JPS6316189B2 - - Google Patents

Info

Publication number
JPS6316189B2
JPS6316189B2 JP58220102A JP22010283A JPS6316189B2 JP S6316189 B2 JPS6316189 B2 JP S6316189B2 JP 58220102 A JP58220102 A JP 58220102A JP 22010283 A JP22010283 A JP 22010283A JP S6316189 B2 JPS6316189 B2 JP S6316189B2
Authority
JP
Japan
Prior art keywords
steam
cleaning
section
substrate
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58220102A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60114385A (ja
Inventor
Yoshio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP22010283A priority Critical patent/JPS60114385A/ja
Publication of JPS60114385A publication Critical patent/JPS60114385A/ja
Publication of JPS6316189B2 publication Critical patent/JPS6316189B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP22010283A 1983-11-22 1983-11-22 蒸気洗浄装置 Granted JPS60114385A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22010283A JPS60114385A (ja) 1983-11-22 1983-11-22 蒸気洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22010283A JPS60114385A (ja) 1983-11-22 1983-11-22 蒸気洗浄装置

Publications (2)

Publication Number Publication Date
JPS60114385A JPS60114385A (ja) 1985-06-20
JPS6316189B2 true JPS6316189B2 (cs) 1988-04-07

Family

ID=16745944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22010283A Granted JPS60114385A (ja) 1983-11-22 1983-11-22 蒸気洗浄装置

Country Status (1)

Country Link
JP (1) JPS60114385A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0659070U (ja) * 1993-02-02 1994-08-16 賢一 江草 画一した文章中の空白にしている要所に、自分の人生の あらゆる出来事を記入すれば、自動的に自分史自叙伝と して完成する書物。

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5089146U (cs) * 1973-12-17 1975-07-28

Also Published As

Publication number Publication date
JPS60114385A (ja) 1985-06-20

Similar Documents

Publication Publication Date Title
KR100372094B1 (ko) 건조장치 및 건조방법
TW200946253A (en) Method for cleaning electronic parts and cleaning system
US4745690A (en) Method of replenishing and/or preparing treating liquids
WO2009110548A1 (ja) 電子部品の洗浄方法および洗浄システム
JPS6316189B2 (cs)
US6112013A (en) Apparatus for detecting a crack in a heater of an acid and rinse bath and a method of crack detection of the same
US5085238A (en) Vapor degreasing apparatus
JPH07283194A (ja) 洗浄・乾燥方法と洗浄装置
JP3301585B2 (ja) 蒸気洗浄乾燥装置
JP3910182B2 (ja) 蒸気乾燥装置
US3154084A (en) Portable two bath solvent vapor parts cleaner
JPH058676Y2 (cs)
JP3285683B2 (ja) ディスク基板の洗浄装置
JPH0134107B2 (cs)
JPS649621B2 (cs)
JPH0623331A (ja) 蒸気発生装置
JPH06138648A (ja) 基板洗浄方法及び洗浄装置
KR100655652B1 (ko) 기판의 건조 장치
KR950006642Y1 (ko) 웨이퍼 세정용 증기 건조시스템의 세정액 여과장치
JPS63226028A (ja) 蒸気乾燥装置
JPS6152381A (ja) 蒸気洗浄方法及び該方法に用いる洗浄装置
JPS6298623A (ja) 蒸気乾燥装置
JPH0341730A (ja) 純水ベーパ乾燥方法
JPH08283971A (ja) 水系洗浄装置
JPS5988827A (ja) 蒸気乾燥装置