JPS63174444U - - Google Patents

Info

Publication number
JPS63174444U
JPS63174444U JP16191586U JP16191586U JPS63174444U JP S63174444 U JPS63174444 U JP S63174444U JP 16191586 U JP16191586 U JP 16191586U JP 16191586 U JP16191586 U JP 16191586U JP S63174444 U JPS63174444 U JP S63174444U
Authority
JP
Japan
Prior art keywords
wafer
carrier
shelf
wafer carrier
receiving plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16191586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16191586U priority Critical patent/JPS63174444U/ja
Publication of JPS63174444U publication Critical patent/JPS63174444U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP16191586U 1986-10-22 1986-10-22 Pending JPS63174444U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16191586U JPS63174444U (enrdf_load_stackoverflow) 1986-10-22 1986-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16191586U JPS63174444U (enrdf_load_stackoverflow) 1986-10-22 1986-10-22

Publications (1)

Publication Number Publication Date
JPS63174444U true JPS63174444U (enrdf_load_stackoverflow) 1988-11-11

Family

ID=31088680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16191586U Pending JPS63174444U (enrdf_load_stackoverflow) 1986-10-22 1986-10-22

Country Status (1)

Country Link
JP (1) JPS63174444U (enrdf_load_stackoverflow)

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