JPS6315360Y2 - - Google Patents

Info

Publication number
JPS6315360Y2
JPS6315360Y2 JP18203984U JP18203984U JPS6315360Y2 JP S6315360 Y2 JPS6315360 Y2 JP S6315360Y2 JP 18203984 U JP18203984 U JP 18203984U JP 18203984 U JP18203984 U JP 18203984U JP S6315360 Y2 JPS6315360 Y2 JP S6315360Y2
Authority
JP
Japan
Prior art keywords
gas phase
mode
polarity
controller
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18203984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6198899U (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18203984U priority Critical patent/JPS6315360Y2/ja
Publication of JPS6198899U publication Critical patent/JPS6198899U/ja
Application granted granted Critical
Publication of JPS6315360Y2 publication Critical patent/JPS6315360Y2/ja
Expired legal-status Critical Current

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  • Paper (AREA)
JP18203984U 1984-11-30 1984-11-30 Expired JPS6315360Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18203984U JPS6315360Y2 (no) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18203984U JPS6315360Y2 (no) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6198899U JPS6198899U (no) 1986-06-24
JPS6315360Y2 true JPS6315360Y2 (no) 1988-04-28

Family

ID=30739575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18203984U Expired JPS6315360Y2 (no) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPS6315360Y2 (no)

Also Published As

Publication number Publication date
JPS6198899U (no) 1986-06-24

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