JPS63147811U - - Google Patents

Info

Publication number
JPS63147811U
JPS63147811U JP3849287U JP3849287U JPS63147811U JP S63147811 U JPS63147811 U JP S63147811U JP 3849287 U JP3849287 U JP 3849287U JP 3849287 U JP3849287 U JP 3849287U JP S63147811 U JPS63147811 U JP S63147811U
Authority
JP
Japan
Prior art keywords
cassette
wafers
semiconductor manufacturing
transfer mechanism
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3849287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0534108Y2 (pt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987038492U priority Critical patent/JPH0534108Y2/ja
Publication of JPS63147811U publication Critical patent/JPS63147811U/ja
Application granted granted Critical
Publication of JPH0534108Y2 publication Critical patent/JPH0534108Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987038492U 1987-03-18 1987-03-18 Expired - Lifetime JPH0534108Y2 (pt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987038492U JPH0534108Y2 (pt) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987038492U JPH0534108Y2 (pt) 1987-03-18 1987-03-18

Publications (2)

Publication Number Publication Date
JPS63147811U true JPS63147811U (pt) 1988-09-29
JPH0534108Y2 JPH0534108Y2 (pt) 1993-08-30

Family

ID=30850792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987038492U Expired - Lifetime JPH0534108Y2 (pt) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPH0534108Y2 (pt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06196542A (ja) * 1992-12-24 1994-07-15 Nissin Electric Co Ltd エアーロック室およびそのクリーニング方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972739A (ja) * 1982-10-20 1984-04-24 Hitachi Ltd 真空処理装置
JPS59117108A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 気相成長装置
JPS6173334A (ja) * 1984-09-19 1986-04-15 Hitachi Ltd 処理装置
JPS61111524A (ja) * 1984-11-06 1986-05-29 Denkoo:Kk 縦形半導体熱処理炉

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972739A (ja) * 1982-10-20 1984-04-24 Hitachi Ltd 真空処理装置
JPS59117108A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 気相成長装置
JPS6173334A (ja) * 1984-09-19 1986-04-15 Hitachi Ltd 処理装置
JPS61111524A (ja) * 1984-11-06 1986-05-29 Denkoo:Kk 縦形半導体熱処理炉

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06196542A (ja) * 1992-12-24 1994-07-15 Nissin Electric Co Ltd エアーロック室およびそのクリーニング方法

Also Published As

Publication number Publication date
JPH0534108Y2 (pt) 1993-08-30

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