JPH0429002B2 - - Google Patents
Info
- Publication number
- JPH0429002B2 JPH0429002B2 JP31512986A JP31512986A JPH0429002B2 JP H0429002 B2 JPH0429002 B2 JP H0429002B2 JP 31512986 A JP31512986 A JP 31512986A JP 31512986 A JP31512986 A JP 31512986A JP H0429002 B2 JPH0429002 B2 JP H0429002B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- film thickness
- incident
- measurement target
- white light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 34
- 230000003287 optical effect Effects 0.000 claims description 23
- 230000003595 spectral effect Effects 0.000 claims description 19
- 230000010287 polarization Effects 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 description 9
- 238000003384 imaging method Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920006254 polymer film Polymers 0.000 description 3
- 239000000835 fiber Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013308 plastic optical fiber Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31512986A JPS63163105A (ja) | 1986-12-25 | 1986-12-25 | 光干渉式膜厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31512986A JPS63163105A (ja) | 1986-12-25 | 1986-12-25 | 光干渉式膜厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63163105A JPS63163105A (ja) | 1988-07-06 |
| JPH0429002B2 true JPH0429002B2 (enrdf_load_stackoverflow) | 1992-05-15 |
Family
ID=18061752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31512986A Granted JPS63163105A (ja) | 1986-12-25 | 1986-12-25 | 光干渉式膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63163105A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH049704A (ja) * | 1990-04-27 | 1992-01-14 | Toray Ind Inc | 光干渉式膜厚測定装置 |
| US12111146B2 (en) | 2020-01-20 | 2024-10-08 | Otsuka Electronics Co., Ltd. | Optical measurement apparatus and optical measurement method |
| JP7521993B2 (ja) * | 2020-01-20 | 2024-07-24 | 大塚電子株式会社 | 光学測定装置および光学測定方法 |
-
1986
- 1986-12-25 JP JP31512986A patent/JPS63163105A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63163105A (ja) | 1988-07-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |