトリメチロールプロパントリメタクリレート
2(1,2,2’−ビス(4−メタクリロΦシジエトキ
シフェニル)プロパン10部及びKAYARAD”R−
604(日本化系■製、アクリレートモノマ)20部を
用いた他は実施例1と同様に行なった。高精度のめつき
銅のパターンが得られ、銅の伸び率10.1%、折り曲
げ可能回数6回と良好であった。
Example 3 46 parts of trimethylolpropane trimethacrylate of Example 1 and 4 parts of trimethylolpropane triacrylate
1 part of trimethylolpropane trimethacrylate 2(1,2,2'-bis(4-methacryloΦsidiethoxyphenyl)propane and 10 parts of KAYARAD"R-
The same procedure as in Example 1 was conducted except that 20 parts of 604 (acrylate monomer, manufactured by Nippon Kakei ■) was used. A highly accurate pattern of plated copper was obtained, and the copper elongation rate was 10.1%, and the number of bends possible was 6, which was good.

実施例4 実施例1のトリメチロールプロパントリメタクリレート
46部及びトリメチロールプロパントリアクリレート4
部にかえてジペンタエリスリトールへキサメタクリレー
ト30部、テトラヒドロフルフリルメタクリレート10
部及びトリメチロールエタントリアクリレート10部を
用いた他は実施例1と同様に行なった。高精度のめつき
鋼のパターンが得られ、銅の伸び率9.5%、折り曲げ
可能回数6回と良好であった。
Example 4 46 parts of trimethylolpropane trimethacrylate of Example 1 and 4 parts of trimethylolpropane triacrylate
30 parts of dipentaerythritol hexamethacrylate, 10 parts of tetrahydrofurfuryl methacrylate
The same procedure as in Example 1 was conducted except that 10 parts of trimethylolethane triacrylate and 10 parts of trimethylolethane triacrylate were used. A highly accurate plated steel pattern was obtained, and the copper elongation rate was 9.5%, and the number of bends possible was 6 times, which was good.

実施例5 ベンゾフェノン             3部ビクト
リアピュアブルー        0.OJ部トルエン
                 50部メチルエチ
ルケトン           50部上記配合の感光
性樹脂組成物の溶液を用いる他は実施例1と同様に行な
った。高精度のめつき銅のパターンが得られ、銅の伸び
率87チ、折り曲げ可能回数6回と良好であった。
Example 5 Benzophenone 3 parts Victoria Pure Blue 0. OJ part Toluene 50 parts Methyl ethyl ketone 50 parts The same procedure as in Example 1 was carried out except that a solution of the photosensitive resin composition having the above formulation was used. A highly accurate plated copper pattern was obtained, and the copper elongation rate was 87 inches, and the number of bends possible was 6, which was good.

実施例6 実施例5のメタクリル酸メチル・スチレン・ブタジェン
共重合物55部にかえて、メタクリル酸メチル・テトラ
ヒドロフルフリルメタクリレート・メタクリル酸・2−
ヒドロキシエチルメタクリレート(82/15/l/2
fi量比)共重合物55部を用いる他は実施例1と同様
に行なった。
Example 6 In place of 55 parts of methyl methacrylate/styrene/butadiene copolymer of Example 5, methyl methacrylate/tetrahydrofurfuryl methacrylate/methacrylic acid/2-
Hydroxyethyl methacrylate (82/15/l/2
Example 1 was repeated except that 55 parts of the copolymer (fi amount ratio) was used.

高精度のめつき銅のパターンが得られ、銅の伸び率8.
2%、折り曲げ可能回数6回と良好であった。
A highly accurate plated copper pattern was obtained, and the copper elongation rate was 8.
2% and could be bent 6 times, which was good.

比較例1 実施例1のトリメチロールプロパントリメタフIJ L
/−ト46部及びトリメチロールプロバントl)アクリ
レート4部にかえてトリメチロールプロパントリアクリ
レート50部を用いた他は実施例1と同様に行なった。
Comparative Example 1 Trimethylolpropane trimethaf IJ L of Example 1
Example 1 was repeated except that 46 parts of trimethylolpropane triacrylate and 46 parts of trimethylolpropane triacrylate were used instead of 46 parts of trimethylolpropane triacrylate.

銅の伸び率3.2%、折り曲げ可能回数3回と銅の物性
はよくなかった。
The physical properties of copper were not good, with an elongation rate of 3.2% and a bendable number of times of 3.

比較例2 実施例1のトリメチロールプロパントリメタクリレート
46部及びトリメチロールプロパントリアクリレート4
部にかえてイソホロンジイソシアネート1モルに2−ヒ
ドロキシエチルアクリレート2モルを反応させて得たウ
レタンジアクリレート50部を用いた他は実施例1と同
様に行なった。
Comparative Example 2 46 parts of trimethylolpropane trimethacrylate of Example 1 and 4 parts of trimethylolpropane triacrylate
The same procedure as in Example 1 was carried out, except that 50 parts of urethane diacrylate obtained by reacting 1 mole of isophorone diisocyanate with 2 moles of 2-hydroxyethyl acrylate was used instead of 1 mole of isophorone diisocyanate.

銅の伸び率1.5 % 、折り曲げ可能回数1回と鍋物
性はよくなかった。
The physical properties of the pot were not good, with an elongation rate of copper of 1.5% and the number of bends possible.

比較例3 実施例1のトリメチロールプロパントリメタクリレート
46部及びトリメチロールプロパントリアクリレート4
部にかえてトリレンジイソシアネート1モルに2−ヒド
ロキシエチルメタクリレート2モルを反応させて得たウ
レタンジメタクリレート50部を用いた他は実施例1と
同様に行なった。銅の伸び率2.1%、折り曲げ可能回
数1回と銅の物性はよくなかった。
Comparative Example 3 46 parts of trimethylolpropane trimethacrylate of Example 1 and 4 parts of trimethylolpropane triacrylate
The same procedure as in Example 1 was carried out, except that 50 parts of urethane dimethacrylate obtained by reacting 1 mole of tolylene diisocyanate with 2 moles of 2-hydroxyethyl methacrylate was used instead of 1 mole of tolylene diisocyanate. The physical properties of copper were not good, with an elongation rate of 2.1% and a bendability of 1 time.

実施例7 メチルエチルケトン           20部実施
例1で使用したものと同じ試験基板30枚に上記の感光
性樹脂組成物の溶液をディップコート法で塗布し80℃
で10分間乾燥した。乾燥後の感光性樹脂組成物の層の
厚さは約20μmでちった。その上に25μm厚のポリ
エチレンテレフタレートフィルムをラミネートした。こ
のようにして感光性樹脂組成物の層を形成したこと以外
は実施例1と同様に行なった。高精度のめつき鋼のパタ
ーンが得られ、銅の伸び率7.4%、折り曲げ可能回数
5回と良好であった。
Example 7 20 parts of methyl ethyl ketone A solution of the above photosensitive resin composition was coated on 30 test substrates, the same as those used in Example 1, by dip coating and heated at 80°C.
and dried for 10 minutes. The thickness of the layer of the photosensitive resin composition after drying was approximately 20 μm. A 25 μm thick polyethylene terephthalate film was laminated thereon. The same procedure as in Example 1 was carried out except that the layer of the photosensitive resin composition was formed in this manner. A highly accurate plated steel pattern was obtained, and the copper elongation rate was 7.4%, and the number of bends possible was 5, which was good.

(発明の効果) 実施例に示した様に本発明になる印刷配線板の製造方法
によって、アディティブ法でめっき銅の物性の良好な高
精度の印刷配線板が得られる。
(Effects of the Invention) As shown in the Examples, by the method for manufacturing a printed wiring board according to the present invention, a highly accurate printed wiring board with good physical properties of plated copper can be obtained by an additive method.

また、めっき浴の汚染がほとんどないので量産化が可能
になる。
In addition, since there is almost no contamination of the plating bath, mass production becomes possible.

尚、上記は本発明の実施例にすぎず、当然9本発明の精
神を逸脱しない範囲で種々の変形及び使用方法が可能で
ある。
It should be noted that the above are merely examples of the present invention, and various modifications and usage methods are naturally possible without departing from the spirit of the present invention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は実施例で用いた感光性エレメントの製造装置の
略図、第2図は実施例で用いた試験用ネガマスクを示す
図である。 符号の説明 5・・・ポリエチレンテレフタレートフィルム<す出し
ロール 6.7.8・・・ロール 9・・・ナイフ 10・・・感光性樹脂組成物の溶液 11・・・乾燥機 12・・・ポリエチレンフィルム< り出Lロール13
.14 ・・・ロール 15・・・lle性エレメント巻き取りロール16・・
・ポリエチレンテレフタレートフィルム17・・・ポリ
エチレンフィルム 21・・・ネガマスクの不透明部分 22・・・ネガマスクの透明部分 粟 l 目 Tz口
FIG. 1 is a schematic diagram of a photosensitive element manufacturing apparatus used in Examples, and FIG. 2 is a diagram showing a test negative mask used in Examples. Explanation of symbols 5...Polyethylene terephthalate film Film < Extrusion L roll 13
.. 14... Roll 15... lle element winding roll 16...
- Polyethylene terephthalate film 17... Polyethylene film 21... Opaque part of negative mask 22... Transparent part of negative mask l Eyes Tz mouth

Claims (1)

【特許請求の範囲】 1、(1)無電解めつき銅をその所要部分に析出させる
べき基板の表面に、(a)(イ)末端メタクリロイル基
を少なくとも1個有し、分子内に水素原子と直接共有結
合した窒素原子を有しない1種以上の不飽和化合物5〜
99重量%と(ロ)末端アクリロイル基を少なくとも1
個有し、分子内に水素原子と直接共有結合した窒素原子
を有しない1種以上の不飽和化合物95〜1重量%から
なる光重合可能な成分100重量部に対し、(b)分子
内に水素原子と直接共有結合した窒素原子を有しない線
状高分子化合物0〜400重量部並びに(c)活性光に
より遊離ラジカルを生成する増感剤又は(及び)増感剤
系0.5〜20重量部 を含有する感光性樹脂組成物の層を形成する工程(2)
像的な活性光照射および現像により該基板の表面上に感
光性樹脂組成物のネガティブパターンを形成する工程 ならびに (3)該基板の表面上の該感光性樹脂組成物のネガティ
ブパターンをめつきレジストとして無電解銅めつきによ
り配線パターンを形成する工程を経ることを特徴とする
印刷配線板の製造方法。 2、(b)の分子内に水素原子と直接共有結合した窒素
原子を有しない線状高分子化合物が、側鎖にテトラヒド
ロフルフリル基を有する線状高分子化合物である特許請
求の範囲第1項記載の印刷配線板の製造方法。 3、感光性樹脂組成物の層を形成する工程が、感光性エ
レメントを積層する方法である特許請求の範囲第1項又
は第2項記載の印刷配線板の製造方法。 4、現像後にさらに活性光を再照射する工程を含む特許
請求の範囲第1項、第2項又は第3項記載の印刷配線板
の製造方法。 5、(イ)の末端メタクリロイル基を少なくとも1個有
し、分子内に水素原子と直接共有結合した窒素原子を有
しない不飽和化合物が、水素原子と直接共有結合した酸
素原子も有しない化合物である特許請求の範囲第1項、
第2項、第3項又は第4項記載の印刷配線板の製造方法
[Claims] 1. (1) The surface of the substrate on which the electroless plated copper is to be deposited on the required portions has (a) (b) at least one terminal methacryloyl group, and hydrogen atoms in the molecule. one or more unsaturated compounds that do not have a nitrogen atom directly covalently bonded to
99% by weight and (b) at least 1 terminal acryloyl group.
(b) for 100 parts by weight of a photopolymerizable component consisting of 95 to 1% by weight of one or more unsaturated compounds having no nitrogen atom directly covalently bonded to a hydrogen atom in the molecule; 0 to 400 parts by weight of a linear polymer compound that does not have a nitrogen atom directly covalently bonded to a hydrogen atom; and (c) 0.5 to 20 parts by weight of a sensitizer or (and) a sensitizer system that generates free radicals by actinic light. Step (2) of forming a layer of a photosensitive resin composition containing parts by weight
forming a negative pattern of the photosensitive resin composition on the surface of the substrate by imagewise active light irradiation and development; and (3) plating the negative pattern of the photosensitive resin composition on the surface of the substrate with a resist. 1. A method for manufacturing a printed wiring board, comprising the step of forming a wiring pattern by electroless copper plating. 2. Claim 1, wherein the linear polymer compound (b) that does not have a nitrogen atom directly covalently bonded to a hydrogen atom in the molecule is a linear polymer compound that has a tetrahydrofurfuryl group in its side chain. A method for manufacturing a printed wiring board as described in Section 1. 3. The method for manufacturing a printed wiring board according to claim 1 or 2, wherein the step of forming a layer of the photosensitive resin composition is a method of laminating photosensitive elements. 4. The method for manufacturing a printed wiring board according to claim 1, 2, or 3, which includes the step of further irradiating with active light after development. 5. (a) An unsaturated compound having at least one terminal methacryloyl group and having no nitrogen atom directly covalently bonded to a hydrogen atom in the molecule is a compound that also does not have an oxygen atom directly covalently bonded to a hydrogen atom. Claim 1,
The method for manufacturing a printed wiring board according to item 2, 3, or 4.
JP61163097A 1986-07-11 1986-07-11 Manufacture of printed wiring board Granted JPS6318692A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61163097A JPS6318692A (en) 1986-07-11 1986-07-11 Manufacture of printed wiring board
GB8715744A GB2193730B (en) 1986-07-11 1987-07-03 Production of printed circuit boards
DE3722749A DE3722749C2 (en) 1986-07-11 1987-07-09 Method for producing a printed circuit board
KR1019870007457A KR900003848B1 (en) 1986-07-11 1987-07-10 Manufacture of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61163097A JPS6318692A (en) 1986-07-11 1986-07-11 Manufacture of printed wiring board

Publications (2)

Publication Number Publication Date
JPS6318692A true JPS6318692A (en) 1988-01-26
JPH0344432B2 JPH0344432B2 (en) 1991-07-05

Family

ID=15767122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61163097A Granted JPS6318692A (en) 1986-07-11 1986-07-11 Manufacture of printed wiring board

Country Status (4)

Country Link
JP (1) JPS6318692A (en)
KR (1) KR900003848B1 (en)
DE (1) DE3722749C2 (en)
GB (1) GB2193730B (en)

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JP2000181063A (en) * 1998-10-09 2000-06-30 Chisso Corp Resin composition for color filter
JP2006235499A (en) * 2005-02-28 2006-09-07 Hitachi Chem Co Ltd Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, method for manufacturing printed wiring board and method for removing photoset object

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US5004672A (en) * 1989-07-10 1991-04-02 Shipley Company Inc. Electrophoretic method for applying photoresist to three dimensional circuit board substrate
US5352326A (en) * 1993-05-28 1994-10-04 International Business Machines Corporation Process for manufacturing metalized ceramic substrates
TW290583B (en) * 1993-10-14 1996-11-11 Alpha Metals Ltd
DE102020215812A1 (en) 2020-12-14 2022-06-15 Robert Bosch Gesellschaft mit beschränkter Haftung power module

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
JP2000181063A (en) * 1998-10-09 2000-06-30 Chisso Corp Resin composition for color filter
JP2006235499A (en) * 2005-02-28 2006-09-07 Hitachi Chem Co Ltd Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, method for manufacturing printed wiring board and method for removing photoset object
JP4715234B2 (en) * 2005-02-28 2011-07-06 日立化成工業株式会社 Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, printed wiring board manufacturing method, and photocured product removing method

Also Published As

Publication number Publication date
DE3722749C2 (en) 1994-09-15
KR880002416A (en) 1988-04-30
KR900003848B1 (en) 1990-06-02
GB2193730A (en) 1988-02-17
JPH0344432B2 (en) 1991-07-05
GB2193730B (en) 1991-04-03
GB8715744D0 (en) 1987-08-12
DE3722749A1 (en) 1988-01-21

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