JPS63179051A - 非晶質磁性合金の製造方法 - Google Patents
非晶質磁性合金の製造方法Info
- Publication number
- JPS63179051A JPS63179051A JP62227961A JP22796187A JPS63179051A JP S63179051 A JPS63179051 A JP S63179051A JP 62227961 A JP62227961 A JP 62227961A JP 22796187 A JP22796187 A JP 22796187A JP S63179051 A JPS63179051 A JP S63179051A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- alloy
- magnetic field
- amorphous
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001004 magnetic alloy Inorganic materials 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 230000035699 permeability Effects 0.000 claims abstract description 42
- 239000010409 thin film Substances 0.000 claims abstract description 28
- 238000002425 crystallisation Methods 0.000 claims abstract description 7
- 230000008025 crystallization Effects 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims description 39
- 238000010791 quenching Methods 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000956 alloy Substances 0.000 abstract description 46
- 229910045601 alloy Inorganic materials 0.000 abstract description 40
- 238000000034 method Methods 0.000 abstract description 22
- 239000000203 mixture Substances 0.000 abstract description 17
- 238000001816 cooling Methods 0.000 abstract description 13
- 239000011261 inert gas Substances 0.000 abstract description 8
- 239000007791 liquid phase Substances 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 238000009738 saturating Methods 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 17
- 230000004907 flux Effects 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000005415 magnetization Effects 0.000 description 9
- 239000010453 quartz Substances 0.000 description 9
- 230000007423 decrease Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 230000003068 static effect Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000013016 damping Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010583 slow cooling Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000005280 amorphization Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052752 metalloid Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000700 radioactive tracer Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910052799 carbon Chemical group 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000002639 sodium chloride Nutrition 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Soft Magnetic Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62227961A JPS63179051A (ja) | 1987-09-11 | 1987-09-11 | 非晶質磁性合金の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62227961A JPS63179051A (ja) | 1987-09-11 | 1987-09-11 | 非晶質磁性合金の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3884479A Division JPS5616633A (en) | 1979-03-31 | 1979-03-31 | Manufacture of amorphous magnetic alloy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63179051A true JPS63179051A (ja) | 1988-07-23 |
| JPH0518901B2 JPH0518901B2 (enrdf_load_stackoverflow) | 1993-03-15 |
Family
ID=16868969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62227961A Granted JPS63179051A (ja) | 1987-09-11 | 1987-09-11 | 非晶質磁性合金の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63179051A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5494534A (en) * | 1995-03-17 | 1996-02-27 | Industrial Technology Research Institute | Method of heat treating an amorphous soft magnetic article |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55110764A (en) * | 1979-02-20 | 1980-08-26 | Matsushita Electric Ind Co Ltd | Method of thermal treatment for amorphous alloy |
-
1987
- 1987-09-11 JP JP62227961A patent/JPS63179051A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55110764A (en) * | 1979-02-20 | 1980-08-26 | Matsushita Electric Ind Co Ltd | Method of thermal treatment for amorphous alloy |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5494534A (en) * | 1995-03-17 | 1996-02-27 | Industrial Technology Research Institute | Method of heat treating an amorphous soft magnetic article |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518901B2 (enrdf_load_stackoverflow) | 1993-03-15 |
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