JPS6316233B2 - - Google Patents

Info

Publication number
JPS6316233B2
JPS6316233B2 JP53071996A JP7199678A JPS6316233B2 JP S6316233 B2 JPS6316233 B2 JP S6316233B2 JP 53071996 A JP53071996 A JP 53071996A JP 7199678 A JP7199678 A JP 7199678A JP S6316233 B2 JPS6316233 B2 JP S6316233B2
Authority
JP
Japan
Prior art keywords
charged particle
processing
particle beam
machining
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53071996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54162643A (en
Inventor
Asaki Takemoto
Etsuzo Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP7199678A priority Critical patent/JPS54162643A/ja
Publication of JPS54162643A publication Critical patent/JPS54162643A/ja
Publication of JPS6316233B2 publication Critical patent/JPS6316233B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP7199678A 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor Granted JPS54162643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7199678A JPS54162643A (en) 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7199678A JPS54162643A (en) 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor

Publications (2)

Publication Number Publication Date
JPS54162643A JPS54162643A (en) 1979-12-24
JPS6316233B2 true JPS6316233B2 (enExample) 1988-04-07

Family

ID=13476587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7199678A Granted JPS54162643A (en) 1978-06-13 1978-06-13 Chargeddparticle beam working and apparatus therefor

Country Status (1)

Country Link
JP (1) JPS54162643A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176519U (enExample) * 1988-06-03 1989-12-15
JPH0238318U (enExample) * 1988-09-06 1990-03-14

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS536629B2 (enExample) * 1972-06-01 1978-03-09
JPS49107943A (enExample) * 1973-02-20 1974-10-14
JPS5314140A (en) * 1976-07-23 1978-02-08 Shin Meiwa Ind Co Ltd Method of correcting error of position controller
JPS5343652A (en) * 1976-10-04 1978-04-19 Tokyo Shibaura Electric Co Automatic welding machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176519U (enExample) * 1988-06-03 1989-12-15
JPH0238318U (enExample) * 1988-09-06 1990-03-14

Also Published As

Publication number Publication date
JPS54162643A (en) 1979-12-24

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