JPS6315048U - - Google Patents

Info

Publication number

JPS6315048U

JPS6315048U JP10892586U JP10892586U JPS6315048U JP S6315048 U JPS6315048 U JP S6315048U JP 10892586 U JP10892586 U JP 10892586U JP 10892586 U JP10892586 U JP 10892586U JP S6315048 U JPS6315048 U JP S6315048U

Authority

JP

Japan

Prior art keywords

wafer

semiconductor

liquid tank

processing liquid

storage section

Prior art date

1986-07-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000007788 liquid Substances 0.000 claims description 6
• 239000000126 substance Substances 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 2
• 230000007246 mechanism Effects 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 9
• 230000007723 transport mechanism Effects 0.000 claims 1
• 238000004140 cleaning Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (2)