JPS6317386A - 炉床板加熱装置 - Google Patents
炉床板加熱装置Info
- Publication number
- JPS6317386A JPS6317386A JP61172665A JP17266586A JPS6317386A JP S6317386 A JPS6317386 A JP S6317386A JP 61172665 A JP61172665 A JP 61172665A JP 17266586 A JP17266586 A JP 17266586A JP S6317386 A JPS6317386 A JP S6317386A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- hearth
- heating
- resistor
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims description 33
- 239000007787 solid Substances 0.000 title 1
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000011819 refractory material Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000004320 controlled atmosphere Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- JCMLRUNDSXARRW-UHFFFAOYSA-N trioxouranium Chemical compound O=[U](=O)=O JCMLRUNDSXARRW-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- -1 uranyl hexahydrate Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
- F27B9/063—Resistor heating, e.g. with resistors also emitting IR rays
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Tunnel Furnaces (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8511745 | 1985-07-24 | ||
| FR8511745A FR2585461B1 (fr) | 1985-07-24 | 1985-07-24 | Dispositif de chauffage de soles de fours industriels pour traitement de solides |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6317386A true JPS6317386A (ja) | 1988-01-25 |
| JPS6365877B2 JPS6365877B2 (enExample) | 1988-12-19 |
Family
ID=9321840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61172665A Granted JPS6317386A (ja) | 1985-07-24 | 1986-07-22 | 炉床板加熱装置 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0210115B1 (enExample) |
| JP (1) | JPS6317386A (enExample) |
| BR (1) | BR8603464A (enExample) |
| DE (1) | DE3662310D1 (enExample) |
| FR (1) | FR2585461B1 (enExample) |
| ZA (1) | ZA865481B (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3937104B4 (de) * | 1989-11-07 | 2004-02-19 | EISENMANN Maschinenbau KG (Komplementär: Eisenmann-Stiftung) | Verfahren zum Trocknen von Feuchtigkeit aufweisenden Keramikteilen und Sintern derselben |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR418693A (fr) * | 1909-05-13 | 1910-12-15 | Imbert Process Company | Perfectionnements aux fours électriques |
| US1671794A (en) * | 1926-06-05 | 1928-05-29 | David L Summey | Resistor and support therefor |
| GB528857A (en) * | 1939-05-06 | 1940-11-08 | Frank Bernhard Dehn | Improvements in electric furnaces |
-
1985
- 1985-07-24 FR FR8511745A patent/FR2585461B1/fr not_active Expired
-
1986
- 1986-07-21 DE DE8686420200T patent/DE3662310D1/de not_active Expired
- 1986-07-21 EP EP86420200A patent/EP0210115B1/fr not_active Expired
- 1986-07-22 JP JP61172665A patent/JPS6317386A/ja active Granted
- 1986-07-23 ZA ZA865481A patent/ZA865481B/xx unknown
- 1986-07-23 BR BR8603464A patent/BR8603464A/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| BR8603464A (pt) | 1987-03-04 |
| JPS6365877B2 (enExample) | 1988-12-19 |
| EP0210115A1 (fr) | 1987-01-28 |
| EP0210115B1 (fr) | 1989-03-08 |
| FR2585461A1 (fr) | 1987-01-30 |
| ZA865481B (en) | 1987-08-26 |
| FR2585461B1 (fr) | 1989-05-19 |
| DE3662310D1 (en) | 1989-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4912463B2 (ja) | 炉のためのマルチゾーンヒータ | |
| US4348580A (en) | Energy efficient furnace with movable end wall | |
| US3665139A (en) | Device for epitactic precipitation of semiconductor material | |
| EP0145975B1 (en) | Apparatus and method for heating objects eg chips during soldering, to and maintaining them at a desired temperature | |
| JPS6317386A (ja) | 炉床板加熱装置 | |
| US2231236A (en) | Heating means | |
| US7858908B2 (en) | Methods for inductive heating of workpiece using coiled assemblies | |
| JP5568387B2 (ja) | 加熱装置及び基板処理方法並びに基板処理装置 | |
| CN113862451A (zh) | 燃气炉及燃气炉的使用方法 | |
| US3718323A (en) | Radiant lining | |
| KR900014830A (ko) | 유체 가열용 방법 및 장치 | |
| US3285593A (en) | Furnace heat shield | |
| EP0533380B1 (en) | Catalytic reactor | |
| JPS57180079A (en) | Temperature controller for fuel cell | |
| JPH0445031Y2 (enExample) | ||
| JPH06168899A (ja) | 基板加熱用ヒータユニット | |
| JPH0484420A (ja) | 熱処理装置 | |
| JP3532761B2 (ja) | 半導体製造装置用流体加熱装置 | |
| JPS62228821A (ja) | 遠赤外線発生装置 | |
| JPS6471118A (en) | Thermal treatment equipment for semiconductor wafer | |
| JPH02192592A (ja) | 真空熱処理炉 | |
| CA1114873A (en) | Electrical insulation device | |
| JPH0397222A (ja) | 枚葉式cvd装置 | |
| JPS6216258B2 (enExample) | ||
| JPH0754798Y2 (ja) | ポット式焼鈍炉 |