JPS63180927U - - Google Patents
Info
- Publication number
- JPS63180927U JPS63180927U JP7279387U JP7279387U JPS63180927U JP S63180927 U JPS63180927 U JP S63180927U JP 7279387 U JP7279387 U JP 7279387U JP 7279387 U JP7279387 U JP 7279387U JP S63180927 U JPS63180927 U JP S63180927U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- flow path
- substrate processing
- storage groove
- liquid flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 16
- 238000004140 cleaning Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 4
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7279387U JPH0410690Y2 (US07714131-20100511-C00038.png) | 1987-05-14 | 1987-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7279387U JPH0410690Y2 (US07714131-20100511-C00038.png) | 1987-05-14 | 1987-05-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63180927U true JPS63180927U (US07714131-20100511-C00038.png) | 1988-11-22 |
| JPH0410690Y2 JPH0410690Y2 (US07714131-20100511-C00038.png) | 1992-03-17 |
Family
ID=30916560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7279387U Expired JPH0410690Y2 (US07714131-20100511-C00038.png) | 1987-05-14 | 1987-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410690Y2 (US07714131-20100511-C00038.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082520A1 (fr) * | 2001-03-30 | 2002-10-17 | Sumitomo Precision Products Co., Ltd. | Procede d'isolement de fuite dans un conteneur de gaz et conteneur comprenant une structure d'isolement de fuite de gaz interne |
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
-
1987
- 1987-05-14 JP JP7279387U patent/JPH0410690Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
| WO2002082520A1 (fr) * | 2001-03-30 | 2002-10-17 | Sumitomo Precision Products Co., Ltd. | Procede d'isolement de fuite dans un conteneur de gaz et conteneur comprenant une structure d'isolement de fuite de gaz interne |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410690Y2 (US07714131-20100511-C00038.png) | 1992-03-17 |
