JPH0171436U - - Google Patents
Info
- Publication number
- JPH0171436U JPH0171436U JP1987168083U JP16808387U JPH0171436U JP H0171436 U JPH0171436 U JP H0171436U JP 1987168083 U JP1987168083 U JP 1987168083U JP 16808387 U JP16808387 U JP 16808387U JP H0171436 U JPH0171436 U JP H0171436U
- Authority
- JP
- Japan
- Prior art keywords
- atmospheric gas
- irradiating
- ports
- semiconductor substrate
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図は、本考案のランプアニール装置の一実
施例を示す主要断面図。
１……石英チヤンバー、２……前面雰囲気ガス
導入口、３……後面雰囲気ガス導入口、４……熱
処理される物体の取り出し口。
第２図は従来のランプアニール装置を示す主要
断面図。
FIG. 1 is a main sectional view showing an embodiment of the lamp annealing apparatus of the present invention. 1... Quartz chamber, 2... Front atmospheric gas inlet, 3... Rear atmospheric gas inlet, 4... Outlet for the object to be heat treated. FIG. 2 is a main sectional view showing a conventional lamp annealing device.
Claims (1)
照射し、短時間熱処理を行なう装置等において、
石英チヤンバー内の雰囲気ガスの導入口を２ケ所
以上から導入することを特徴とするランプアニー
ル装置。 In equipment that performs short-term heat treatment by irradiating the surface of a semiconductor substrate with light from a halogen lamp, etc.,
A lamp annealing device characterized by introducing atmospheric gas into a quartz chamber from two or more ports.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168083U JPH0171436U (en) | 1987-11-02 | 1987-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168083U JPH0171436U (en) | 1987-11-02 | 1987-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171436U true JPH0171436U (en) | 1989-05-12 |
Family
ID=31456950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168083U Pending JPH0171436U (en) | 1987-11-02 | 1987-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171436U (en) |
-
1987
- 1987-11-02 JP JP1987168083U patent/JPH0171436U/ja active Pending
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