JPS6318329B2 - - Google Patents

Info

Publication number
JPS6318329B2
JPS6318329B2 JP60172301A JP17230185A JPS6318329B2 JP S6318329 B2 JPS6318329 B2 JP S6318329B2 JP 60172301 A JP60172301 A JP 60172301A JP 17230185 A JP17230185 A JP 17230185A JP S6318329 B2 JPS6318329 B2 JP S6318329B2
Authority
JP
Japan
Prior art keywords
cartridge
semiconductor wafer
wafer
rotating station
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60172301A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144441A (ja
Inventor
Hiroshi Maejima
Masato Ishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17230185A priority Critical patent/JPS6144441A/ja
Publication of JPS6144441A publication Critical patent/JPS6144441A/ja
Publication of JPS6318329B2 publication Critical patent/JPS6318329B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • De-Stacking Of Articles (AREA)
JP17230185A 1985-08-07 1985-08-07 ウエハ引出し装置 Granted JPS6144441A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17230185A JPS6144441A (ja) 1985-08-07 1985-08-07 ウエハ引出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17230185A JPS6144441A (ja) 1985-08-07 1985-08-07 ウエハ引出し装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11079176A Division JPS5943822B2 (ja) 1976-09-17 1976-09-17 カ−トリツジからのウエハ自動引出装置

Publications (2)

Publication Number Publication Date
JPS6144441A JPS6144441A (ja) 1986-03-04
JPS6318329B2 true JPS6318329B2 (enrdf_load_html_response) 1988-04-18

Family

ID=15939385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17230185A Granted JPS6144441A (ja) 1985-08-07 1985-08-07 ウエハ引出し装置

Country Status (1)

Country Link
JP (1) JPS6144441A (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943822B2 (ja) * 1976-09-17 1984-10-24 株式会社日立製作所 カ−トリツジからのウエハ自動引出装置

Also Published As

Publication number Publication date
JPS6144441A (ja) 1986-03-04

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