JPS63172902A - Thickness measuring instrument for metallic foil - Google Patents

Thickness measuring instrument for metallic foil

Info

Publication number
JPS63172902A
JPS63172902A JP547487A JP547487A JPS63172902A JP S63172902 A JPS63172902 A JP S63172902A JP 547487 A JP547487 A JP 547487A JP 547487 A JP547487 A JP 547487A JP S63172902 A JPS63172902 A JP S63172902A
Authority
JP
Japan
Prior art keywords
constant current
thickness
metallic foil
points
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP547487A
Other languages
Japanese (ja)
Inventor
Kenjiro Nishida
西田 健二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP547487A priority Critical patent/JPS63172902A/en
Publication of JPS63172902A publication Critical patent/JPS63172902A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To accurately measure the thickness of metallic foil by arithmetic operation by bringing a couple of probe rods into contact with the metallic foil to be measured lengthwise and supplying a constant current, and measuring the potential difference generated between said two points with the constant current. CONSTITUTION:The metallic foil 1 to be measured is mounted and fixed on a supporting base 5 and the probe rods 7 and 8 brought into contact with two lengthwise points A and B on the metallic foil 1. Then a constant current source 6 is connected to the probe rods 7 and 8 to supply the constant current between the two points A and B said metallic foil 1. The the potential difference generated between said two points A and B with the constant current is measured by a potentiometer 9, whose measured value is inputted to an arithmetic means 10. A thickness arithmetic means 10 calculates the thickness of the object metallic film 1 according to the input potential difference.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、金Iil箔の厚さ測定手段の改良に関する。[Detailed description of the invention] <Industrial application field> The present invention relates to an improved means for measuring the thickness of gold Iil foil.

〈従来技術〉 第3図、第4図に基いて従来技術の一例を説明する。第
3図は接触式の厚さ測定の概念図であり、厚さdを有す
る被測定金属箔1を、測定装置1F2の接触子201.
202で挟持し、一方の位置を基準とした他方の接触子
の移動距離を精密なスケール機能で読み取るものである
<Prior Art> An example of the prior art will be explained based on FIGS. 3 and 4. FIG. 3 is a conceptual diagram of contact-type thickness measurement, in which the metal foil 1 to be measured having a thickness d is measured by the contactor 201 of the measuring device 1F2.
202, and the moving distance of the other contact with one position as a reference is read using a precise scale function.

第4図の例は、対向配置された光学式の距離測定装置3
.4の間に被測定金属箔1を配置し、各測定装置から金
屑箔表面まで間距離It 、12の測定値より厚さdを
演Ωする。
The example in FIG. 4 shows optical distance measuring devices 3 arranged oppositely.
.. The metal foil 1 to be measured is placed between the metal foils 1 and 4, and the thickness d is calculated from the measured values of the distance It from each measuring device to the surface of the gold scrap foil, and 12.

・〈発明が解決しようとする問題点〉 しかしながら、接触式の場合は、接触子の過加重により
金属箔を傷付けたり、その接触部分が折れ曲がったりす
る欠点がある。
-<Problems to be Solved by the Invention> However, in the case of a contact type, there is a drawback that the overload of the contact may damage the metal foil or the contact portion may be bent.

また、光学式の場合は、金属箔が撓んだり歪んだりして
光の当るスポットが平らな面でない場合には測定誤差が
生ずる欠点がある。
Furthermore, in the case of the optical method, there is a drawback that measurement errors occur if the spot on which the light hits is not a flat surface because the metal foil is bent or distorted.

本発明は従来技術のこの様な問題点を解消できる金属箔
の厚さ測定装置の提供を目的とする。
An object of the present invention is to provide a metal foil thickness measuring device that can solve these problems of the prior art.

く問題点を解決するための手段〉 本発明の構成上の特徴は、厚さ及び抵抗率が一様で幅方
向の距離が既知の矩形状金属箔の長手方向の一定距離を
隔てた2点間に一定電流を流す定電流手段と、上記2点
間の電位差を測定する電位差計手段と、上記定電流並び
に上記電位差測定値に基づいて上記金a箔の厚さを篩用
する演算手段とを具備せしめた点にある。
Means for Solving the Problems> The structural feature of the present invention is that two points are separated by a certain distance in the longitudinal direction of a rectangular metal foil with uniform thickness and resistivity and a known distance in the width direction. a constant current means for flowing a constant current between the two points; a potentiometer means for measuring the potential difference between the two points; and a calculation means for determining the thickness of the gold a foil based on the constant current and the measured potential difference. The point is that it is equipped with the following.

く作用〉 本発明によれば、厚さが一様で幅が既知の矩形形金腐箔
の長手方向に一定距離を隔てて供給される定電流による
電位差が測定され、この測定値並びに既知のデータより
厚さが演算される。
According to the present invention, a potential difference due to a constant current supplied at a constant distance in the longitudinal direction of a rectangular gold foil with a uniform thickness and a known width is measured, and this measured value and a known width are measured. Thickness is calculated from the data.

ぐ実施例〉 第1図に基いて本発明の詳細な説明する。被を有すると
共に、幅方向の距離W並びに抵抗率が既知の値を有する
Embodiments> The present invention will be described in detail based on FIG. In addition to having a covering, the distance W in the width direction and the resistivity have known values.

5は被測定金属箔1を水平に載せて支持する絶縁材の支
持台であり、その両端のフック501゜502により金
属箔の両端部を挟持−して固定するど共に、金属箔をそ
の長手方向に弱い力で引っ張り、撓まないようにしてい
る。
Reference numeral 5 designates an insulating material support stand on which the metal foil 1 to be measured is horizontally placed and supported, and hooks 501 and 502 at both ends clamp and fix the metal foil at both ends, and also hold the metal foil along its length. It is pulled with a weak force in the direction to prevent it from bending.

6は一定電流■を発信する定電流源、7および8は探子
棒であり、金属箔表面の長手方向の一定距離!を隔てた
2点△、Bに接触して定電流■をA、8間に供給する。
6 is a constant current source that emits a constant current ■, 7 and 8 are probe rods, and the distance is a constant distance in the longitudinal direction of the metal foil surface! Contact two points △ and B that are separated by , and supply a constant current ■ between A and 8.

9は電位差計であり、電流IによりA、8間に発生する
電位差VABを測定するために、A、B点よりは長手方
向外側の近傍点間の電位を入力づる。
Reference numeral 9 denotes a potentiometer, into which the potential between points located outside points A and B in the longitudinal direction is input in order to measure the potential difference VAB generated between points A and 8 by the current I.

次に第2図により本発明の詳細な説明する。Next, the present invention will be explained in detail with reference to FIG.

一般に電気抵抗と抵抗率は比例し、導体の抵抗は、導体
の長さに比例し、断面積に反比例する。従って、長さ!
、断面積S、抵抗率ρの導体の抵抗Rは次式で表される
Generally, electrical resistance and resistivity are proportional, and the resistance of a conductor is proportional to its length and inversely proportional to its cross-sectional area. Hence the length!
, cross-sectional area S, and resistivity ρ, the resistance R of a conductor is expressed by the following equation.

R−ρ・l/S              (1)一
方、第2図に示す金属箔1において、A、8間の電位差
がVABs電流が■とするとA、8間の抵抗RABは、 RAa=Vaa/I           (2)とな
る。また薄い金属箔を立方体と考えれば、その断面積S
は、金属箔の厚さを61幅をWとしたとき、 S−d−w                (3)で
ある。従って、(2)、(3)式を(1)式に代入する
ことにより、 d、=ρ・!・■/■AB−W      (4)を得
る。(4)式において、ρ、i’、I、Wは上述したよ
うにすべて既知の値であるから、電位差VABを測定す
ることにより(4)式の演算を実行すれば厚さdを算出
することが可能である。
R-ρ・l/S (1) On the other hand, in the metal foil 1 shown in FIG. 2, if the potential difference between A and 8 is VABs and the current is ■, then the resistance RAB between A and 8 is RAa=Vaa/I ( 2). Also, if we consider a thin metal foil to be a cube, its cross-sectional area S
is S-d-w (3) where the thickness of the metal foil is 61 and the width is W. Therefore, by substituting equations (2) and (3) into equation (1), d, = ρ・!・■/■AB-W (4) is obtained. In equation (4), ρ, i', I, and W are all known values as described above, so if the calculation of equation (4) is performed by measuring the potential difference VAB, the thickness d can be calculated. Is possible.

例として金属箔がアルミニウムの場合、抵抗率はρ−2
,75X10’  Ω1)である。ここで、定電流をl
=2.00μ 、A、8間距離を1’ = 7−5 c
m 1幅をw−7,5(111の場合の電位差がi、o
ox io°3(■)であったとしたときの厚さdは、
d−5,5x10“S(m)−55,0(μm)となる
For example, if the metal foil is aluminum, the resistivity is ρ-2
, 75×10' Ω1). Here, the constant current is l
=2.00μ, distance between A and 8 is 1' = 7-5 c
m 1 width is w-7,5 (potential difference in case of 111 is i, o
The thickness d when ox io°3 (■) is
d-5,5x10"S(m)-55,0 (μm).

本発明は、厚さを求める目的のほか、厚さが既知で抵抗
率が未知の場合の抵抗率測定にも利用が可能である。す
なわら、(1)式、(4)式に基づいて抵抗率ρは、 ρ−d−W−vAB/l・■       (5)とな
るので、抵抗率の測定も可能である。
In addition to determining the thickness, the present invention can also be used to measure resistivity when the thickness is known but the resistivity is unknown. That is, based on equations (1) and (4), the resistivity ρ is ρ-d-W-vAB/l·■ (5) Therefore, the resistivity can also be measured.

なお、探子棒7.8の位置は、金属箔の両端部側一杯に
離すことも可能であり、要は!が正確に把握できれば目
的を達成することができる。
Note that the probe rods 7 and 8 can be placed completely apart from both ends of the metal foil. If you understand it accurately, you can achieve your goal.

〈発明の効果〉 以上説明したように、本発明によれば定電流源と電位差
計により金属箔の厚さを正確に演算測定することが可能
であり、従来技術の問題点を解消することができる。
<Effects of the Invention> As explained above, according to the present invention, it is possible to accurately calculate and measure the thickness of metal foil using a constant current source and a potentiometer, and the problems of the prior art can be solved. can.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例を示す構成図、第2図はその動
作説明図、第3図、第4図は従来技術の一例を示す構成
図である。 1・・・被測定金属箔  5・・・支持台  6・・・
定電流源  7.8・・・探子棒  9・・・電位差計
  10・・・厚さ演算手段 一一一一二、−
FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a diagram explaining its operation, and FIGS. 3 and 4 are block diagrams showing an example of the prior art. 1...Metal foil to be measured 5...Support stand 6...
Constant current source 7.8... Probe rod 9... Potentiometer 10... Thickness calculation means 11112, -

Claims (1)

【特許請求の範囲】[Claims] 厚さ及び抵抗率が一様で幅方向の距離が既知の矩形状金
属箔の長手方向の一定距離を隔てた2点間に一定電流を
流す定電流手段と、上記2点間の電位差を測定する電位
差計手段と、上記定電流並びに上記電位差測定値に基づ
いて上記金属箔の厚さを算出する演算手段とよりなる金
属箔の厚さ測定装置。
A constant current means that flows a constant current between two points separated by a certain distance in the longitudinal direction of a rectangular metal foil with uniform thickness and resistivity and a known distance in the width direction, and measures the potential difference between the two points. A metal foil thickness measuring device comprising a potentiometer means for measuring the constant current and a calculating means for calculating the thickness of the metal foil based on the constant current and the measured potential difference.
JP547487A 1987-01-13 1987-01-13 Thickness measuring instrument for metallic foil Pending JPS63172902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP547487A JPS63172902A (en) 1987-01-13 1987-01-13 Thickness measuring instrument for metallic foil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP547487A JPS63172902A (en) 1987-01-13 1987-01-13 Thickness measuring instrument for metallic foil

Publications (1)

Publication Number Publication Date
JPS63172902A true JPS63172902A (en) 1988-07-16

Family

ID=11612242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP547487A Pending JPS63172902A (en) 1987-01-13 1987-01-13 Thickness measuring instrument for metallic foil

Country Status (1)

Country Link
JP (1) JPS63172902A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242863A (en) * 2005-03-04 2006-09-14 Mitsutoyo Corp Drive unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242863A (en) * 2005-03-04 2006-09-14 Mitsutoyo Corp Drive unit

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