JPH064246Y2 - 分離型レ−ザ干渉計 - Google Patents

分離型レ−ザ干渉計

Info

Publication number
JPH064246Y2
JPH064246Y2 JP1987052870U JP5287087U JPH064246Y2 JP H064246 Y2 JPH064246 Y2 JP H064246Y2 JP 1987052870 U JP1987052870 U JP 1987052870U JP 5287087 U JP5287087 U JP 5287087U JP H064246 Y2 JPH064246 Y2 JP H064246Y2
Authority
JP
Japan
Prior art keywords
laser
optical system
light source
laser light
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987052870U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63159707U (enrdf_load_stackoverflow
Inventor
吉久 谷村
啓文 山田
毅 初沢
幸司 豊田
俊郎 黒沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP1987052870U priority Critical patent/JPH064246Y2/ja
Publication of JPS63159707U publication Critical patent/JPS63159707U/ja
Application granted granted Critical
Publication of JPH064246Y2 publication Critical patent/JPH064246Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1987052870U 1987-04-08 1987-04-08 分離型レ−ザ干渉計 Expired - Lifetime JPH064246Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987052870U JPH064246Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987052870U JPH064246Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Publications (2)

Publication Number Publication Date
JPS63159707U JPS63159707U (enrdf_load_stackoverflow) 1988-10-19
JPH064246Y2 true JPH064246Y2 (ja) 1994-02-02

Family

ID=30878431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987052870U Expired - Lifetime JPH064246Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Country Status (1)

Country Link
JP (1) JPH064246Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI476543B (zh) * 2011-11-09 2015-03-11 Zygo Corp 用於微影機台之量測系統的光纖傳輸裝置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1229659A (en) * 1982-07-30 1987-11-24 Michael B. Brennen Protective circuit for thyristor switches used in static var generators
JPS6018727A (ja) * 1983-07-12 1985-01-30 Hitachi Cable Ltd 光干渉計
JPS60176109U (ja) * 1984-04-28 1985-11-21 鈴木　範人 干渉縞の移動方向判定装置
JPS6113206A (ja) * 1984-06-29 1986-01-21 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS6121936A (ja) * 1984-07-09 1986-01-30 Nippon Telegr & Teleph Corp <Ntt> 光フアイバ用被覆材料
JPS6152616A (ja) * 1984-08-22 1986-03-15 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems

Also Published As

Publication number Publication date
JPS63159707U (enrdf_load_stackoverflow) 1988-10-19

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