JPS63153869A - Transfer molding equipment for optical semiconductor device - Google Patents
Transfer molding equipment for optical semiconductor deviceInfo
- Publication number
- JPS63153869A JPS63153869A JP61300839A JP30083986A JPS63153869A JP S63153869 A JPS63153869 A JP S63153869A JP 61300839 A JP61300839 A JP 61300839A JP 30083986 A JP30083986 A JP 30083986A JP S63153869 A JPS63153869 A JP S63153869A
- Authority
- JP
- Japan
- Prior art keywords
- runner
- resin
- force
- mold
- gates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 17
- 238000001721 transfer moulding Methods 0.000 title claims description 13
- 239000004065 semiconductor Substances 0.000 title abstract description 6
- 239000011347 resin Substances 0.000 claims abstract description 36
- 229920005989 resin Polymers 0.000 claims abstract description 36
- 238000000465 moulding Methods 0.000 claims description 13
- 239000004020 conductor Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 abstract description 8
- 239000002184 metal Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Led Device Packages (AREA)
- Light Receiving Elements (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光学導体装置をトランスファーモールドにより
樹脂成形しパッケージングを行う装置、特に樹脂成形後
、樹脂内部の気泡残りあるいは樹脂表面の未充填という
不具合の発生の少ないトランスファーモールドによる樹
脂成形装置に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an apparatus for molding and packaging optical conductor devices with resin by transfer molding. The present invention relates to a resin molding device using transfer molding that causes fewer defects.
C従来の技術〕
光学導体装置例えば発光ダイオード、受光ダイオードの
場合はパッケージとして用いる樹脂に透明樹脂を用い、
かつその光路に気泡等があると。C. Prior Art] In the case of optical conductor devices such as light emitting diodes and light receiving diodes, transparent resin is used as the resin for the package.
And if there are bubbles, etc. in the optical path.
その光学特性に影響を与えるため、気泡、未充填不良の
発生しにくい装置が開発されている。Since this affects its optical properties, devices have been developed that are less prone to bubbles and unfilled defects.
従来の光学導体装置のトランスファーモールドによる樹
脂成形装置は、第3図に示すように金型の上型Uのみに
上型ランナー31を設け、そのランナー31からサブラ
ンナー32、ゲート33.33を引き出した構造のもの
、或いは第4図に示すように金型の下型りのみに下型ラ
ンナー41を設け、そのランナー41からサブランナー
42.ゲート43.43を引き出した構造のものがある
。In a conventional resin molding apparatus using a transfer mold for an optical conductor device, as shown in FIG. 3, an upper mold runner 31 is provided only in the upper mold U of the mold, and a sub-runner 32 and gates 33 and 33 are pulled out from the runner 31. Alternatively, as shown in FIG. 4, a lower mold runner 41 is provided only on the lower mold of the mold, and from the runner 41 a sub-runner 42. There is a structure in which the gate 43.43 is pulled out.
尚、第3図、第4図は上型U及び下型りはその外形形態
を省略し、iの内部に形成されるランナー31,41.
サブランナー32,42.ゲート33,43を図示して
おり、さらに上型U及び下型りにより樹脂成形されるパ
ッケージ部34,35,44.45を含めて樹脂部分は
斜線で示し、上型Uと下型りとの樹脂部分は斜線の向き
を互いに逆向きにして図示しである。In FIGS. 3 and 4, the external shapes of the upper mold U and the lower mold are omitted, and the runners 31, 41 . . . formed inside i are omitted.
Subrunner 32, 42. The gates 33 and 43 are shown, and the resin parts, including the package parts 34, 35, 44. The resin parts are shown with diagonal lines in opposite directions.
前述のように光学導体装置の場合は透明樹脂を用いて樹
脂成形し、かつその光路となる樹脂内部に気泡や、樹脂
表面に未充填があると、その光学特性に影響を与えるた
め、成形時の気泡、未充填不良の発生を極めて少なくす
る必要がある。また光学導体装置は光学特性状集光させ
るため、パッケージとなる樹脂表面の一部を凸レンズ状
の形状にする必要が生じる場合が多い、この場合、トラ
ンスファーモールドによる樹脂成形時に該レンズ部に未
充填が発生し易く、歩留り低下の大きな要因の1つにな
っていた。As mentioned above, in the case of optical conductor devices, transparent resin is used for resin molding, and if there are air bubbles inside the resin that serves as the optical path or unfilling on the resin surface, the optical properties will be affected. It is necessary to minimize the occurrence of air bubbles and unfilled defects. In addition, since optical conductor devices condense light due to their optical properties, it is often necessary to make a part of the resin surface of the package into a convex lens shape. This tends to occur and is one of the major causes of yield decline.
そこでトランスファーモールド時におけるレンズ部に未
充填の発生しない成形方法として従来は以下のような方
法が知られている。Therefore, the following methods are conventionally known as molding methods that do not cause unfilling of the lens portion during transfer molding.
例えば第3図に示すようにレンズ形状部を金型の下型り
に設け、かつランナー31.サブランナー32、ゲート
33を上型Uに設けて、ゲート33の角度を下型りに設
けたレンズ形状部(図示略)に向けた角度に設定し、樹
脂がレンズ部に向かって流れるようにしてレンズ部での
未充填不良の発生を起きにくくする。For example, as shown in FIG. 3, a lens-shaped portion is provided on the lower mold of the mold, and a runner 31. A sub-runner 32 and a gate 33 are provided on the upper mold U, and the angle of the gate 33 is set at an angle toward a lens-shaped portion (not shown) provided on the lower mold so that the resin flows toward the lens portion. This makes it difficult to cause unfilled defects in the lens portion.
ところで、トランスファーモールドでは、まずプランジ
ャーが樹脂を型に押し流す際、いわゆる樹脂がランナー
31を走るときにまず気泡はランナー31の上側に多く
集まり、ランナー下部は気泡の少ない樹脂層になり、次
に気泡が射出圧によりつぶされあるいは小さくなってそ
のまま残る。またはエアベントにより金型の外に追い出
される。By the way, in transfer molding, when the plunger first forces the resin into the mold, so-called when the resin runs on the runner 31, first many air bubbles gather on the upper side of the runner 31, the lower part of the runner becomes a resin layer with few air bubbles, and then The bubbles are crushed or reduced in size by the injection pressure and remain as they are. Or it is forced out of the mold by an air vent.
この性質を利用して樹脂成形後の半導体装置に気泡が残
らない方法としては、第4図に示すようなランナー、サ
ブランナー、ゲートの構成方法がある。すなわち、下型
りにランナー、サブランナー、ゲートを設ける方法であ
り、この方法によれば、成形時にはまずランナー上側の
気泡が半導体装置の樹脂パッケージ部44.45に対応
する金型のキャビティー46a、 46bに案内され、
さらにエアベントによりキャビティー46a、 46b
の外に追い出され、次に気泡のない樹脂がキャビティー
46a、 46bに案内されて、樹脂が硬化することに
より、気泡残りの極めて少ない半導体装置の樹脂成形が
完了する。As a method that utilizes this property to prevent bubbles from remaining in the semiconductor device after resin molding, there is a method of configuring runners, sub-runners, and gates as shown in FIG. 4. That is, a runner, a sub-runner, and a gate are provided in the lower mold. According to this method, during molding, the air bubbles on the upper side of the runner first enter the cavity 46a of the mold corresponding to the resin package part 44, 45 of the semiconductor device. , guided to 46b,
Furthermore, air vents create cavities 46a and 46b.
Then, the bubble-free resin is guided into the cavities 46a, 46b, and the resin is cured, thereby completing the resin molding of the semiconductor device with very few remaining bubbles.
前述の第3図に示す上型にランナー、サブランナー、ゲ
ートを設ける方法では成形時には、まずランナー下側の
気泡の少ない樹脂がキャビティー36bに案内され、次
にランナー上側の気泡がキャビティー36aに案内され
る。従って、気泡がキャビティーに案内されたときには
既に案内された樹脂の硬化が始まっており、エアベント
が塞がれているために気泡の逃げ場がなく、最終的に半
導体装置の樹脂パッケージ部に残る。In the method of providing a runner, a sub-runner, and a gate in the upper mold shown in FIG. 3, during molding, the resin with few air bubbles on the lower side of the runner is first guided into the cavity 36b, and then the air bubbles on the upper side of the runner are guided into the cavity 36a. will be guided to. Therefore, when the bubbles are guided into the cavity, the guided resin has already begun to harden, and since the air vent is blocked, the bubbles have no place to escape and ultimately remain in the resin package portion of the semiconductor device.
要するに、樹脂表面にレンズ形状を持った光学導体装置
の場合、レンズ部での未充填不良が発生しないようにす
るには上型にランナー、サブランナー、ゲートを設ける
方法が良いが、樹脂パッケージ内に気泡を残さないよう
にするには下型にランナー、サブランナー、ゲートを設
ける方法が良いという矛盾したことになる。In short, in the case of optical conductor devices that have a lens shape on the resin surface, it is better to provide a runner, sub-runner, and gate on the upper mold to prevent unfilled defects in the lens part, but inside the resin package This is contradictory because the best way to avoid leaving bubbles in the mold is to provide a runner, sub-runner, and gate in the lower mold.
本発明の目的はレンズ形状を持った光学導体装置におい
て、レンズ部での未充填不良及び樹脂パッケージ内部で
の気泡残り不良の極めて少ないトランスファーモールド
装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a transfer molding apparatus in which an optical conductor device having a lens shape has extremely few unfilled defects in the lens portion and defects in which air bubbles remain inside the resin package.
上述、した従来のトランスファーモールド装置に対し、
本発明はランナー、サブランナー、ゲートの配置を考慮
することによりレンズ部での未充填。In contrast to the conventional transfer molding equipment described above,
The present invention takes into consideration the arrangement of runners, sub-runners, and gates to prevent unfilling in the lens portion.
気泡残りを解決するという独創的内容を有する。It has an original content that solves the problem of remaining bubbles.
本発明は少なくとも上型と下型とからなる金型を用いて
樹脂成形を行うトランスファーモールド装置において、
金型の上型と下型の両方にランナー部を設け、かつサブ
ランナー部及びゲート部を上型のみに設けたことを特徴
とする光学導体装置のトランスファーモールド装置であ
る。The present invention provides a transfer molding apparatus for performing resin molding using a mold consisting of at least an upper mold and a lower mold.
This is a transfer molding apparatus for an optical conductor device, characterized in that runner parts are provided in both the upper mold and the lower mold, and the sub-runner part and the gate part are provided only in the upper mold.
本発明によれば、第1図に示すようにまずランナー上側
の気泡が上型に設けたサブランナー13゜ゲート14に
よりキャビティー17a、 17bに案内され、さらに
エアベントによりキャビティー17a、 17bの外側
に逃がされる。次にランナーの気泡のない樹脂がキャビ
ティー17a、 17bに案内され、硬化することによ
って、成形が完了するが、ゲート14が上型Uに設けら
れ、下型りに設けであるレンズ形状部18に向けてゲー
ト14の角度を設定することができるので、レンズ形状
部18における未充填不良が極めて発生しにくい。According to the present invention, as shown in FIG. 1, air bubbles on the upper side of the runner are first guided into the cavities 17a and 17b by the sub-runner 13° gate 14 provided in the upper mold, and then guided to the outside of the cavities 17a and 17b by an air vent. is forced to escape. Next, the bubble-free resin of the runner is guided into the cavities 17a and 17b and cured to complete the molding process.A gate 14 is provided on the upper mold U, and a lens-shaped portion 18 is provided on the lower mold. Since the angle of the gate 14 can be set toward , it is extremely unlikely that the lens-shaped portion 18 will be unfilled.
以下、本発明の一実施例を図により説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第1図、第2図は本発明の一実施例を示すものであり、
第1図、第2図では上型及び下型はその外形形態を省略
し、その内部に形成されるランナー、サブランナー、ゲ
ート、キャビティーを図示し、さらに樹脂部分は上型と
下型とで斜線の向きを逆方向にして図示しである。FIG. 1 and FIG. 2 show an embodiment of the present invention,
In Figures 1 and 2, the external shapes of the upper and lower molds are omitted, and the runners, sub-runners, gates, and cavities formed inside are illustrated, and the resin parts are shown in the upper and lower molds. The diagram is shown with the diagonal lines in the opposite direction.
第1図において、本発明は上型Uと下型りとの両方に上
型ランナー11.下型ランナー12をそれぞれ設け、か
つサブランナー13及びゲート14.14を上型Uのみ
に設け、下型りに設けであるレンズ形状部18に向けて
ゲート14を傾斜したものである。In FIG. 1, the present invention has an upper mold runner 11. Lower mold runners 12 are provided, and sub-runners 13 and gates 14 and 14 are provided only on the upper mold U, and the gate 14 is inclined toward the lens-shaped portion 18 provided on the lower mold.
実施例において、ランナー上側の気泡は上型Uに設けた
サブランナー13により、まずキャビティー17a、
17b内に案内され、さらにエアベントによリキャビテ
ィー外部に逃がされ、次にランナー下側の気泡のない樹
脂がゲート14を通してキャビティー17a、 17b
内に案内されるため、最終的に気泡が残らず、かつゲー
ト14が上型Uに設けられ下型りに設けられているレン
ズ形状部18に向けて角度を設定されているため、レン
ズ形状部18における未充填は起きにくい。In the embodiment, air bubbles on the upper side of the runner are first moved into cavities 17a,
The resin without air bubbles under the runner is guided into the cavities 17a and 17b through the gate 14, and then released to the outside of the cavity by an air vent.
Since the gate 14 is guided inward, no air bubbles remain in the end, and since the gate 14 is set at an angle toward the lens-shaped portion 18 provided on the upper mold U and the lower mold, the lens shape is Unfilled portion 18 is unlikely to occur.
以上説明したように本発明は光学導体装置のトランスフ
ァーモールドにおける樹脂成形装置において、金型の上
型及び下型の両方にランナーを設け、かつサブランナー
、ゲートを上型のみに設けることにより、光学導体装置
の樹脂パッケージ内の気泡残り不良及びレンズ形状部の
未充填不良を極めて少なくすることができ、歩留り向上
が期待できる効果を有するものである。As explained above, the present invention provides a resin molding apparatus for transfer molding an optical conductor device. This has the effect that it is possible to extremely reduce defects in which air bubbles remain in the resin package of the conductor device and defects in which the lens-shaped portion is not filled, and an improvement in yield can be expected.
第1図は本発明の一実施例を示す構成図、第2図は同断
面図、第3図及び第4図は従来のトランスファーモール
ド装置を示す構成図である。FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a sectional view thereof, and FIGS. 3 and 4 are block diagrams showing a conventional transfer molding apparatus.
Claims (1)
脂成形を行うトランスファーモールド装置において、金
型の上型と下型の両方にランナー部を設け、かつサブラ
ンナー部及びゲート部を上型のみに設けたことを特徴と
する光学導体装置のトランスファーモールド装置。(1) In a transfer molding device that performs resin molding using a mold consisting of at least an upper mold and a lower mold, a runner part is provided in both the upper mold and the lower mold, and a sub-runner part and a gate part are provided. A transfer molding device for an optical conductor device, characterized in that it is provided only on the upper mold.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61300839A JPS63153869A (en) | 1986-12-17 | 1986-12-17 | Transfer molding equipment for optical semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61300839A JPS63153869A (en) | 1986-12-17 | 1986-12-17 | Transfer molding equipment for optical semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63153869A true JPS63153869A (en) | 1988-06-27 |
Family
ID=17889734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61300839A Pending JPS63153869A (en) | 1986-12-17 | 1986-12-17 | Transfer molding equipment for optical semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63153869A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02100374A (en) * | 1988-10-06 | 1990-04-12 | Fuji Electric Co Ltd | Transparent-rein-sealed semiconductor device |
JPH0412537A (en) * | 1990-05-01 | 1992-01-17 | Toshiba Corp | Mold for resin-sealing of semiconductor device |
-
1986
- 1986-12-17 JP JP61300839A patent/JPS63153869A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02100374A (en) * | 1988-10-06 | 1990-04-12 | Fuji Electric Co Ltd | Transparent-rein-sealed semiconductor device |
JPH0412537A (en) * | 1990-05-01 | 1992-01-17 | Toshiba Corp | Mold for resin-sealing of semiconductor device |
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