JPS63147816U - - Google Patents
Info
- Publication number
- JPS63147816U JPS63147816U JP3950187U JP3950187U JPS63147816U JP S63147816 U JPS63147816 U JP S63147816U JP 3950187 U JP3950187 U JP 3950187U JP 3950187 U JP3950187 U JP 3950187U JP S63147816 U JPS63147816 U JP S63147816U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- etching
- etching chamber
- magnetic field
- field pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案実施例のＲＩＢＥ装置の概略断
面図、第２図、第３図は磁場パイプの作用を説明
するための説明図である。
１……エツチング室、３……イオン源、１２…
…磁場パイプ形成手段（マグネツトコイル）。
FIG. 1 is a schematic sectional view of a RIBE apparatus according to an embodiment of the present invention, and FIGS. 2 and 3 are explanatory diagrams for explaining the action of the magnetic field pipe. 1... Etching chamber, 3... Ion source, 12...
...Magnetic field pipe forming means (magnetic coil).
Claims (1)
ムを照射して前記エツチング室内に載置された試
料をエツチングする反応性イオンビームエツチン
グ装置において、 イオンビーム照射方向を軸とした磁場パイプを
前記エツチング室内に形成する磁場パイプ形成手
段が備えられてなることを特徴とする反応性イオ
ンビームエツチング装置。[Scope of Claim for Utility Model Registration] In a reactive ion beam etching device that irradiates an ion beam from an ion source toward an etching chamber and etches a sample placed in the etching chamber, the ion beam irradiation direction is the axis. A reactive ion beam etching apparatus comprising a magnetic field pipe forming means for forming a magnetic field pipe within the etching chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3950187U JPS63147816U (en) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3950187U JPS63147816U (en) | 1987-03-18 | 1987-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63147816U true JPS63147816U (en) | 1988-09-29 |
Family
ID=30852726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3950187U Pending JPS63147816U (en) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63147816U (en) |
-
1987
- 1987-03-18 JP JP3950187U patent/JPS63147816U/ja active Pending
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