JPH01130540U - - Google Patents

Info

Publication number
JPH01130540U
JPH01130540U JP2792788U JP2792788U JPH01130540U JP H01130540 U JPH01130540 U JP H01130540U JP 2792788 U JP2792788 U JP 2792788U JP 2792788 U JP2792788 U JP 2792788U JP H01130540 U JPH01130540 U JP H01130540U
Authority
JP
Japan
Prior art keywords
wafer
carrier
shelf
wafer carrier
receiving plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2792788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2792788U priority Critical patent/JPH01130540U/ja
Publication of JPH01130540U publication Critical patent/JPH01130540U/ja
Pending legal-status Critical Current

Links

JP2792788U 1988-03-02 1988-03-02 Pending JPH01130540U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2792788U JPH01130540U (enrdf_load_stackoverflow) 1988-03-02 1988-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2792788U JPH01130540U (enrdf_load_stackoverflow) 1988-03-02 1988-03-02

Publications (1)

Publication Number Publication Date
JPH01130540U true JPH01130540U (enrdf_load_stackoverflow) 1989-09-05

Family

ID=31250852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2792788U Pending JPH01130540U (enrdf_load_stackoverflow) 1988-03-02 1988-03-02

Country Status (1)

Country Link
JP (1) JPH01130540U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014017587A1 (ja) * 2012-07-26 2014-01-30 千住金属工業株式会社 半導体ウエハー搬送治具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014017587A1 (ja) * 2012-07-26 2014-01-30 千住金属工業株式会社 半導体ウエハー搬送治具
JP5737480B2 (ja) * 2012-07-26 2015-06-17 千住金属工業株式会社 半導体ウエハー搬送治具

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