JPS63186763U - - Google Patents

Info

Publication number
JPS63186763U
JPS63186763U JP2090287U JP2090287U JPS63186763U JP S63186763 U JPS63186763 U JP S63186763U JP 2090287 U JP2090287 U JP 2090287U JP 2090287 U JP2090287 U JP 2090287U JP S63186763 U JPS63186763 U JP S63186763U
Authority
JP
Japan
Prior art keywords
heater
vapor deposition
vacuum
jig
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2090287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2090287U priority Critical patent/JPS63186763U/ja
Publication of JPS63186763U publication Critical patent/JPS63186763U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2090287U 1987-02-16 1987-02-16 Pending JPS63186763U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2090287U JPS63186763U (enExample) 1987-02-16 1987-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2090287U JPS63186763U (enExample) 1987-02-16 1987-02-16

Publications (1)

Publication Number Publication Date
JPS63186763U true JPS63186763U (enExample) 1988-11-30

Family

ID=30816844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2090287U Pending JPS63186763U (enExample) 1987-02-16 1987-02-16

Country Status (1)

Country Link
JP (1) JPS63186763U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003293122A (ja) * 1999-12-27 2003-10-15 Semiconductor Energy Lab Co Ltd 表示装置の作製方法
US7309269B2 (en) 2002-04-15 2007-12-18 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
US7517551B2 (en) 2000-05-12 2009-04-14 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a light-emitting device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003293122A (ja) * 1999-12-27 2003-10-15 Semiconductor Energy Lab Co Ltd 表示装置の作製方法
JP2011117083A (ja) * 1999-12-27 2011-06-16 Semiconductor Energy Lab Co Ltd 発光装置の作製方法
JP2013147754A (ja) * 1999-12-27 2013-08-01 Semiconductor Energy Lab Co Ltd 成膜方法
US8968823B2 (en) 1999-12-27 2015-03-03 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a light emitting device
JP2018066066A (ja) * 1999-12-27 2018-04-26 株式会社半導体エネルギー研究所 成膜方法
US7517551B2 (en) 2000-05-12 2009-04-14 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a light-emitting device
US7309269B2 (en) 2002-04-15 2007-12-18 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
US9209427B2 (en) 2002-04-15 2015-12-08 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device

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