JPS63170463U - - Google Patents
Info
- Publication number
- JPS63170463U JPS63170463U JP6148987U JP6148987U JPS63170463U JP S63170463 U JPS63170463 U JP S63170463U JP 6148987 U JP6148987 U JP 6148987U JP 6148987 U JP6148987 U JP 6148987U JP S63170463 U JPS63170463 U JP S63170463U
- Authority
- JP
- Japan
- Prior art keywords
- section
- processed
- carry
- transport
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6148987U JPS63170463U (enExample) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6148987U JPS63170463U (enExample) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170463U true JPS63170463U (enExample) | 1988-11-07 |
Family
ID=30894876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6148987U Pending JPS63170463U (enExample) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170463U (enExample) |
-
1987
- 1987-04-24 JP JP6148987U patent/JPS63170463U/ja active Pending
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