JPH0379156U - - Google Patents
Info
- Publication number
- JPH0379156U JPH0379156U JP14087489U JP14087489U JPH0379156U JP H0379156 U JPH0379156 U JP H0379156U JP 14087489 U JP14087489 U JP 14087489U JP 14087489 U JP14087489 U JP 14087489U JP H0379156 U JPH0379156 U JP H0379156U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- cup
- aperture
- faraday cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
添付図面は本考案に係る荷電粒子線検出器の一
例を示す構成概略図である。
１……フランジ、２……真空室側壁、３……絞
り板、４ａ，４ｂ，４ｃ……絞り穴、５，１４…
…移動棒、６……絞り板移動機構、７……カツプ
、８……穴、９……電気絶縁体、１０……フアラ
デーカツプ、１１……入射口、１２……リード線
、１３……ハーメチツクシール、１５……カツプ
移動機構、１６，１７……金属ベローズ、１８…
…金属シール。
The accompanying drawing is a schematic configuration diagram showing an example of a charged particle beam detector according to the present invention. 1...Flange, 2...Vacuum chamber side wall, 3...Aperture plate, 4a, 4b, 4c...Aperture hole, 5, 14...
...Moving rod, 6... Aperture plate moving mechanism, 7... Cup, 8... Hole, 9... Electric insulator, 10... Faraday cup, 11... Inlet port, 12... Lead wire, 13... Hardware Meticulous seal, 15... Cup moving mechanism, 16, 17... Metal bellows, 18...
...Metal seal.
Claims (1)
限用の絞り板と、該絞り板の複数の絞り穴のいず
れかを選択してその絞り穴の中心を荷電粒子線光
軸に一致させるための絞り板移動手段と、前記絞
り板の直下に置かれ、かつ上面に前記荷電粒子線
を通過させるための穴を有した中空状のカツプと
、該カツプ内に電気的に絶縁された状態で固定さ
れたフアラデーカツプと、前記カツプを前記荷電
粒子線通路上に挿脱させるためのフアラデーカツ
プ移動手段とを備え、前記カツプ上面を前記絞り
板の下面に略接した状態でこのカツプをフアラデ
ーカツプ移動手段により荷電粒子線通上に挿脱さ
せるように構成したことを特徴とする荷電粒子線
装置における荷電粒子検出器。 A diaphragm plate for limiting irradiation dose having a plurality of aperture holes with different diameters, and a method for selecting one of the plurality of aperture holes of the aperture plate and aligning the center of the aperture hole with the optical axis of the charged particle beam. a hollow cup placed directly below the aperture plate and having a hole in the upper surface for passing the charged particle beam; The Faraday cup is provided with a fixed Faraday cup and a Faraday cup moving means for inserting and removing the cup onto and from the charged particle beam passage, and the Faraday cup is moved by the Faraday cup moving means with the upper surface of the cup substantially in contact with the lower surface of the aperture plate. A charged particle detector in a charged particle beam device, characterized in that it is configured to be inserted into and removed from a charged particle beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14087489U JPH0379156U (en) | 1989-12-05 | 1989-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14087489U JPH0379156U (en) | 1989-12-05 | 1989-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0379156U true JPH0379156U (en) | 1991-08-12 |
Family
ID=31687814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14087489U Pending JPH0379156U (en) | 1989-12-05 | 1989-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0379156U (en) |
-
1989
- 1989-12-05 JP JP14087489U patent/JPH0379156U/ja active Pending