JPS6318169B2 - - Google Patents
Info
- Publication number
- JPS6318169B2 JPS6318169B2 JP6148378A JP6148378A JPS6318169B2 JP S6318169 B2 JPS6318169 B2 JP S6318169B2 JP 6148378 A JP6148378 A JP 6148378A JP 6148378 A JP6148378 A JP 6148378A JP S6318169 B2 JPS6318169 B2 JP S6318169B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light
- light beam
- focused
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 19
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 229920005992 thermoplastic resin Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6148378A JPS54153051A (en) | 1978-05-22 | 1978-05-22 | Scanning optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6148378A JPS54153051A (en) | 1978-05-22 | 1978-05-22 | Scanning optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54153051A JPS54153051A (en) | 1979-12-01 |
| JPS6318169B2 true JPS6318169B2 (zh) | 1988-04-18 |
Family
ID=13172360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6148378A Granted JPS54153051A (en) | 1978-05-22 | 1978-05-22 | Scanning optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54153051A (zh) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61134724A (ja) * | 1984-12-06 | 1986-06-21 | Nippon Steel Corp | レ−ザ−照射装置 |
| JPS63175822A (ja) * | 1987-01-14 | 1988-07-20 | Fuji Photo Film Co Ltd | 光ビ−ム走査記録装置 |
| JP4501811B2 (ja) * | 2005-08-09 | 2010-07-14 | セイコーエプソン株式会社 | 光走査装置及び画像表示装置 |
| JP2007093947A (ja) * | 2005-09-28 | 2007-04-12 | Fujifilm Corp | インナードラム露光装置および露光方法 |
| CN104062757B (zh) * | 2014-06-30 | 2016-04-13 | 太原理工大学 | 一种用于相控阵多光束三维扫描的相位分布设计方法 |
| WO2023157475A1 (ja) * | 2022-02-18 | 2023-08-24 | 株式会社日立ハイテク | 回折格子の製造方法および回折格子 |
-
1978
- 1978-05-22 JP JP6148378A patent/JPS54153051A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54153051A (en) | 1979-12-01 |
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