JPH0339840U - - Google Patents
Info
- Publication number
- JPH0339840U JPH0339840U JP10092389U JP10092389U JPH0339840U JP H0339840 U JPH0339840 U JP H0339840U JP 10092389 U JP10092389 U JP 10092389U JP 10092389 U JP10092389 U JP 10092389U JP H0339840 U JPH0339840 U JP H0339840U
- Authority
- JP
- Japan
- Prior art keywords
- wet processing
- chemical tank
- chemical
- magnetic field
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Description
第１図は、この考案の一実施例に関するウエツ
ト処理装置の薬液槽の断面図、第２図は、一般的
なウエツト処理装置の概略斜視図である。
２……薬液槽、４……磁界発生装置（磁石）、
５……薬液、６……ウエーハ、８……強磁性体汚
染物。
FIG. 1 is a sectional view of a chemical tank of a wet treatment apparatus according to an embodiment of the invention, and FIG. 2 is a schematic perspective view of a general wet treatment apparatus. 2... Chemical solution tank, 4... Magnetic field generator (magnet),
5... Chemical solution, 6... Wafer, 8... Ferromagnetic contaminant.
Claims (1)
を貯める薬液槽を有したウエツト処理装置におい
て、薬液槽内または薬液槽外に磁界発生装置を設
けることを特徴とするウエツト処理装置。 1. A wet processing apparatus having a chemical tank for storing a chemical solution for wet processing semiconductor wafers, characterized in that a magnetic field generating device is provided inside or outside the chemical tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10092389U JPH0339840U (en) | 1989-08-29 | 1989-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10092389U JPH0339840U (en) | 1989-08-29 | 1989-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339840U true JPH0339840U (en) | 1991-04-17 |
Family
ID=31649900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10092389U Pending JPH0339840U (en) | 1989-08-29 | 1989-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339840U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0670000U (en) * | 1993-03-16 | 1994-09-30 | 大信機器株式会社 | Text-to-speech synthesizer using IC card |
-
1989
- 1989-08-29 JP JP10092389U patent/JPH0339840U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0670000U (en) * | 1993-03-16 | 1994-09-30 | 大信機器株式会社 | Text-to-speech synthesizer using IC card |