JPS6314857A - Apparatus for producing electrophotographic sensitive body - Google Patents

Abstract

PURPOSE:To easily form a photosensitive layer consisting of different multiple layers by housing one heating source provided with a control system and plural vapor deposition raw material vessels into one evaporating source and varying the heating up rates by heating with the vessels. CONSTITUTION:Two pieces of the evaporating raw material vessels 3 and one piece of another evaporating raw material vessel 4 are disposed in the evaporating source 2 having a slit-shaped aperture 1 and the vessel 4 is formed larger in size, wall thickness and heat capacity. A heater 5 is disposed to the vessels 3 so as to be more liable to receive heat than the vessel 4. The raw material 6 for a 1st layer is charged into the vessels 3 and the raw material 7 for a 2nd layer into the vessel 4 in the above- mentioned constitution. The raw materials are heated by the heater 5. Since the vessels 3 are liable to receive heat, the temp. thereof rises earlier and the raw material 6 for the 1st layer evaporates first. The vapor thereof emits from the aperture 1 to form the 1st layer on a substrate. On the other hand, the temp. of the vessel 4 rises slowly and the raw material 7 for the 2nd layer evaporates with a delay to form the 2nd layer on the substrate. The photosensitive layer having the two-layered structure is thus formed.

Description

[Detailed description of the invention] [Technical field to which the invention pertains]

The present invention is based on 5e-Te system, 5e-As system + 5e-Te-
The present invention relates to an electrophotographic photoreceptor manufacturing apparatus that forms a photosensitive layer consisting of two or more layers having different compositions on a substrate by vacuum-depositing an As-based material or the like.

[Prior art and its problems]

A general method for forming a multilayered photosensitive layer with two or more different compositions by vacuum evaporation is to use as many evaporation sources and controls as there are photosensitive layers. A method is used in which one system is prepared, raw materials corresponding to the composition of each layer are introduced into each evaporation source, each is controlled independently, and the evaporation is performed sequentially. However, this method has the disadvantage that it is necessary to provide as many evaporation sources and control systems as there are layers, which increases the equipment cost. Another method is to use one evaporation source, first vacuum evaporate the first layer, then introduce air into the vacuum chamber and open it, then introduce the raw material for the second layer into the evaporation source and perform vacuum evaporation. There is a way. However, this method has the disadvantage that the cycle of vacuum evacuation, vapor deposition, and leakage must be repeated for the number of layers, and it takes time to form the photosensitive layer.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide an electrophotographic photoreceptor manufacturing apparatus capable of eliminating the above-mentioned drawbacks and forming multiple photosensitive layers in one evaporation cycle using an evaporation source controlled by one control system. .

[Key points of the invention]

In the present invention, a heating source equipped with one control system and a plurality of evaporation raw material containers are housed in one evaporation source, and the temperature rise rate of each evaporation raw material container when heated by the heating source is different. By changing the positional relationship between the heating source and the raw material container or the shape of each raw material container to make it easier to receive heat from the heating source in the order in which the photosensitive layer is formed, and by changing the heat capacity of the raw material container, the evaporation source can be reduced. Each vapor deposition material is evaporated from each material container in the intended order to achieve the above objective.

[Embodiments of the invention]

FIG. 1 shows a cross section of an evaporation source according to an embodiment of the present invention, in which two evaporation source containers 3 and one other evaporation source container 4 are arranged in an evaporation source 2 having a slit-shaped entrance 1. and four 2000 W infrared heaters 5 are arranged between them. The raw material container 4 is larger than the raw material container 3, and its wall thickness is increased by 3 mm for 1 fl of the container 3, thereby increasing the heat capacity. Furthermore, the heater 5 and the raw material container 3.4
By arranging them as shown in the figure, the raw material container 3 receives heat from the heater 5 more easily than the raw material container 4. By using such an evaporation source, a 2N structure photosensitive layer can be formed with one heater control system. That is, when the raw material 6 for the -th calendar month is put into the container 3 and the raw material 7 for the second layer is put into the container 4 and heated by the heater 5, first, the heat capacity is small and it is easy to receive heat from the heater 5. The temperature of the container 3 rises, the raw material 6 begins to evaporate, and the opening 1
The first layer is formed. On the other hand, the temperature of the container 4 rises more slowly than that of the container 3, and the evaporation of the raw material 7 starts later than the evaporation of the raw material 6. As a result, a photosensitive layer having a two-layer structure is formed, in which the first layer is the vapor-deposited layer made of the raw material 6 placed in the container 3, and the second layer is the vapor-deposited layer made of the raw material 7 placed in the container 4. FIG. 2 shows a specific control method of this embodiment. Here, the first layer of the 2N structure photosensitive layer has a film thickness of 20fa. A Se-As layer with an As concentration of 10% by weight was used, and a second layer was made of 5e-AsN with a film thickness of 40 pm and an As concentration of 38.7% by weight. For this purpose, 200g of 5e-As alloy with AslQ degree of 10% by weight was put into the raw material container 3, totaling 400g, and on the other hand, into the raw material container 4, AslQ degree of 10% by weight was added.
% of 5e-As alloy was added, and the inside of the vacuum chamber was heated to 10%.
After exhausting the air to about "" Pa, it was heated with a heater 5. Thermocouples for temperature detection and control are attached to the containers 3 and 4, and the heater power shown in the curve 23 is first applied to the containers 3 and 4.
The temperature was controlled at 450°C. A curve 21 in FIG. 2 shows the temperature change in the container 3, and it took about 10 minutes from the time the set temperature was reached to the end of evaporation. Since the heat capacity of the container 4 is larger than that of the container 3, and the amount of heat received from the heater 5 is also small, the temperature rise of the container 4 shown by the curve 22 is suppressed to 350°C or less until the time when the evaporation of the raw material 6 is completed. Evaporation of 7 does not occur and a first layer of raw material 6 is formed. Thereafter, from time point B, the temperature of the container 4 is controlled at 400 to 500°C to evaporate the raw material 7 to form a second layer. C indicates completion of evaporation of the raw material 7. In this way, a photoreceptor having a two-layer structure of photoreceptor layers can be manufactured using one evaporation source and a heating control system.

【Effect of the invention】

According to the present invention, by changing the relative position or heat capacity of a plurality of containers of different raw materials housed in one evaporation source with respect to the heating source, the rate of temperature rise due to the heating source controlled by one control system can be adjusted. A multilayered photosensitive layer can be formed by evaporating each raw material in a desired order. As a result, the water is controlled by one evaporation source and one control system. a
Since a photosensitive layer with a multilayer structure can be easily formed using simple equipment, equipment costs and man-hours can be reduced.
The effect on id is extremely large.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view of an evaporation source according to an embodiment of the present invention, and Fig. 2 is a graph showing the relationship between the temperature of each raw material container and heater power over time in the evaporation process using the evaporation source of Fig. 1. be. l: opening, 2: evaporation source, 3.4: vapor deposition raw material container, 5;
heater.

Claims (1)

[Scope of Claims] 1) In a device for forming multilayer photosensitive layers with different compositions on a substrate by evaporating vapor deposition raw materials from an evaporation source, a heating source having one control system in one evaporation source; An electrophotographic photoreceptor manufacturing apparatus characterized in that a plurality of evaporation raw material containers are accommodated, and the temperature rise rate of each evaporation raw material container when heated by a heating source is different. 2) An electrophotographic photoreceptor manufacturing apparatus according to claim 1, wherein the vapor deposition raw material containers have different heat capacities.