JPS62110261U - - Google Patents
Info
- Publication number
- JPS62110261U JPS62110261U JP20154785U JP20154785U JPS62110261U JP S62110261 U JPS62110261 U JP S62110261U JP 20154785 U JP20154785 U JP 20154785U JP 20154785 U JP20154785 U JP 20154785U JP S62110261 U JPS62110261 U JP S62110261U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- vapor deposition
- deposition material
- crucible
- shielding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20154785U JPS62110261U (enExample) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20154785U JPS62110261U (enExample) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110261U true JPS62110261U (enExample) | 1987-07-14 |
Family
ID=31165104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20154785U Pending JPS62110261U (enExample) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110261U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746131A (en) * | 1980-09-05 | 1982-03-16 | Toshiba Corp | Detector for abnormality in optical transmission system |
| JPS58210166A (ja) * | 1982-06-02 | 1983-12-07 | Hitachi Ltd | スパツタ装置 |
-
1985
- 1985-12-27 JP JP20154785U patent/JPS62110261U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746131A (en) * | 1980-09-05 | 1982-03-16 | Toshiba Corp | Detector for abnormality in optical transmission system |
| JPS58210166A (ja) * | 1982-06-02 | 1983-12-07 | Hitachi Ltd | スパツタ装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| USD292182S (en) | Flower pot cover | |
| NO820797L (no) | Fremgangsmaate for fremstilling av et aluminiumplateemne, samt aluminiumplatemateriale fremstilt ved kontinuerlig kjoelevalsestoepeprosess | |
| DE3277789D1 (en) | Method of electron beam evaporating reactive metals onto semiconductors | |
| NO873183L (no) | Fremgangsmaate til fremstilling av reninhemmende di- og tri-peptider. | |
| NO812680L (no) | Fremgangsmaate til fremstilling av pulvermetallurgiemner bestaaende av flere legeringer | |
| NO900182D0 (no) | Fremgangsmaate ved fremstilling av metallbelagte partikler. | |
| JPS62110261U (enExample) | ||
| BE894233A (fr) | Procede de preparation de ligands colloidaux de radio-isotope a partir d'albumine serique humaine et leur utilisation | |
| Bushueva et al. | Influence of structure defects on the angular distribution of x-ray diffraction in crystals with a disturbed surface layer | |
| EG17087A (en) | A composite boudy for sustainedly releasing vapor of vaporizable active substance and a method for the preparation thereof | |
| EP0201933A3 (en) | Vapor deposition method for the gaas thin film | |
| NZ193708A (en) | Vapour deposition of valve metal on particulate insulating substrate | |
| CA2016028A1 (en) | Method of fabricating oxide superconducting film | |
| JPH01110256U (enExample) | ||
| JPH0363569U (enExample) | ||
| JPH0353834U (enExample) | ||
| JPS6350122U (enExample) | ||
| FI853777A7 (fi) | Hienoja partikkeleita, joilla on metalli- tai metalliyhdistepinnoite, erityisesti katalyyttisesti aktiivisesta aineesta ja sen valmistusmen etelmä. | |
| HUT44393A (en) | Pesticide against grape-berry moth and process for preparing the active substances | |
| JPS6242236U (enExample) | ||
| JPS61177439U (enExample) | ||
| JPH0378409U (enExample) | ||
| JPS6396501U (enExample) | ||
| JPH0320523U (enExample) | ||
| JPS63110024U (enExample) |