JPS63163105A - 光干渉式膜厚測定装置 - Google Patents

光干渉式膜厚測定装置

Info

Publication number
JPS63163105A
JPS63163105A JP31512986A JP31512986A JPS63163105A JP S63163105 A JPS63163105 A JP S63163105A JP 31512986 A JP31512986 A JP 31512986A JP 31512986 A JP31512986 A JP 31512986A JP S63163105 A JPS63163105 A JP S63163105A
Authority
JP
Japan
Prior art keywords
light
incident
film thickness
white light
condenser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31512986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429002B2 (enrdf_load_stackoverflow
Inventor
Chikayasu Yamazaki
山崎　親康
Mutsumi Hayashi
睦 林
Jun Torikai
潤 鳥飼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP31512986A priority Critical patent/JPS63163105A/ja
Publication of JPS63163105A publication Critical patent/JPS63163105A/ja
Publication of JPH0429002B2 publication Critical patent/JPH0429002B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP31512986A 1986-12-25 1986-12-25 光干渉式膜厚測定装置 Granted JPS63163105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31512986A JPS63163105A (ja) 1986-12-25 1986-12-25 光干渉式膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31512986A JPS63163105A (ja) 1986-12-25 1986-12-25 光干渉式膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS63163105A true JPS63163105A (ja) 1988-07-06
JPH0429002B2 JPH0429002B2 (enrdf_load_stackoverflow) 1992-05-15

Family

ID=18061752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31512986A Granted JPS63163105A (ja) 1986-12-25 1986-12-25 光干渉式膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS63163105A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH049704A (ja) * 1990-04-27 1992-01-14 Toray Ind Inc 光干渉式膜厚測定装置
CN113137929A (zh) * 2020-01-20 2021-07-20 大塚电子株式会社 光学测量装置以及光学测量方法
TWI861303B (zh) * 2020-01-20 2024-11-11 日商大塚電子股份有限公司 光學測定裝置及光學測定方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH049704A (ja) * 1990-04-27 1992-01-14 Toray Ind Inc 光干渉式膜厚測定装置
CN113137929A (zh) * 2020-01-20 2021-07-20 大塚电子株式会社 光学测量装置以及光学测量方法
US12111146B2 (en) 2020-01-20 2024-10-08 Otsuka Electronics Co., Ltd. Optical measurement apparatus and optical measurement method
TWI861303B (zh) * 2020-01-20 2024-11-11 日商大塚電子股份有限公司 光學測定裝置及光學測定方法

Also Published As

Publication number Publication date
JPH0429002B2 (enrdf_load_stackoverflow) 1992-05-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term