JPS63162525U - - Google Patents

Info

Publication number
JPS63162525U
JPS63162525U JP5336487U JP5336487U JPS63162525U JP S63162525 U JPS63162525 U JP S63162525U JP 5336487 U JP5336487 U JP 5336487U JP 5336487 U JP5336487 U JP 5336487U JP S63162525 U JPS63162525 U JP S63162525U
Authority
JP
Japan
Prior art keywords
processing table
plate
utility
manner
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5336487U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5336487U priority Critical patent/JPS63162525U/ja
Publication of JPS63162525U publication Critical patent/JPS63162525U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の一実施例であるレジスト処
理装置の主要部における概略構成を示す断面図、
第２図は従来のレジスト処理装置の主要部の概略
を示す断面図である。 図中、４：被処理物、５：灯体、６：ランプ、
７：集光ミラー、８：板状加熱部材、１０：上板
、１１：下板、１２：ネジ、１３：冷却管、２０
：処理台。 FIG. 1 is a sectional view showing a schematic configuration of the main parts of a resist processing apparatus which is an embodiment of the invention;
FIG. 2 is a sectional view schematically showing the main parts of a conventional resist processing apparatus. In the figure, 4: object to be treated, 5: lamp body, 6: lamp,
7: Concentrating mirror, 8: Plate heating member, 10: Upper plate, 11: Lower plate, 12: Screw, 13: Cooling pipe, 20
: Processing table.

Claims (1)

【実用新案登録請求の範囲】 (1) 処理台を具備し、光照射及び／または加熱
により処理するレジスト処理装置において、前記
処理台は板状加熱部材をサンドイツチ状に挾持す
る状態で内蔵することを特徴とするレジスト処理
装置。 (2) 前記処理台は上板及び下板とよりなり、該
上板に冷却管及び被処理物の真空吸着孔が穿設さ
れてなることを特徴とする実用新案登録請求の範
囲第(1)項記載のレジスト処理装置。[Claims for Utility Model Registration] (1) In a resist processing apparatus that is equipped with a processing table and processes by light irradiation and/or heating, the processing table is built in such a manner that it holds a plate-shaped heating member in a sandwich-like manner. A resist processing device characterized by: (2) Utility model registration claim No. 1, characterized in that the processing table consists of an upper plate and a lower plate, and the upper plate is provided with cooling pipes and vacuum suction holes for the processed material. ) The resist processing apparatus described in item 2.
JP5336487U 1987-04-10 1987-04-10 Pending JPS63162525U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5336487U JPS63162525U (en) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5336487U JPS63162525U (en) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162525U true JPS63162525U (en) 1988-10-24

Family

ID=30879359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5336487U Pending JPS63162525U (en) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162525U (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729316A (en) * 1980-07-29 1982-02-17 Kyushu Nippon Electric Post-bake oven
JPS6113590A (en) * 1984-06-29 1986-01-21 坂口電熱株式会社 Mica heater
JPS6123321A (en) * 1984-07-11 1986-01-31 Toshiba Corp Semiconductor wafer baking apparatus
JPS6269616A (en) * 1985-09-24 1987-03-30 Nec Corp Semiconductor manufacturing equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729316A (en) * 1980-07-29 1982-02-17 Kyushu Nippon Electric Post-bake oven
JPS6113590A (en) * 1984-06-29 1986-01-21 坂口電熱株式会社 Mica heater
JPS6123321A (en) * 1984-07-11 1986-01-31 Toshiba Corp Semiconductor wafer baking apparatus
JPS6269616A (en) * 1985-09-24 1987-03-30 Nec Corp Semiconductor manufacturing equipment

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