JPH0472630U - - Google Patents
Info
- Publication number
- JPH0472630U JPH0472630U JP11700890U JP11700890U JPH0472630U JP H0472630 U JPH0472630 U JP H0472630U JP 11700890 U JP11700890 U JP 11700890U JP 11700890 U JP11700890 U JP 11700890U JP H0472630 U JPH0472630 U JP H0472630U
- Authority
- JP
- Japan
- Prior art keywords
- shield box
- prober
- closing mechanism
- gas damper
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11700890U JPH0472630U (pt) | 1990-11-06 | 1990-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11700890U JPH0472630U (pt) | 1990-11-06 | 1990-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472630U true JPH0472630U (pt) | 1992-06-26 |
Family
ID=31864876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11700890U Pending JPH0472630U (pt) | 1990-11-06 | 1990-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472630U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008131048A (ja) * | 2006-11-17 | 2008-06-05 | Suss Microtec Test Systems Gmbh | Ｅｍｉシールド機能を有する半導体検査用プローブステーション |
-
1990
- 1990-11-06 JP JP11700890U patent/JPH0472630U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008131048A (ja) * | 2006-11-17 | 2008-06-05 | Suss Microtec Test Systems Gmbh | Ｅｍｉシールド機能を有する半導体検査用プローブステーション |