JPS63153522U - - Google Patents
Info
- Publication number
- JPS63153522U JPS63153522U JP4604687U JP4604687U JPS63153522U JP S63153522 U JPS63153522 U JP S63153522U JP 4604687 U JP4604687 U JP 4604687U JP 4604687 U JP4604687 U JP 4604687U JP S63153522 U JPS63153522 U JP S63153522U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- heat treatment
- core tube
- furnace
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4604687U JPS63153522U (is) | 1987-03-27 | 1987-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4604687U JPS63153522U (is) | 1987-03-27 | 1987-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153522U true JPS63153522U (is) | 1988-10-07 |
Family
ID=30865345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4604687U Pending JPS63153522U (is) | 1987-03-27 | 1987-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153522U (is) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015140870A1 (ja) * | 2014-03-17 | 2015-09-24 | 三菱電機株式会社 | 冷凍サイクル装置 |
-
1987
- 1987-03-27 JP JP4604687U patent/JPS63153522U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015140870A1 (ja) * | 2014-03-17 | 2015-09-24 | 三菱電機株式会社 | 冷凍サイクル装置 |
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