JPS6316972Y2 - - Google Patents
Info
- Publication number
- JPS6316972Y2 JPS6316972Y2 JP1981087800U JP8780081U JPS6316972Y2 JP S6316972 Y2 JPS6316972 Y2 JP S6316972Y2 JP 1981087800 U JP1981087800 U JP 1981087800U JP 8780081 U JP8780081 U JP 8780081U JP S6316972 Y2 JPS6316972 Y2 JP S6316972Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- recorder
- memory
- range
- scaling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005070 sampling Methods 0.000 claims description 17
- 230000006386 memory function Effects 0.000 claims description 6
- 230000006870 function Effects 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Recording Measured Values (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981087800U JPS6316972Y2 (it) | 1981-06-15 | 1981-06-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981087800U JPS6316972Y2 (it) | 1981-06-15 | 1981-06-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57199815U JPS57199815U (it) | 1982-12-18 |
JPS6316972Y2 true JPS6316972Y2 (it) | 1988-05-13 |
Family
ID=29882996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1981087800U Expired JPS6316972Y2 (it) | 1981-06-15 | 1981-06-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6316972Y2 (it) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4979785A (it) * | 1972-11-15 | 1974-08-01 | ||
JPS52127770A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Spatter etching method |
JPS53116076A (en) * | 1977-03-22 | 1978-10-11 | Hitachi Ltd | Plasma processing method and its unit |
JPS54131865A (en) * | 1978-04-03 | 1979-10-13 | Nec Corp | Wafer scribing device |
-
1981
- 1981-06-15 JP JP1981087800U patent/JPS6316972Y2/ja not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4979785A (it) * | 1972-11-15 | 1974-08-01 | ||
JPS52127770A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Spatter etching method |
JPS53116076A (en) * | 1977-03-22 | 1978-10-11 | Hitachi Ltd | Plasma processing method and its unit |
JPS54131865A (en) * | 1978-04-03 | 1979-10-13 | Nec Corp | Wafer scribing device |
Also Published As
Publication number | Publication date |
---|---|
JPS57199815U (it) | 1982-12-18 |
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