JPS63170950U - - Google Patents
Info
- Publication number
- JPS63170950U JPS63170950U JP6222687U JP6222687U JPS63170950U JP S63170950 U JPS63170950 U JP S63170950U JP 6222687 U JP6222687 U JP 6222687U JP 6222687 U JP6222687 U JP 6222687U JP S63170950 U JPS63170950 U JP S63170950U
- Authority
- JP
- Japan
- Prior art keywords
- box
- maintain
- gas purification
- purification filter
- isolate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000746 purification Methods 0.000 claims description 2
- 230000003749 cleanliness Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6222687U JPS63170950U (pt) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6222687U JPS63170950U (pt) | 1987-04-23 | 1987-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170950U true JPS63170950U (pt) | 1988-11-07 |
Family
ID=30896297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6222687U Pending JPS63170950U (pt) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170950U (pt) |
-
1987
- 1987-04-23 JP JP6222687U patent/JPS63170950U/ja active Pending
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