JPS63159707U - - Google Patents

Info

Publication number
JPS63159707U
JPS63159707U JP5287087U JP5287087U JPS63159707U JP S63159707 U JPS63159707 U JP S63159707U JP 5287087 U JP5287087 U JP 5287087U JP 5287087 U JP5287087 U JP 5287087U JP S63159707 U JPS63159707 U JP S63159707U
Authority
JP
Japan
Prior art keywords
laser
interference fringes
light source
optical system
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5287087U
Other languages
Japanese (ja)
Other versions
JPH064246Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987052870U priority Critical patent/JPH064246Y2/en
Publication of JPS63159707U publication Critical patent/JPS63159707U/ja
Application granted granted Critical
Publication of JPH064246Y2 publication Critical patent/JPH064246Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る分離型レーザ干渉計を真
空装置に適用した一実施例を示す説明図、第２図
は第１図に示した光フアイバの構造を示す断面図
、第３図は第１図に示した干渉計本体の内部構造
を示す説明図、第４図は第１図に示した干渉計本
体の光電変換部の電気信号波形図、第５図は第１
図に示したカウンタの概略構成を示す回路ブロツ
ク図、第６図は本発明に係る分離型レーザ干渉計
の他の実施例の概略構成を示す説明図である。 ２……光源、４……光フアイバ、６……干渉計
本体、８……ケーブル、１０……カウンタ、４６
……被測定物。 FIG. 1 is an explanatory diagram showing an embodiment in which the separated laser interferometer according to the present invention is applied to a vacuum device, FIG. 2 is a cross-sectional view showing the structure of the optical fiber shown in FIG. 1, and FIG. Fig. 4 is an explanatory diagram showing the internal structure of the interferometer main body shown in Fig. 1, Fig. 4 is an electrical signal waveform diagram of the photoelectric conversion section of the interferometer main body shown in Fig.
FIG. 6 is a circuit block diagram showing the schematic structure of the counter shown in the figure, and FIG. 6 is an explanatory diagram showing the schematic structure of another embodiment of the separated laser interferometer according to the present invention. 2... Light source, 4... Optical fiber, 6... Interferometer body, 8... Cable, 10... Counter, 46
...Object to be measured.

Claims (1)

【実用新案登録請求の範囲】 (1) レーザビームを発生するレーザ光源と、 該レーザ光源からのレーザビームを分割し、分
割した一方のレーザビームを被測定物側の可動反
射体に照射させて反射光を得ると共に他方のレー
ザビームを参照反射鏡に照射させて反射光を得、
これらの反射光を干渉させて干渉縞を発生させる
光学系と、 前記干渉縞を検出素子で検出すると共にその検
出信号に基づいて干渉縞をカウントして前記被測
定物の長さ等を表示する表示部と、 から構成される分離型レーザ干渉計において、前
記レーザ光源と前記光学系とが真空中で放出ガス
の少ない材料で被覆されている光フアイバによつ
て光結合されると共に、前記光学系と表示部とが
電気ケーブルを介して接続され、前記検出素子は
１周期の干渉縞間に空間位相をずらして複数配置
されると共に各検出素子から得られる電気信号を
演算することによつて光フアイバの外乱を相殺す
ることを特徴とするレーザ干渉計。 (2) 前記光学系はセラミツクス等の不揮発性部
材によつて形成されたケースに収納されているこ
とを特徴とする特許請求の範囲第(1)項記載の分
離型レーザ干渉計。[Scope of Claim for Utility Model Registration] (1) A laser light source that generates a laser beam, the laser beam from the laser light source is split, and one of the split laser beams is irradiated onto a movable reflector on the side of the object to be measured. Obtain reflected light and irradiate the other laser beam onto a reference reflector to obtain reflected light,
an optical system that causes these reflected lights to interfere to generate interference fringes; and a detection element that detects the interference fringes and counts the interference fringes based on the detection signal to display the length of the object to be measured. In a separate laser interferometer, the laser light source and the optical system are optically coupled in vacuum by an optical fiber coated with a material that releases little gas, and the optical The system and the display unit are connected via an electric cable, and a plurality of the detection elements are arranged with spatial phases shifted between one period of interference fringes, and the electric signals obtained from each detection element are calculated. A laser interferometer characterized by canceling disturbances in an optical fiber. (2) The separated laser interferometer according to claim (1), wherein the optical system is housed in a case made of a nonvolatile material such as ceramics.
JP1987052870U 1987-04-08 1987-04-08 Separate laser interferometer Expired - Lifetime JPH064246Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987052870U JPH064246Y2 (en) 1987-04-08 1987-04-08 Separate laser interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987052870U JPH064246Y2 (en) 1987-04-08 1987-04-08 Separate laser interferometer

Publications (2)

Publication Number Publication Date
JPS63159707U true JPS63159707U (en) 1988-10-19
JPH064246Y2 JPH064246Y2 (en) 1994-02-02

Family

ID=30878431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987052870U Expired - Lifetime JPH064246Y2 (en) 1987-04-08 1987-04-08 Separate laser interferometer

Country Status (1)

Country Link
JP (1) JPH064246Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015502032A (en) * 2011-11-09 2015-01-19 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ Fiber transmission for metrology systems used in lithography tools

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) * 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems
JPS5928842A (en) * 1982-07-30 1984-02-15 ウエスチングハウス　エレクトリック　コ−ポレ−ション Stationary reactive power compensating device
JPS6018727A (en) * 1983-07-12 1985-01-30 Hitachi Cable Ltd Optical interferometer
JPS60176109U (en) * 1984-04-28 1985-11-21 鈴木　範人 Interference fringe moving direction determination device
JPS6113206A (en) * 1984-06-29 1986-01-21 Sumitomo Electric Ind Ltd Glass fiber for optical transmission
JPS6121936A (en) * 1984-07-09 1986-01-30 Nippon Telegr & Teleph Corp <Ntt> Cladding material for optical fiber
JPS6152616A (en) * 1984-08-22 1986-03-15 Sumitomo Electric Ind Ltd Glass fiber for optical transmission
JPS61219803A (en) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> Apparatus for measuring physical quantity

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3738754A (en) * 1970-03-20 1973-06-12 Thomson Csf Optical contacting systems for positioning and metrology systems
JPS5928842A (en) * 1982-07-30 1984-02-15 ウエスチングハウス　エレクトリック　コ−ポレ−ション Stationary reactive power compensating device
JPS6018727A (en) * 1983-07-12 1985-01-30 Hitachi Cable Ltd Optical interferometer
JPS60176109U (en) * 1984-04-28 1985-11-21 鈴木　範人 Interference fringe moving direction determination device
JPS6113206A (en) * 1984-06-29 1986-01-21 Sumitomo Electric Ind Ltd Glass fiber for optical transmission
JPS6121936A (en) * 1984-07-09 1986-01-30 Nippon Telegr & Teleph Corp <Ntt> Cladding material for optical fiber
JPS6152616A (en) * 1984-08-22 1986-03-15 Sumitomo Electric Ind Ltd Glass fiber for optical transmission
JPS61219803A (en) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> Apparatus for measuring physical quantity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015502032A (en) * 2011-11-09 2015-01-19 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ Fiber transmission for metrology systems used in lithography tools

Also Published As

Publication number Publication date
JPH064246Y2 (en) 1994-02-02

Similar Documents

Publication Publication Date Title
ATE89411T1 (en) POSITION MEASUREMENT DEVICE.
EP0397202A3 (en) Encoder
CA2122782A1 (en) Apparatus for Measuring an Ambient Physical Parameter Applied to a Highly Birefringent Sensing Fiber and Method
JPS63159707U (en)
DE59102890D1 (en) Position measuring device.
JPS63159706U (en)
ATE105402T1 (en) POSITION MEASUREMENT DEVICE.
JPS63159705U (en)
JPS63159708U (en)
JPS6474414A (en) Optical displacement detector
JPH0281408U (en)
JPS6433040U (en)
JPS5860256U (en) gas detection device
TW345614B (en) Diffractive grating linear optical encoders with high tolerance to grating defects and misalignment
JPS645108U (en)
SU756194A1 (en) Device for measuring object motion parameters
JPS63122211U (en)
JPS63153141U (en)
JPS61190874U (en)
JPH03113150U (en)
JPS6218831U (en)
JPS6262277U (en)
TW345615B (en) Diffractive grating rotary optical encoder with high tolerance to grating defects and misalignment
JPH0237310U (en)
JPH0485115U (en)