JPH0151802B2 - - Google Patents
Info
- Publication number
- JPH0151802B2 JPH0151802B2 JP54120302A JP12030279A JPH0151802B2 JP H0151802 B2 JPH0151802 B2 JP H0151802B2 JP 54120302 A JP54120302 A JP 54120302A JP 12030279 A JP12030279 A JP 12030279A JP H0151802 B2 JPH0151802 B2 JP H0151802B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light
- optical system
- light beam
- focused
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 28
- 229920002120 photoresistant polymer Polymers 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12030279A JPS5643611A (en) | 1979-09-18 | 1979-09-18 | Scanning optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12030279A JPS5643611A (en) | 1979-09-18 | 1979-09-18 | Scanning optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5643611A JPS5643611A (en) | 1981-04-22 |
| JPH0151802B2 true JPH0151802B2 (zh) | 1989-11-06 |
Family
ID=14782865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12030279A Granted JPS5643611A (en) | 1979-09-18 | 1979-09-18 | Scanning optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5643611A (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093447A (zh) * | 1973-12-19 | 1975-07-25 |
-
1979
- 1979-09-18 JP JP12030279A patent/JPS5643611A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093447A (zh) * | 1973-12-19 | 1975-07-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5643611A (en) | 1981-04-22 |
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