JPS631541B2 - - Google Patents

Info

Publication number
JPS631541B2
JPS631541B2 JP54017312A JP1731279A JPS631541B2 JP S631541 B2 JPS631541 B2 JP S631541B2 JP 54017312 A JP54017312 A JP 54017312A JP 1731279 A JP1731279 A JP 1731279A JP S631541 B2 JPS631541 B2 JP S631541B2
Authority
JP
Japan
Prior art keywords
section
ion source
evacuation means
leak
low vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54017312A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55109958A (en
Inventor
Eiichi Izumi
Sadao Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1731279A priority Critical patent/JPS55109958A/ja
Publication of JPS55109958A publication Critical patent/JPS55109958A/ja
Publication of JPS631541B2 publication Critical patent/JPS631541B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP1731279A 1979-02-19 1979-02-19 Mass spectrometer Granted JPS55109958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1731279A JPS55109958A (en) 1979-02-19 1979-02-19 Mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1731279A JPS55109958A (en) 1979-02-19 1979-02-19 Mass spectrometer

Publications (2)

Publication Number Publication Date
JPS55109958A JPS55109958A (en) 1980-08-23
JPS631541B2 true JPS631541B2 (en:Method) 1988-01-13

Family

ID=11940482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1731279A Granted JPS55109958A (en) 1979-02-19 1979-02-19 Mass spectrometer

Country Status (1)

Country Link
JP (1) JPS55109958A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60114957U (ja) * 1984-01-13 1985-08-03 日本電子株式会社 ガスクロマトグラフ−質量分析装置
JPS60184260U (ja) * 1984-05-17 1985-12-06 横河電機株式会社 質量分析計用差動排気系
CN117012610A (zh) * 2022-04-28 2023-11-07 株式会社岛津制作所 质谱仪及其真空系统的形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583589B2 (ja) * 1977-03-30 1983-01-21 株式会社日立製作所 質量分析計の直接試料導入装置

Also Published As

Publication number Publication date
JPS55109958A (en) 1980-08-23

Similar Documents

Publication Publication Date Title
EP0218458B1 (en) Method and apparatus for gross leak detection
US5561240A (en) Leak detecting apparatus using compound turbo-molecular pump
US5900537A (en) Test gas leakage detector
US5880357A (en) Leak detector with vacuum pumps and operating process for same
JP2005330967A (ja) 軽量気体用真空ポンプシステム
GB2609962A (en) Leak detection of vacuum systems
JPS631541B2 (en:Method)
JP3149226B2 (ja) 漏れ検出装置
JP2001033343A (ja) 漏洩試験方法および漏洩試験装置
JPH11153508A (ja) 真空装置用ヘリウムリークディテクター装置
JPH0314773Y2 (en:Method)
JPH0424599Y2 (en:Method)
US4399690A (en) Vacuum leak detector having single valve assembly
US6282946B1 (en) Leak detector
JPH018714Y2 (en:Method)
JP2551968B2 (ja) 真空装置における排気系
JPH11241971A (ja) リークテスト装置
JPH1090104A (ja) ヘリウムリークディテクター
JPH05205686A (ja) 差動排気抵抗装置
JPH0453558Y2 (en:Method)
JPH0633231A (ja) イオンスパッタリング装置
JPH0429402Y2 (en:Method)
JP2503234B2 (ja) 高真空排気制御装置
JPH0749296A (ja) ガス放出速度測定装置
JPS6364734B2 (en:Method)