JPS6321877U - - Google Patents

Info

Publication number
JPS6321877U
JPS6321877U JP11418686U JP11418686U JPS6321877U JP S6321877 U JPS6321877 U JP S6321877U JP 11418686 U JP11418686 U JP 11418686U JP 11418686 U JP11418686 U JP 11418686U JP S6321877 U JPS6321877 U JP S6321877U
Authority
JP
Japan
Prior art keywords
section
baring
next process
chucks
transports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11418686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11418686U priority Critical patent/JPS6321877U/ja
Publication of JPS6321877U publication Critical patent/JPS6321877U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP11418686U 1986-07-25 1986-07-25 Pending JPS6321877U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11418686U JPS6321877U (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11418686U JPS6321877U (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Publications (1)

Publication Number Publication Date
JPS6321877U true JPS6321877U (enrdf_load_stackoverflow) 1988-02-13

Family

ID=30996689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11418686U Pending JPS6321877U (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPS6321877U (enrdf_load_stackoverflow)

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