JPH0367440U - - Google Patents
Info
- Publication number
- JPH0367440U JPH0367440U JP12911289U JP12911289U JPH0367440U JP H0367440 U JPH0367440 U JP H0367440U JP 12911289 U JP12911289 U JP 12911289U JP 12911289 U JP12911289 U JP 12911289U JP H0367440 U JPH0367440 U JP H0367440U
- Authority
- JP
- Japan
- Prior art keywords
- cassette chamber
- static electricity
- semiconductor manufacturing
- installation stand
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005611 electricity Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000003068 static effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12911289U JPH0367440U (pt) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12911289U JPH0367440U (pt) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367440U true JPH0367440U (pt) | 1991-07-01 |
Family
ID=31676771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12911289U Pending JPH0367440U (pt) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367440U (pt) |
-
1989
- 1989-11-06 JP JP12911289U patent/JPH0367440U/ja active Pending