JPS63164228U - - Google Patents
Info
- Publication number
- JPS63164228U JPS63164228U JP5710287U JP5710287U JPS63164228U JP S63164228 U JPS63164228 U JP S63164228U JP 5710287 U JP5710287 U JP 5710287U JP 5710287 U JP5710287 U JP 5710287U JP S63164228 U JPS63164228 U JP S63164228U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- throttle valve
- vertical beam
- movable throttle
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Description
第１図はこの考案の一実施例を示すウエハ搬送
装置の平面図、第２図は第１図の−線拡大矢
示図、第３図は従来のウエハ搬送装置を示す第１
図相当図、第４図は第３図の−線断面図、第
５図はエアシリンダのエア回路図である。
１……半導体ウエハの熱処理装置、５……上下
ビーム、６……エアシリンダ、７……ウエハの搬
送アーム、２１〜２４……半導体ウエハ、３１…
…可動絞り弁、３１ａ……調製ねじ、３１ｂ……
ロツクねじ。なお、各図中、同一符号は同一又は
相当部分を示す。
FIG. 1 is a plan view of a wafer transfer device showing an embodiment of this invention, FIG. 2 is an enlarged view of FIG.
FIG. 4 is a sectional view taken along the line -- in FIG. 3, and FIG. 5 is an air circuit diagram of the air cylinder. DESCRIPTION OF SYMBOLS 1... Semiconductor wafer heat treatment device, 5... Upper and lower beams, 6... Air cylinder, 7... Wafer transfer arm, 21-24... Semiconductor wafer, 31...
...Movable throttle valve, 31a...Adjustment screw, 31b...
Lock screw. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ビームを持ち上げられた半導体ウエハを保持して
搬送する搬送アームと、上記上下ビームを昇降駆
動する流体圧シリンダと、上下ビームの昇降速度
を調節する可動絞り弁とを具備するウエハ搬送装
置において、上記可動絞り弁を、半導体ウエハの
搬送部に設置したことを特徴とするウエハ搬送装
置。 A vertical beam that lifts up a semiconductor wafer, a transfer arm that holds and transports the lifted semiconductor wafer, a fluid pressure cylinder that drives the vertical beam up and down, and a movable throttle valve that adjusts the speed of up and down of the up and down beam. A wafer transfer device comprising: the movable throttle valve disposed in a semiconductor wafer transfer section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5710287U JPS63164228U (en) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5710287U JPS63164228U (en) | 1987-04-15 | 1987-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164228U true JPS63164228U (en) | 1988-10-26 |
Family
ID=30886502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5710287U Pending JPS63164228U (en) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164228U (en) |
-
1987
- 1987-04-15 JP JP5710287U patent/JPS63164228U/ja active Pending