JPS63159707U - - Google Patents

Info

Publication number
JPS63159707U
JPS63159707U JP5287087U JP5287087U JPS63159707U JP S63159707 U JPS63159707 U JP S63159707U JP 5287087 U JP5287087 U JP 5287087U JP 5287087 U JP5287087 U JP 5287087U JP S63159707 U JPS63159707 U JP S63159707U
Authority
JP
Japan
Prior art keywords
laser
interference fringes
light source
optical system
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5287087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH064246Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987052870U priority Critical patent/JPH064246Y2/ja
Publication of JPS63159707U publication Critical patent/JPS63159707U/ja
Application granted granted Critical
Publication of JPH064246Y2 publication Critical patent/JPH064246Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1987052870U 1987-04-08 1987-04-08 分離型レ−ザ干渉計 Expired - Lifetime JPH064246Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987052870U JPH064246Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987052870U JPH064246Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Publications (2)

Publication Number Publication Date
JPS63159707U true JPS63159707U (enrdf_load_stackoverflow) 1988-10-19
JPH064246Y2 JPH064246Y2 (ja) 1994-02-02

Family

ID=30878431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987052870U Expired - Lifetime JPH064246Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Country Status (1)

Country Link
JP (1) JPH064246Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015502032A (ja) * 2011-11-09 2015-01-19 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ リソグラフィツールにおいて使用される計測システムのためのファイバ伝送

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) * 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems
JPS5928842A (ja) * 1982-07-30 1984-02-15 ウエスチングハウス　エレクトリック　コ−ポレ−ション 静止形無効電力補償装置
JPS6018727A (ja) * 1983-07-12 1985-01-30 Hitachi Cable Ltd 光干渉計
JPS60176109U (ja) * 1984-04-28 1985-11-21 鈴木　範人 干渉縞の移動方向判定装置
JPS6113206A (ja) * 1984-06-29 1986-01-21 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS6121936A (ja) * 1984-07-09 1986-01-30 Nippon Telegr & Teleph Corp <Ntt> 光フアイバ用被覆材料
JPS6152616A (ja) * 1984-08-22 1986-03-15 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) * 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems
JPS5928842A (ja) * 1982-07-30 1984-02-15 ウエスチングハウス　エレクトリック　コ−ポレ−ション 静止形無効電力補償装置
JPS6018727A (ja) * 1983-07-12 1985-01-30 Hitachi Cable Ltd 光干渉計
JPS60176109U (ja) * 1984-04-28 1985-11-21 鈴木　範人 干渉縞の移動方向判定装置
JPS6113206A (ja) * 1984-06-29 1986-01-21 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS6121936A (ja) * 1984-07-09 1986-01-30 Nippon Telegr & Teleph Corp <Ntt> 光フアイバ用被覆材料
JPS6152616A (ja) * 1984-08-22 1986-03-15 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015502032A (ja) * 2011-11-09 2015-01-19 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ リソグラフィツールにおいて使用される計測システムのためのファイバ伝送

Also Published As

Publication number Publication date
JPH064246Y2 (ja) 1994-02-02

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